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JPS6427852A - Polishing device - Google Patents

Polishing device

Info

Publication number
JPS6427852A
JPS6427852A JP62179837A JP17983787A JPS6427852A JP S6427852 A JPS6427852 A JP S6427852A JP 62179837 A JP62179837 A JP 62179837A JP 17983787 A JP17983787 A JP 17983787A JP S6427852 A JPS6427852 A JP S6427852A
Authority
JP
Japan
Prior art keywords
rotation
work piece
motor
circumferential direction
fed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62179837A
Other languages
Japanese (ja)
Other versions
JPH0716870B2 (en
Inventor
Yuzo Mori
Hideji Horikawa
Nobuaki Konishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koyo Seiko Co Ltd
Original Assignee
Koyo Seiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koyo Seiko Co Ltd filed Critical Koyo Seiko Co Ltd
Priority to JP62179837A priority Critical patent/JPH0716870B2/en
Publication of JPS6427852A publication Critical patent/JPS6427852A/en
Publication of JPH0716870B2 publication Critical patent/JPH0716870B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

PURPOSE:To obtain a specified accuracy in working by a simple control by providing a feeding mechanism displacing the relative position between a rotation drive mechanism and a rotation elastic body in the direction which is perpendicularly intersected with the rotation center axis of the rotation drive mechanism for a work piece. CONSTITUTION:The center point of a work piece 8 is positioned first at the rotation center axis 15 of a motor 14. When the work piece 8 is fed by the motor 14 to the circumferential direction at a controlled speed inputted in advance, a rotation elastic body 5 may be scanned circularly around the surface 8a to be polished. On the other hand, the work piece 8 is fed by the motor 14 to the circumferential direction so as to drive an X table 17 every constant rotation angle or constant time, which situation enables the rotation elastic body 5 to be scanned spirally. In this manner, it is so constituted that the work piece 8 is fed to the circumferential direction by the motor 14, and the work piece 8 is forwarded by the X table 17 to the direction normal to the rotation axis concurrently. When feeding speeds of the motor 14 to the circumferential direction is thereby controlled, various types of working may be processed.
JP62179837A 1987-07-17 1987-07-17 Polishing equipment Expired - Fee Related JPH0716870B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62179837A JPH0716870B2 (en) 1987-07-17 1987-07-17 Polishing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62179837A JPH0716870B2 (en) 1987-07-17 1987-07-17 Polishing equipment

Publications (2)

Publication Number Publication Date
JPS6427852A true JPS6427852A (en) 1989-01-30
JPH0716870B2 JPH0716870B2 (en) 1995-03-01

Family

ID=16072764

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62179837A Expired - Fee Related JPH0716870B2 (en) 1987-07-17 1987-07-17 Polishing equipment

Country Status (1)

Country Link
JP (1) JPH0716870B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006021295A (en) * 2004-07-09 2006-01-26 Yuzo Mori Method and device for processing ultraprecise mirror surface
WO2007018117A1 (en) * 2005-08-05 2007-02-15 Yuzo Mori Electron beam assisted eem method
US8734661B2 (en) 2007-10-15 2014-05-27 Ebara Corporation Flattening method and flattening apparatus

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6446590B1 (en) * 2018-08-09 2018-12-26 国立大学法人 東京大学 Local polishing method, local polishing apparatus, and corrected polishing apparatus using the local polishing apparatus

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006021295A (en) * 2004-07-09 2006-01-26 Yuzo Mori Method and device for processing ultraprecise mirror surface
WO2007018117A1 (en) * 2005-08-05 2007-02-15 Yuzo Mori Electron beam assisted eem method
US8235769B2 (en) 2005-08-05 2012-08-07 Yuzo Mori Electron-beam-assisted EEM method
US8734661B2 (en) 2007-10-15 2014-05-27 Ebara Corporation Flattening method and flattening apparatus
US10297475B2 (en) 2007-10-15 2019-05-21 Ebara Corporation Flattening method and flattening apparatus
US10916455B2 (en) 2007-10-15 2021-02-09 Ebara Corporation Flattening method and flattening apparatus

Also Published As

Publication number Publication date
JPH0716870B2 (en) 1995-03-01

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Legal Events

Date Code Title Description
S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

LAPS Cancellation because of no payment of annual fees