[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

JPS5391573A - Molecular-beam epitaxial growth equipment - Google Patents

Molecular-beam epitaxial growth equipment

Info

Publication number
JPS5391573A
JPS5391573A JP626977A JP626977A JPS5391573A JP S5391573 A JPS5391573 A JP S5391573A JP 626977 A JP626977 A JP 626977A JP 626977 A JP626977 A JP 626977A JP S5391573 A JPS5391573 A JP S5391573A
Authority
JP
Japan
Prior art keywords
molecular
epitaxial growth
beam epitaxial
growth equipment
equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP626977A
Other languages
Japanese (ja)
Inventor
Toshio Murotani
Kazuaki Segawa
Takuji Shimanoe
Hidejiro Miki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP626977A priority Critical patent/JPS5391573A/en
Publication of JPS5391573A publication Critical patent/JPS5391573A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Abstract

PURPOSE: To obtain variously-combined molecular beams with the use of the only shutter driving device by rotating or moving one sheet of shutter in a molecularbeam epitaxial growh equipment.
COPYRIGHT: (C)1978,JPO&Japio
JP626977A 1977-01-21 1977-01-21 Molecular-beam epitaxial growth equipment Pending JPS5391573A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP626977A JPS5391573A (en) 1977-01-21 1977-01-21 Molecular-beam epitaxial growth equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP626977A JPS5391573A (en) 1977-01-21 1977-01-21 Molecular-beam epitaxial growth equipment

Publications (1)

Publication Number Publication Date
JPS5391573A true JPS5391573A (en) 1978-08-11

Family

ID=11633703

Family Applications (1)

Application Number Title Priority Date Filing Date
JP626977A Pending JPS5391573A (en) 1977-01-21 1977-01-21 Molecular-beam epitaxial growth equipment

Country Status (1)

Country Link
JP (1) JPS5391573A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57121219A (en) * 1981-01-21 1982-07-28 Hitachi Ltd Manufacture of semiconductor device
US5007372A (en) * 1987-12-04 1991-04-16 Research Development Corporation Vacuum depositing apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57121219A (en) * 1981-01-21 1982-07-28 Hitachi Ltd Manufacture of semiconductor device
US5007372A (en) * 1987-12-04 1991-04-16 Research Development Corporation Vacuum depositing apparatus

Similar Documents

Publication Publication Date Title
JPS53104084A (en) Differential minor type governor
JPS52119017A (en) Picture special effect unit
JPS5391573A (en) Molecular-beam epitaxial growth equipment
JPS52136919A (en) Long-acting insecticide
JPS5430135A (en) 4-hydroxy-4-methyl-cyclohexene-2-one-1
JPS5421976A (en) Liquid crystal material
JPS53102696A (en) Electroluminescence display unit
JPS5359032A (en) Repellents to termite for soil application
JPS5416451A (en) 3,5-dichloro-4-fluoropheyl isocyanate and its preparation
JPS51132583A (en) Transfer device
JPS5283708A (en) Desacyl-pepsidin
JPS5216071A (en) Device for pulling out a pole in the turnig tool-machine tool
JPS5419939A (en) Antibiotic xk-62-4 and its preparation
JPS5224537A (en) Slide preparing device
JPS5297938A (en) Antibiotics dmb and preparation thereof
JPS52106672A (en) Device for liquid phase epitaxial growth
JPS5412354A (en) Cyclohexyldichlorosilane
JPS52108962A (en) 2,3-dihydroxy-4-homoisotwistane and preparation thereof
JPS52128309A (en) 1,1-dichloro-4-methyl-1-pentene-3-ol and preparation thereof
JPS5353912A (en) Charp z cnversion unit
JPS52100229A (en) Shutter blade drive means
JPS53148881A (en) Shutter for illuminator
JPS52136920A (en) Long-acting herbicide
JPS51138932A (en) Solar heat collecting device
JPS5396155A (en) Turning drive device