JPS5213439B2 - - Google Patents
Info
- Publication number
- JPS5213439B2 JPS5213439B2 JP47005203A JP520372A JPS5213439B2 JP S5213439 B2 JPS5213439 B2 JP S5213439B2 JP 47005203 A JP47005203 A JP 47005203A JP 520372 A JP520372 A JP 520372A JP S5213439 B2 JPS5213439 B2 JP S5213439B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47005203A JPS5213439B2 (ja) | 1972-01-12 | 1972-01-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47005203A JPS5213439B2 (ja) | 1972-01-12 | 1972-01-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4875291A JPS4875291A (ja) | 1973-10-11 |
| JPS5213439B2 true JPS5213439B2 (ja) | 1977-04-14 |
Family
ID=11604623
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47005203A Expired JPS5213439B2 (ja) | 1972-01-12 | 1972-01-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5213439B2 (ja) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3518270B2 (ja) * | 1996-08-30 | 2004-04-12 | 株式会社日立製作所 | 荷電粒子ビーム装置 |
-
1972
- 1972-01-12 JP JP47005203A patent/JPS5213439B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4875291A (ja) | 1973-10-11 |