JPS529971B2 - - Google Patents
Info
- Publication number
- JPS529971B2 JPS529971B2 JP48073699A JP7369973A JPS529971B2 JP S529971 B2 JPS529971 B2 JP S529971B2 JP 48073699 A JP48073699 A JP 48073699A JP 7369973 A JP7369973 A JP 7369973A JP S529971 B2 JPS529971 B2 JP S529971B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/248—Components associated with high voltage supply
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Particle Accelerators (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48073699A JPS529971B2 (en) | 1973-07-02 | 1973-07-02 | |
| US484339A US3895254A (en) | 1973-07-02 | 1974-06-28 | Charged particle accelerator with integral transformer and shielding means |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48073699A JPS529971B2 (en) | 1973-07-02 | 1973-07-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5023767A JPS5023767A (en) | 1975-03-14 |
| JPS529971B2 true JPS529971B2 (en) | 1977-03-19 |
Family
ID=13525708
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48073699A Expired JPS529971B2 (en) | 1973-07-02 | 1973-07-02 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US3895254A (en) |
| JP (1) | JPS529971B2 (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1454985A (en) * | 1975-07-17 | 1976-11-10 | Inst Yadernoi Fiziki Sibirskog | Charged particle accelerators |
| JPS5268918A (en) * | 1975-12-05 | 1977-06-08 | Hitachi Ltd | Insulated transformer |
| DE3333686A1 (en) * | 1983-09-17 | 1985-04-04 | Leybold-Heraeus GmbH, 5000 Köln | ELECTRON BEAM CANNON FOR HEATING MATERIALS, ESPECIALLY FOR WELDING |
| DE3930200A1 (en) * | 1989-09-09 | 1991-03-14 | Ptr Praezisionstech Gmbh | ELECTRIC BEAM GENERATOR, ESPECIALLY FOR AN ELECTRON BEAM CANNON |
| EP0473216B1 (en) * | 1990-08-10 | 1997-03-19 | Koninklijke Philips Electronics N.V. | Charged particle beam device |
| CN102396035B (en) * | 2009-04-14 | 2014-08-27 | 西门子公司 | Beam head |
| JP5959326B2 (en) * | 2012-06-11 | 2016-08-02 | 株式会社日立ハイテクノロジーズ | Charged particle beam generator, charged particle beam device, high voltage generator, and high potential device |
| CN109275255B (en) * | 2018-10-29 | 2024-04-26 | 同方威视技术股份有限公司 | Filament power supply for electron accelerator and electron accelerator |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1815131A (en) * | 1921-10-14 | 1931-07-21 | Rca Corp | Means for heating filaments |
| US3119931A (en) * | 1960-06-28 | 1964-01-28 | Philips Corp | Circuit means for coupling an x-ray device to a control supply apparatus |
| DE1225775B (en) * | 1963-03-23 | 1966-09-29 | United Aircraft Corp | Method and device for processing a workpiece by means of a charge carrier beam |
| DE1290761B (en) * | 1963-11-22 | 1969-03-13 | Daimler Benz Ag | Piston recess for pistons of rotary piston internal combustion engines with slip engagement |
| JPS5247660B2 (en) * | 1971-11-17 | 1977-12-03 |
-
1973
- 1973-07-02 JP JP48073699A patent/JPS529971B2/ja not_active Expired
-
1974
- 1974-06-28 US US484339A patent/US3895254A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| US3895254A (en) | 1975-07-15 |
| JPS5023767A (en) | 1975-03-14 |