JPS53124993A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS53124993A JPS53124993A JP4002177A JP4002177A JPS53124993A JP S53124993 A JPS53124993 A JP S53124993A JP 4002177 A JP4002177 A JP 4002177A JP 4002177 A JP4002177 A JP 4002177A JP S53124993 A JPS53124993 A JP S53124993A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- resist film
- electrode wiring
- patterns
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Weting (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To obtain fine electrode wiring patterns and increase the scale of integration by evaporating Al so as to be buried within photo resist film patterns thereafter removing the resist film patterns at the time of forming Al electrode wiring patterns on a semiconductor substrate.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52040021A JPS5850026B2 (en) | 1977-04-07 | 1977-04-07 | Manufacturing method of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52040021A JPS5850026B2 (en) | 1977-04-07 | 1977-04-07 | Manufacturing method of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53124993A true JPS53124993A (en) | 1978-10-31 |
JPS5850026B2 JPS5850026B2 (en) | 1983-11-08 |
Family
ID=12569241
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP52040021A Expired JPS5850026B2 (en) | 1977-04-07 | 1977-04-07 | Manufacturing method of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5850026B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS613038U (en) * | 1984-06-07 | 1986-01-09 | 新明和オ−トエンジニアリング株式会社 | Loading platform device for cargo handling vehicles |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50153870A (en) * | 1974-05-30 | 1975-12-11 |
-
1977
- 1977-04-07 JP JP52040021A patent/JPS5850026B2/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50153870A (en) * | 1974-05-30 | 1975-12-11 |
Also Published As
Publication number | Publication date |
---|---|
JPS5850026B2 (en) | 1983-11-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS52153384A (en) | Preparation of semiconductor device | |
JPS5255869A (en) | Production of semiconductor device | |
JPS52136590A (en) | Production of semiconductor device | |
JPS5389673A (en) | Fine pattern forming method of semiconductor device | |
JPS53124993A (en) | Production of semiconductor device | |
JPS5363871A (en) | Production of semiconductor device | |
JPS53127266A (en) | Forming method of marker | |
JPS5271978A (en) | Production of semiconductor device | |
JPS5387668A (en) | Forming method of patterns | |
JPS52103964A (en) | Manufacture for semiconductor device | |
JPS53120376A (en) | Production of semiconductor device | |
JPS5267271A (en) | Formation of through-hole onto semiconductor substrate | |
JPS5432068A (en) | Manufacture of semiconductor device | |
JPS545659A (en) | Manufacture of semiconductor device | |
JPS53121468A (en) | Manufacture for semiconductor device | |
JPS5347281A (en) | Production of semiconductor device | |
JPS52147084A (en) | Production of semiconductor device | |
JPS5427372A (en) | Manufacture of semiconductor device | |
JPS53136493A (en) | Manufacture for semiconductor device | |
JPS547867A (en) | Manufacture for semiconductor device | |
JPS53108773A (en) | Production of semiconductor device | |
JPS5286783A (en) | Production of semiconductor device | |
JPS53148392A (en) | Manufacture for semiconductor device | |
JPS5428580A (en) | Manufacture of semiconductor device | |
JPS5378791A (en) | Manufacture of semiconductor device |