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JPS5316658A - Gas flow detector - Google Patents

Gas flow detector

Info

Publication number
JPS5316658A
JPS5316658A JP6977077A JP6977077A JPS5316658A JP S5316658 A JPS5316658 A JP S5316658A JP 6977077 A JP6977077 A JP 6977077A JP 6977077 A JP6977077 A JP 6977077A JP S5316658 A JPS5316658 A JP S5316658A
Authority
JP
Japan
Prior art keywords
gas flow
flow detector
detector
gas
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6977077A
Other languages
Japanese (ja)
Other versions
JPS61567B2 (en
Inventor
Jiei Ozuboon Jiyon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Science and Technology Agency
Original Assignee
Research Development Corp of Japan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US05/779,557 external-priority patent/US4083245A/en
Application filed by Research Development Corp of Japan filed Critical Research Development Corp of Japan
Publication of JPS5316658A publication Critical patent/JPS5316658A/en
Publication of JPS61567B2 publication Critical patent/JPS61567B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/40—Details of construction of the flow constriction devices
    • G01F1/42—Orifices or nozzles
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/08—Measuring devices for evaluating the respiratory organs
    • A61B5/087—Measuring breath flow
    • A61B5/0876—Measuring breath flow using means deflected by the fluid stream, e.g. flaps

Landscapes

  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Biomedical Technology (AREA)
  • Medical Informatics (AREA)
  • Pulmonology (AREA)
  • General Physics & Mathematics (AREA)
  • Biophysics (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Physiology (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Measuring Volume Flow (AREA)
  • Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
JP6977077A 1976-07-29 1977-06-13 Gas flow detector Granted JPS5316658A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US70986776A 1976-07-29 1976-07-29
US05/779,557 US4083245A (en) 1977-03-21 1977-03-21 Variable orifice gas flow sensing head

Publications (2)

Publication Number Publication Date
JPS5316658A true JPS5316658A (en) 1978-02-15
JPS61567B2 JPS61567B2 (en) 1986-01-09

Family

ID=27108328

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6977077A Granted JPS5316658A (en) 1976-07-29 1977-06-13 Gas flow detector

Country Status (5)

Country Link
JP (1) JPS5316658A (en)
CA (1) CA1069342A (en)
DE (1) DE2723337A1 (en)
FR (1) FR2360063A1 (en)
SE (1) SE432023B (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6256820A (en) * 1985-09-06 1987-03-12 Shinmeguro Keiki Kk Throttle device for flow rate measurement
JPH01311229A (en) * 1988-03-08 1989-12-15 Ppg Hellige Bv Differential pressure measuring apparatus for bidirectional gas flow
JP2017531185A (en) * 2014-10-08 2017-10-19 ディーテリヒ・スタンダード・インコーポレーテッド Integrated orifice plate assembly
JP2020091289A (en) * 2018-12-03 2020-06-11 ズス・マイクロテック・リソグラフィ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツングＳｕｓｓ ＭｉｃｒｏＴｅｃ Ｌｉｔｈｏｇｒａｐｈｙ ＧｍｂＨ Apparatus for measuring fluid flow through pipe of semiconductor manufacturing device

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4197857A (en) * 1978-04-06 1980-04-15 Research Development Corporation System for measurement of oxygen uptake and respiratory quotient
DE3020265C2 (en) * 1979-05-29 1984-03-15 Research Development Corp., San Francisco, Calif. Pneumotachograph
DE3709776A1 (en) * 1987-03-25 1988-10-06 Eckardt Ag Method of measuring the flow of a medium through a pipeline or the like
EP0331773A1 (en) * 1988-03-08 1989-09-13 Dräger Nederland B.V. Flow-resistant pipe for a gas flow meter
CA2803645A1 (en) 2010-06-29 2012-01-05 Rostrum Medical Innovations Inc. Spirometer breathing tube with compound membrane

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2989866A (en) * 1956-01-03 1961-06-27 Bendix Corp Cantilever beam flowmeter

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6256820A (en) * 1985-09-06 1987-03-12 Shinmeguro Keiki Kk Throttle device for flow rate measurement
JPH0327848B2 (en) * 1985-09-06 1991-04-17 Shinmeguro Keiki Kk
JPH01311229A (en) * 1988-03-08 1989-12-15 Ppg Hellige Bv Differential pressure measuring apparatus for bidirectional gas flow
JP2017531185A (en) * 2014-10-08 2017-10-19 ディーテリヒ・スタンダード・インコーポレーテッド Integrated orifice plate assembly
JP2019095459A (en) * 2014-10-08 2019-06-20 ディーテリヒ・スタンダード・インコーポレーテッド Integrated orifice plate assembly
JP2020091289A (en) * 2018-12-03 2020-06-11 ズス・マイクロテック・リソグラフィ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツングＳｕｓｓ ＭｉｃｒｏＴｅｃ Ｌｉｔｈｏｇｒａｐｈｙ ＧｍｂＨ Apparatus for measuring fluid flow through pipe of semiconductor manufacturing device

Also Published As

Publication number Publication date
DE2723337A1 (en) 1978-02-02
FR2360063A1 (en) 1978-02-24
SE7705919L (en) 1978-01-30
SE432023B (en) 1984-03-12
CA1069342A (en) 1980-01-08
JPS61567B2 (en) 1986-01-09

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