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JPS5213776A - Photo-resist pealing method - Google Patents

Photo-resist pealing method

Info

Publication number
JPS5213776A
JPS5213776A JP8924875A JP8924875A JPS5213776A JP S5213776 A JPS5213776 A JP S5213776A JP 8924875 A JP8924875 A JP 8924875A JP 8924875 A JP8924875 A JP 8924875A JP S5213776 A JPS5213776 A JP S5213776A
Authority
JP
Japan
Prior art keywords
pealing
resist
photo
sulphamin
ability
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8924875A
Other languages
Japanese (ja)
Other versions
JPS5718662B2 (en
Inventor
Motoo Akagi
Hajime Morishita
Saburo Nonogaki
Minoru Tanaka
Tadao Kaneko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8924875A priority Critical patent/JPS5213776A/en
Priority to US05/705,529 priority patent/US4101440A/en
Publication of JPS5213776A publication Critical patent/JPS5213776A/en
Publication of JPS5718662B2 publication Critical patent/JPS5718662B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)

Abstract

PURPOSE: A photo-resist pealing method which uses pealing agents being added with sulphamin acid to hydrogen peroxide water which has the strong pealing ability and no corrosive character.
COPYRIGHT: (C)1977,JPO&Japio
JP8924875A 1975-07-23 1975-07-23 Photo-resist pealing method Granted JPS5213776A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP8924875A JPS5213776A (en) 1975-07-23 1975-07-23 Photo-resist pealing method
US05/705,529 US4101440A (en) 1975-07-23 1976-07-15 Chemically digestive agents

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8924875A JPS5213776A (en) 1975-07-23 1975-07-23 Photo-resist pealing method

Publications (2)

Publication Number Publication Date
JPS5213776A true JPS5213776A (en) 1977-02-02
JPS5718662B2 JPS5718662B2 (en) 1982-04-17

Family

ID=13965444

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8924875A Granted JPS5213776A (en) 1975-07-23 1975-07-23 Photo-resist pealing method

Country Status (1)

Country Link
JP (1) JPS5213776A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004133384A (en) * 2002-08-14 2004-04-30 Sony Corp Resist removing agent composition and method for manufacturing semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004133384A (en) * 2002-08-14 2004-04-30 Sony Corp Resist removing agent composition and method for manufacturing semiconductor device

Also Published As

Publication number Publication date
JPS5718662B2 (en) 1982-04-17

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