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JPS5269649A - Semiconductor distortion element - Google Patents

Semiconductor distortion element

Info

Publication number
JPS5269649A
JPS5269649A JP14510775A JP14510775A JPS5269649A JP S5269649 A JPS5269649 A JP S5269649A JP 14510775 A JP14510775 A JP 14510775A JP 14510775 A JP14510775 A JP 14510775A JP S5269649 A JPS5269649 A JP S5269649A
Authority
JP
Japan
Prior art keywords
distortion element
semiconductor distortion
films
semiconductor
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14510775A
Other languages
Japanese (ja)
Inventor
Yasumasa Matsuda
Kazuji Yamada
Satoshi Shimada
Kazumichi Kimura
Toru Sugawara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14510775A priority Critical patent/JPS5269649A/en
Publication of JPS5269649A publication Critical patent/JPS5269649A/en
Pending legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

PURPOSE: To produce a semiconductor distortion element having a higher strength by removing oxidizing films from the cut silicon substrate and etching the substrate covered with protective films except for the portions free from the oxidized films.
COPYRIGHT: (C)1977,JPO&Japio
JP14510775A 1975-12-08 1975-12-08 Semiconductor distortion element Pending JPS5269649A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14510775A JPS5269649A (en) 1975-12-08 1975-12-08 Semiconductor distortion element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14510775A JPS5269649A (en) 1975-12-08 1975-12-08 Semiconductor distortion element

Publications (1)

Publication Number Publication Date
JPS5269649A true JPS5269649A (en) 1977-06-09

Family

ID=15377529

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14510775A Pending JPS5269649A (en) 1975-12-08 1975-12-08 Semiconductor distortion element

Country Status (1)

Country Link
JP (1) JPS5269649A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002005611A (en) * 2000-06-22 2002-01-09 Akira Sugano Strain-detecting device and system thereof
JP2006258674A (en) * 2005-03-18 2006-09-28 Hitachi Ltd Device for measuring mechanical quantity

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002005611A (en) * 2000-06-22 2002-01-09 Akira Sugano Strain-detecting device and system thereof
JP2006258674A (en) * 2005-03-18 2006-09-28 Hitachi Ltd Device for measuring mechanical quantity

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