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JPS53142334A - Glow discharge surface treating apparatus - Google Patents

Glow discharge surface treating apparatus

Info

Publication number
JPS53142334A
JPS53142334A JP5634277A JP5634277A JPS53142334A JP S53142334 A JPS53142334 A JP S53142334A JP 5634277 A JP5634277 A JP 5634277A JP 5634277 A JP5634277 A JP 5634277A JP S53142334 A JPS53142334 A JP S53142334A
Authority
JP
Japan
Prior art keywords
treating apparatus
glow discharge
discharge surface
surface treating
carthode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5634277A
Other languages
Japanese (ja)
Other versions
JPS5848625B2 (en
Inventor
Naotatsu Asahi
Shizuka Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5634277A priority Critical patent/JPS5848625B2/en
Publication of JPS53142334A publication Critical patent/JPS53142334A/en
Publication of JPS5848625B2 publication Critical patent/JPS5848625B2/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)

Abstract

PURPOSE:To provide the title apparatus in which heat loss is reduced, high temp. treatment can by carried out, and many parts of different shapes can be treated in the same vessel by providing other carthode of a predetermined area behind a cathode opposite to an anode.
JP5634277A 1977-05-18 1977-05-18 Glow discharge surface treatment equipment Expired JPS5848625B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5634277A JPS5848625B2 (en) 1977-05-18 1977-05-18 Glow discharge surface treatment equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5634277A JPS5848625B2 (en) 1977-05-18 1977-05-18 Glow discharge surface treatment equipment

Publications (2)

Publication Number Publication Date
JPS53142334A true JPS53142334A (en) 1978-12-12
JPS5848625B2 JPS5848625B2 (en) 1983-10-29

Family

ID=13024543

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5634277A Expired JPS5848625B2 (en) 1977-05-18 1977-05-18 Glow discharge surface treatment equipment

Country Status (1)

Country Link
JP (1) JPS5848625B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55103539U (en) * 1979-01-16 1980-07-19
JPS56158814A (en) * 1980-05-09 1981-12-07 Hitachi Ltd Method and device for heat treatment
JPS56159003A (en) * 1980-05-09 1981-12-08 Hitachi Ltd Method of treating conductive member

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55103539U (en) * 1979-01-16 1980-07-19
JPS56158814A (en) * 1980-05-09 1981-12-07 Hitachi Ltd Method and device for heat treatment
JPS56159003A (en) * 1980-05-09 1981-12-08 Hitachi Ltd Method of treating conductive member
JPS62995B2 (en) * 1980-05-09 1987-01-10 Hitachi Ltd
JPS6223064B2 (en) * 1980-05-09 1987-05-21 Hitachi Ltd

Also Published As

Publication number Publication date
JPS5848625B2 (en) 1983-10-29

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