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JPS52140385A - Surface inspecting apparatus - Google Patents

Surface inspecting apparatus

Info

Publication number
JPS52140385A
JPS52140385A JP5701976A JP5701976A JPS52140385A JP S52140385 A JPS52140385 A JP S52140385A JP 5701976 A JP5701976 A JP 5701976A JP 5701976 A JP5701976 A JP 5701976A JP S52140385 A JPS52140385 A JP S52140385A
Authority
JP
Japan
Prior art keywords
inspecting apparatus
surface inspecting
discriminate
class
surface defect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5701976A
Other languages
Japanese (ja)
Other versions
JPS5632582B2 (en
Inventor
Tokuji Takahashi
Yuzuru Akimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Konica Minolta Inc
Original Assignee
Konica Minolta Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Konica Minolta Inc filed Critical Konica Minolta Inc
Priority to JP5701976A priority Critical patent/JPS52140385A/en
Publication of JPS52140385A publication Critical patent/JPS52140385A/en
Publication of JPS5632582B2 publication Critical patent/JPS5632582B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To discriminate the class of the surface defect depending on the output delivered from multiple segment of light receivers arranged on the circle concentric to the central light receiver.
JP5701976A 1976-05-18 1976-05-18 Surface inspecting apparatus Granted JPS52140385A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5701976A JPS52140385A (en) 1976-05-18 1976-05-18 Surface inspecting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5701976A JPS52140385A (en) 1976-05-18 1976-05-18 Surface inspecting apparatus

Publications (2)

Publication Number Publication Date
JPS52140385A true JPS52140385A (en) 1977-11-22
JPS5632582B2 JPS5632582B2 (en) 1981-07-29

Family

ID=13043713

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5701976A Granted JPS52140385A (en) 1976-05-18 1976-05-18 Surface inspecting apparatus

Country Status (1)

Country Link
JP (1) JPS52140385A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016014636A (en) * 2014-07-03 2016-01-28 クアーズテック株式会社 Inspection method and inspection apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50110779A (en) * 1974-02-06 1975-09-01

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50110779A (en) * 1974-02-06 1975-09-01

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016014636A (en) * 2014-07-03 2016-01-28 クアーズテック株式会社 Inspection method and inspection apparatus

Also Published As

Publication number Publication date
JPS5632582B2 (en) 1981-07-29

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