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JPS5397373A - Etching method - Google Patents

Etching method

Info

Publication number
JPS5397373A
JPS5397373A JP1163977A JP1163977A JPS5397373A JP S5397373 A JPS5397373 A JP S5397373A JP 1163977 A JP1163977 A JP 1163977A JP 1163977 A JP1163977 A JP 1163977A JP S5397373 A JPS5397373 A JP S5397373A
Authority
JP
Japan
Prior art keywords
etching method
film
sio
resist
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1163977A
Other languages
Japanese (ja)
Inventor
Hiroshi Takeuchi
Hiroshi Kinoshita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP1163977A priority Critical patent/JPS5397373A/en
Publication of JPS5397373A publication Critical patent/JPS5397373A/en
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)

Abstract

PURPOSE: To remove SiO2 under the resist by covering SiO2 film with the photo resist and exposing the film into CF4 gas plasma and then into HF gas.
COPYRIGHT: (C)1978,JPO&Japio
JP1163977A 1977-02-07 1977-02-07 Etching method Pending JPS5397373A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1163977A JPS5397373A (en) 1977-02-07 1977-02-07 Etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1163977A JPS5397373A (en) 1977-02-07 1977-02-07 Etching method

Publications (1)

Publication Number Publication Date
JPS5397373A true JPS5397373A (en) 1978-08-25

Family

ID=11783503

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1163977A Pending JPS5397373A (en) 1977-02-07 1977-02-07 Etching method

Country Status (1)

Country Link
JP (1) JPS5397373A (en)

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