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JPS5320875A - Semiconductor integrated circuit device - Google Patents

Semiconductor integrated circuit device

Info

Publication number
JPS5320875A
JPS5320875A JP9553276A JP9553276A JPS5320875A JP S5320875 A JPS5320875 A JP S5320875A JP 9553276 A JP9553276 A JP 9553276A JP 9553276 A JP9553276 A JP 9553276A JP S5320875 A JPS5320875 A JP S5320875A
Authority
JP
Japan
Prior art keywords
integrated circuit
semiconductor integrated
circuit device
layer
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9553276A
Other languages
Japanese (ja)
Inventor
Kazuhiro Toyoda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP9553276A priority Critical patent/JPS5320875A/en
Publication of JPS5320875A publication Critical patent/JPS5320875A/en
Pending legal-status Critical Current

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  • Element Separation (AREA)

Abstract

PURPOSE: A IC device of high reliability is readily obtained by laminating an n+ layer and an n layer on the (100) plane of a p type substrate and isolating these layers with V grooves reaching the substrate.
COPYRIGHT: (C)1978,JPO&Japio
JP9553276A 1976-08-11 1976-08-11 Semiconductor integrated circuit device Pending JPS5320875A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9553276A JPS5320875A (en) 1976-08-11 1976-08-11 Semiconductor integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9553276A JPS5320875A (en) 1976-08-11 1976-08-11 Semiconductor integrated circuit device

Publications (1)

Publication Number Publication Date
JPS5320875A true JPS5320875A (en) 1978-02-25

Family

ID=14140156

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9553276A Pending JPS5320875A (en) 1976-08-11 1976-08-11 Semiconductor integrated circuit device

Country Status (1)

Country Link
JP (1) JPS5320875A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5578542A (en) * 1978-12-11 1980-06-13 Seiko Instr & Electronics Ltd Manufacture of semiconductor device
JPS55153342A (en) * 1979-05-18 1980-11-29 Fujitsu Ltd Semiconductor device and its manufacture

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4855679A (en) * 1971-11-12 1973-08-04
JPS4986490A (en) * 1972-12-23 1974-08-19
JPS5152286A (en) * 1974-11-01 1976-05-08 Iwatsu Electric Co Ltd Handotaisochino sakuseihoho

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4855679A (en) * 1971-11-12 1973-08-04
JPS4986490A (en) * 1972-12-23 1974-08-19
JPS5152286A (en) * 1974-11-01 1976-05-08 Iwatsu Electric Co Ltd Handotaisochino sakuseihoho

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5578542A (en) * 1978-12-11 1980-06-13 Seiko Instr & Electronics Ltd Manufacture of semiconductor device
JPS55153342A (en) * 1979-05-18 1980-11-29 Fujitsu Ltd Semiconductor device and its manufacture

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