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JPS5283061A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5283061A
JPS5283061A JP15812875A JP15812875A JPS5283061A JP S5283061 A JPS5283061 A JP S5283061A JP 15812875 A JP15812875 A JP 15812875A JP 15812875 A JP15812875 A JP 15812875A JP S5283061 A JPS5283061 A JP S5283061A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
film
sio
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15812875A
Other languages
Japanese (ja)
Inventor
Katsuyuki Inayoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15812875A priority Critical patent/JPS5283061A/en
Publication of JPS5283061A publication Critical patent/JPS5283061A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Local Oxidation Of Silicon (AREA)

Abstract

PURPOSE: To make narrow electrode window opening by forming an SiO2 film on a substrate with an Si3N4 film as a mask an utilizing the entry of the SiO2 under the Si3N4 film.
COPYRIGHT: (C)1977,JPO&Japio
JP15812875A 1975-12-30 1975-12-30 Production of semiconductor device Pending JPS5283061A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15812875A JPS5283061A (en) 1975-12-30 1975-12-30 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15812875A JPS5283061A (en) 1975-12-30 1975-12-30 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5283061A true JPS5283061A (en) 1977-07-11

Family

ID=15664889

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15812875A Pending JPS5283061A (en) 1975-12-30 1975-12-30 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5283061A (en)

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