JPS5230154A - Electron microscope - Google Patents

Electron microscope

Info

Publication number: JPS5230154A
Authority: JP; Japan
Prior art keywords: electron microscope; microscope; electron
Prior art date: 1975-09-01
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP10221876A

Other languages

Japanese (ja)

Other versions

JPS5847825B2 (en

Inventor

Baruto Re Poore Yan

Deiideritsuku Buan Deru Kareru

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Koninklijke Philips NV

Original Assignee

Philips Gloeilampenfabrieken NV

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1975-09-01

Filing date

1976-08-28

Publication date

1977-03-07

1976-08-28 Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV

1977-03-07 Publication of JPS5230154A publication Critical patent/JPS5230154A/en

1983-10-25 Publication of JPS5847825B2 publication Critical patent/JPS5847825B2/en

Status Expired legal-status Critical Current

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
- H01J37/1478—Beam tilting means, i.e. for stereoscopy or for beam channelling
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/21—Means for adjusting the focus
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/261—Details
- H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination

Landscapes

Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Electron Sources, Ion Sources (AREA)

JP51102218A 1975-09-01 1976-08-28 electronic microscope Expired JPS5847825B2 (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
NL7510276A NL7510276A (en)	1975-09-01	1975-09-01	ELECTRONIC MICROSKOP.

Publications (2)

Publication Number	Publication Date
JPS5230154A true JPS5230154A (en)	1977-03-07
JPS5847825B2 JPS5847825B2 (en)	1983-10-25

Family

ID=19824390

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP51102218A Expired JPS5847825B2 (en)	1975-09-01	1976-08-28	electronic microscope

Country Status (6)

Country	Link
JP (1)	JPS5847825B2 (en)
CA (1)	CA1061477A (en)
DE (1)	DE2637753A1 (en)
FR (1)	FR2322452A1 (en)
GB (1)	GB1563014A (en)
NL (1)	NL7510276A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS55121259A (en) *	1979-03-14	1980-09-18	Hitachi Ltd	Elelctron microscope

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
NL7804038A (en) *	1978-04-17	1979-10-19	Philips Nv	ELECTRONIC MICROSKOP.
DE69939309D1 (en)	1999-03-31	2008-09-25	Advantest Corp	Particle beam device for obliquely observing a sample

Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5081468A (en) *	1973-11-19	1975-07-02

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
NL245866A (en) *	1958-11-29

1975
- 1975-09-01 NL NL7510276A patent/NL7510276A/en not_active Application Discontinuation
1976
- 1976-08-21 DE DE19762637753 patent/DE2637753A1/en not_active Ceased
- 1976-08-26 CA CA259,926A patent/CA1061477A/en not_active Expired
- 1976-08-27 GB GB3573076A patent/GB1563014A/en not_active Expired
- 1976-08-28 JP JP51102218A patent/JPS5847825B2/en not_active Expired
- 1976-09-01 FR FR7626413A patent/FR2322452A1/en active Granted

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5081468A (en) *	1973-11-19	1975-07-02

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS55121259A (en) *	1979-03-14	1980-09-18	Hitachi Ltd	Elelctron microscope
JPH0324015B2 (en) *	1979-03-14	1991-04-02	Hitachi Ltd

Also Published As

Publication number	Publication date
DE2637753A1 (en)	1977-03-03
JPS5847825B2 (en)	1983-10-25
FR2322452B1 (en)	1980-12-12
GB1563014A (en)	1980-03-19
NL7510276A (en)	1977-03-03
CA1061477A (en)	1979-08-28
FR2322452A1 (en)	1977-03-25

Publication	Publication Date	Title
JPS53147458A (en)	1978-12-22	Electron microscope
JPS5293899A (en)	1977-08-06	Electron irradiator
JPS51141574A (en)	1976-12-06	Ionnplasma electron gun
JPS52101053A (en)	1977-08-24	Electromangetic actuator
JPS51133673A (en)	1976-11-19	Actuator
JPS55143766A (en)	1980-11-10	Electron microscope
GB1550363A (en)	1979-08-15	Envelope
JPS5262855A (en)	1977-05-24	Actuator
ZA764975B (en)	1977-07-27	Flat electron beam addressed device
JPS51127372A (en)	1976-11-06	Actuator
GB1557226A (en)	1979-12-05	Corpuscular beam microscopes
JPS5258550A (en)	1977-05-14	Microscope stage
JPS5238880A (en)	1977-03-25	Transmission scanning electron microscope
JPS526462A (en)	1977-01-18	Particle beam microscope
JPS5245942A (en)	1977-04-12	Hand microscope
JPS51123056A (en)	1976-10-27	Scanning stereoscopic electron microscope
JPS5368562A (en)	1978-06-19	Electron microscope
JPS5282347A (en)	1977-07-09	Two elements condenser for microscope
JPS5230154A (en)	1977-03-07	Electron microscope
JPS5233469A (en)	1977-03-14	Particle beam microscope
HK27281A (en)	1981-07-03	Microscope eyepieces
GB1549257A (en)	1979-08-01	Microscope condenser
GB2013450B (en)	1983-01-12	Electron microscope
GB1548560A (en)	1979-07-18	Electron multiplier
JPS5222547A (en)	1977-02-19	Electron beam device