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JPS5258946A - Displacement detector - Google Patents

Displacement detector

Info

Publication number
JPS5258946A
JPS5258946A JP13495775A JP13495775A JPS5258946A JP S5258946 A JPS5258946 A JP S5258946A JP 13495775 A JP13495775 A JP 13495775A JP 13495775 A JP13495775 A JP 13495775A JP S5258946 A JPS5258946 A JP S5258946A
Authority
JP
Japan
Prior art keywords
displacement detector
singaround
loops
ultrasonic
influence
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13495775A
Other languages
Japanese (ja)
Other versions
JPS5918642B2 (en
Inventor
Yukichi Miyakai
Masanori Noguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Hokushin Electric Corp
Yokogawa Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Hokushin Electric Corp, Yokogawa Electric Works Ltd filed Critical Yokogawa Hokushin Electric Corp
Priority to JP13495775A priority Critical patent/JPS5918642B2/en
Publication of JPS5258946A publication Critical patent/JPS5258946A/en
Publication of JPS5918642B2 publication Critical patent/JPS5918642B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

PURPOSE: By using two sets of ultrasonic singaround loops the structure is made simple preventing the influence of ambinet temperature variation.
COPYRIGHT: (C)1977,JPO&Japio
JP13495775A 1975-11-10 1975-11-10 Strange thing Expired JPS5918642B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13495775A JPS5918642B2 (en) 1975-11-10 1975-11-10 Strange thing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13495775A JPS5918642B2 (en) 1975-11-10 1975-11-10 Strange thing

Publications (2)

Publication Number Publication Date
JPS5258946A true JPS5258946A (en) 1977-05-14
JPS5918642B2 JPS5918642B2 (en) 1984-04-28

Family

ID=15140516

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13495775A Expired JPS5918642B2 (en) 1975-11-10 1975-11-10 Strange thing

Country Status (1)

Country Link
JP (1) JPS5918642B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5611311A (en) * 1979-07-10 1981-02-04 Tdk Corp Distance sensor
JPS57208419A (en) * 1981-06-18 1982-12-21 Tdk Corp Ultrasonic wave sensor
JPS5815351U (en) * 1981-07-22 1983-01-31 日本電気株式会社 Semiconductor inspection equipment
JPH02305449A (en) * 1989-02-28 1990-12-19 Kokusai Electric Co Ltd Wafer counter

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5611311A (en) * 1979-07-10 1981-02-04 Tdk Corp Distance sensor
JPS57208419A (en) * 1981-06-18 1982-12-21 Tdk Corp Ultrasonic wave sensor
JPH023129B2 (en) * 1981-06-18 1990-01-22 Teii Deii Kei Kk
JPS5815351U (en) * 1981-07-22 1983-01-31 日本電気株式会社 Semiconductor inspection equipment
JPH02305449A (en) * 1989-02-28 1990-12-19 Kokusai Electric Co Ltd Wafer counter

Also Published As

Publication number Publication date
JPS5918642B2 (en) 1984-04-28

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