JPS5363976A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS5363976A JPS5363976A JP13913176A JP13913176A JPS5363976A JP S5363976 A JPS5363976 A JP S5363976A JP 13913176 A JP13913176 A JP 13913176A JP 13913176 A JP13913176 A JP 13913176A JP S5363976 A JPS5363976 A JP S5363976A
- Authority
- JP
- Japan
- Prior art keywords
- wirings
- semiconductor device
- width
- superposing
- disposing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To make first wiring to a specified width and thickness in fine pattern and lower current density of this portion by superposing and disposing the wirings of a width narrower than the wirings provided on a semiconductor substrate at the portions of said wirings where relatively large current flows.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51139131A JPS5928990B2 (en) | 1976-11-19 | 1976-11-19 | semiconductor equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51139131A JPS5928990B2 (en) | 1976-11-19 | 1976-11-19 | semiconductor equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5363976A true JPS5363976A (en) | 1978-06-07 |
JPS5928990B2 JPS5928990B2 (en) | 1984-07-17 |
Family
ID=15238239
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51139131A Expired JPS5928990B2 (en) | 1976-11-19 | 1976-11-19 | semiconductor equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5928990B2 (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5737262U (en) * | 1980-08-12 | 1982-02-27 | ||
JPS57112068A (en) * | 1980-12-29 | 1982-07-12 | Fujitsu Ltd | Manufacture of circuit device |
JPS5868948A (en) * | 1981-10-21 | 1983-04-25 | Hitachi Ltd | Semiconductor device |
JPS5929441A (en) * | 1982-08-10 | 1984-02-16 | Mitsubishi Electric Corp | Multilayer wiring structure of semiconductor device |
JPS61279151A (en) * | 1985-06-04 | 1986-12-09 | Nec Ic Microcomput Syst Ltd | Wiring structure of semiconductor device |
JPH02102535A (en) * | 1988-10-12 | 1990-04-16 | Nec Corp | Semiconductor integrated circuit device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5286777A (en) * | 1976-01-14 | 1977-07-19 | Toshiba Corp | Semiconductor device |
-
1976
- 1976-11-19 JP JP51139131A patent/JPS5928990B2/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5286777A (en) * | 1976-01-14 | 1977-07-19 | Toshiba Corp | Semiconductor device |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5737262U (en) * | 1980-08-12 | 1982-02-27 | ||
JPH0132368Y2 (en) * | 1980-08-12 | 1989-10-03 | ||
JPS57112068A (en) * | 1980-12-29 | 1982-07-12 | Fujitsu Ltd | Manufacture of circuit device |
JPS5868948A (en) * | 1981-10-21 | 1983-04-25 | Hitachi Ltd | Semiconductor device |
JPS5929441A (en) * | 1982-08-10 | 1984-02-16 | Mitsubishi Electric Corp | Multilayer wiring structure of semiconductor device |
JPS61279151A (en) * | 1985-06-04 | 1986-12-09 | Nec Ic Microcomput Syst Ltd | Wiring structure of semiconductor device |
JPH02102535A (en) * | 1988-10-12 | 1990-04-16 | Nec Corp | Semiconductor integrated circuit device |
Also Published As
Publication number | Publication date |
---|---|
JPS5928990B2 (en) | 1984-07-17 |
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