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JPS5217840A - Differential probe interferometer - Google Patents

Differential probe interferometer

Info

Publication number
JPS5217840A
JPS5217840A JP50094344A JP9434475A JPS5217840A JP S5217840 A JPS5217840 A JP S5217840A JP 50094344 A JP50094344 A JP 50094344A JP 9434475 A JP9434475 A JP 9434475A JP S5217840 A JPS5217840 A JP S5217840A
Authority
JP
Japan
Prior art keywords
differential probe
probe interferometer
interferometer
optical path
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50094344A
Other languages
Japanese (ja)
Other versions
JPS5739363B2 (en
Inventor
Shuzo Hattori
Tadao Hiramatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hagiwara Electric Co Ltd
Original Assignee
Hagiwara Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hagiwara Electric Co Ltd filed Critical Hagiwara Electric Co Ltd
Priority to JP50094344A priority Critical patent/JPS5217840A/en
Publication of JPS5217840A publication Critical patent/JPS5217840A/en
Publication of JPS5739363B2 publication Critical patent/JPS5739363B2/ja
Granted legal-status Critical Current

Links

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  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

PURPOSE: To obtain a diffractive probe interferometer capable of measuring an extremely short interval by effecting measurement of interference using a reference optical path and a measuring optical path.
COPYRIGHT: (C)1977,JPO&Japio
JP50094344A 1975-07-31 1975-07-31 Differential probe interferometer Granted JPS5217840A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50094344A JPS5217840A (en) 1975-07-31 1975-07-31 Differential probe interferometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50094344A JPS5217840A (en) 1975-07-31 1975-07-31 Differential probe interferometer

Publications (2)

Publication Number Publication Date
JPS5217840A true JPS5217840A (en) 1977-02-10
JPS5739363B2 JPS5739363B2 (en) 1982-08-20

Family

ID=14107656

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50094344A Granted JPS5217840A (en) 1975-07-31 1975-07-31 Differential probe interferometer

Country Status (1)

Country Link
JP (1) JPS5217840A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62108713A (en) * 1985-11-07 1987-05-20 Denki Kagaku Kogyo Kk Production of cubic boron nitride

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62108713A (en) * 1985-11-07 1987-05-20 Denki Kagaku Kogyo Kk Production of cubic boron nitride

Also Published As

Publication number Publication date
JPS5739363B2 (en) 1982-08-20

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