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JPS5339156A - Pellet position detecting apparatus - Google Patents

Pellet position detecting apparatus

Info

Publication number
JPS5339156A
JPS5339156A JP11348676A JP11348676A JPS5339156A JP S5339156 A JPS5339156 A JP S5339156A JP 11348676 A JP11348676 A JP 11348676A JP 11348676 A JP11348676 A JP 11348676A JP S5339156 A JPS5339156 A JP S5339156A
Authority
JP
Japan
Prior art keywords
detecting apparatus
position detecting
pellet position
pellets
pellet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11348676A
Other languages
Japanese (ja)
Inventor
Masayuki Naruse
Shige Yamada
Masanao Shimada
Kenichi Igarashi
Jo Morishita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP11348676A priority Critical patent/JPS5339156A/en
Publication of JPS5339156A publication Critical patent/JPS5339156A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/0554External layer
    • H01L2224/0555Shape
    • H01L2224/05552Shape in top view
    • H01L2224/05554Shape in top view being square
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78Apparatus for connecting with wire connectors

Landscapes

  • Control Of Position Or Direction (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Wire Bonding (AREA)

Abstract

PURPOSE: To detect the position of patterns highly accurately without being affected by the size of the entire pattern part by deciding the two sides arrayed with pads on pellets and comparing with a reference straight line in a position detecting apparatus of pellets on IC chips.
COPYRIGHT: (C)1978,JPO&Japio
JP11348676A 1976-09-21 1976-09-21 Pellet position detecting apparatus Pending JPS5339156A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11348676A JPS5339156A (en) 1976-09-21 1976-09-21 Pellet position detecting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11348676A JPS5339156A (en) 1976-09-21 1976-09-21 Pellet position detecting apparatus

Publications (1)

Publication Number Publication Date
JPS5339156A true JPS5339156A (en) 1978-04-10

Family

ID=14613499

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11348676A Pending JPS5339156A (en) 1976-09-21 1976-09-21 Pellet position detecting apparatus

Country Status (1)

Country Link
JP (1) JPS5339156A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61153503A (en) * 1984-12-26 1986-07-12 Nec Kansai Ltd Detecting method of position of work
JPS61223504A (en) * 1985-03-29 1986-10-04 Fuji Electric Co Ltd Method for measuring center position and angle of inclination of object
JPS62186382A (en) * 1986-02-13 1987-08-14 Fuji Electric Co Ltd Pin arrangement inspection system for object having plural pins
JPS62229010A (en) * 1986-03-31 1987-10-07 Agency Of Ind Science & Technol Automatic measuring method for positional deviation and angle of attitude of object having straight part
JPS62229011A (en) * 1986-03-31 1987-10-07 Agency Of Ind Science & Technol Automatic measuring method for attitude and dimensions of object having straight part
JPS62229014A (en) * 1986-03-31 1987-10-07 Agency Of Ind Science & Technol Automatic measuring method for positional deviations and angle of attitude of object having square part
JPH05160192A (en) * 1991-12-06 1993-06-25 Toshiba Corp Semiconductor fabricating system

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61153503A (en) * 1984-12-26 1986-07-12 Nec Kansai Ltd Detecting method of position of work
JPS61223504A (en) * 1985-03-29 1986-10-04 Fuji Electric Co Ltd Method for measuring center position and angle of inclination of object
JPS62186382A (en) * 1986-02-13 1987-08-14 Fuji Electric Co Ltd Pin arrangement inspection system for object having plural pins
JPS62229010A (en) * 1986-03-31 1987-10-07 Agency Of Ind Science & Technol Automatic measuring method for positional deviation and angle of attitude of object having straight part
JPS62229011A (en) * 1986-03-31 1987-10-07 Agency Of Ind Science & Technol Automatic measuring method for attitude and dimensions of object having straight part
JPS62229014A (en) * 1986-03-31 1987-10-07 Agency Of Ind Science & Technol Automatic measuring method for positional deviations and angle of attitude of object having square part
JPH05160192A (en) * 1991-12-06 1993-06-25 Toshiba Corp Semiconductor fabricating system

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