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JPS535573A - Photo mask for semiconductor device - Google Patents

Photo mask for semiconductor device

Info

Publication number
JPS535573A
JPS535573A JP7922176A JP7922176A JPS535573A JP S535573 A JPS535573 A JP S535573A JP 7922176 A JP7922176 A JP 7922176A JP 7922176 A JP7922176 A JP 7922176A JP S535573 A JPS535573 A JP S535573A
Authority
JP
Japan
Prior art keywords
semiconductor device
photo mask
mask
wafer
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7922176A
Other languages
Japanese (ja)
Inventor
Hideaki Shimoda
Hiroshi Kuroda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP7922176A priority Critical patent/JPS535573A/en
Publication of JPS535573A publication Critical patent/JPS535573A/en
Pending legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE: To increase the mask matching accuracy using a mask which contains pierced hole or groove at the area corresponding to the scribe region of a wafer.
COPYRIGHT: (C)1978,JPO&Japio
JP7922176A 1976-07-02 1976-07-02 Photo mask for semiconductor device Pending JPS535573A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7922176A JPS535573A (en) 1976-07-02 1976-07-02 Photo mask for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7922176A JPS535573A (en) 1976-07-02 1976-07-02 Photo mask for semiconductor device

Publications (1)

Publication Number Publication Date
JPS535573A true JPS535573A (en) 1978-01-19

Family

ID=13683852

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7922176A Pending JPS535573A (en) 1976-07-02 1976-07-02 Photo mask for semiconductor device

Country Status (1)

Country Link
JP (1) JPS535573A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5376397A (en) * 1976-12-18 1978-07-06 Agency Of Ind Science & Technol Photo mask for manufacturing magnetic bubble element
JPS54154608A (en) * 1978-05-26 1979-12-05 Komori Printing Mach Paper jamming detector for rotary press with wound paper
JPH0466158U (en) * 1990-10-08 1992-06-10

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5376397A (en) * 1976-12-18 1978-07-06 Agency Of Ind Science & Technol Photo mask for manufacturing magnetic bubble element
JPS6019159B2 (en) * 1976-12-18 1985-05-14 工業技術院長 Photomask for magnetic bubble element production
JPS54154608A (en) * 1978-05-26 1979-12-05 Komori Printing Mach Paper jamming detector for rotary press with wound paper
JPH0466158U (en) * 1990-10-08 1992-06-10

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