JPS52106786A - Gas collector - Google Patents
Gas collectorInfo
- Publication number
- JPS52106786A JPS52106786A JP2341876A JP2341876A JPS52106786A JP S52106786 A JPS52106786 A JP S52106786A JP 2341876 A JP2341876 A JP 2341876A JP 2341876 A JP2341876 A JP 2341876A JP S52106786 A JPS52106786 A JP S52106786A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- gas collector
- pressure
- sample gas
- collector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Sampling And Sample Adjustment (AREA)
Abstract
PURPOSE: To conduct a sample gas connected in a gas collector to an analytical gauge through a gas outlet at almost a constant pressure and at the same time, arrange so that the pressure for sending out a sample gas may be changed according to pressure loss in a connected gas treatment equipment.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2341876A JPS5821694B2 (en) | 1976-03-04 | 1976-03-04 | gas sampling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2341876A JPS5821694B2 (en) | 1976-03-04 | 1976-03-04 | gas sampling device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52106786A true JPS52106786A (en) | 1977-09-07 |
| JPS5821694B2 JPS5821694B2 (en) | 1983-05-02 |
Family
ID=12109939
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2341876A Expired JPS5821694B2 (en) | 1976-03-04 | 1976-03-04 | gas sampling device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5821694B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01109593U (en) * | 1988-01-18 | 1989-07-25 | ||
| JP2023070577A (en) | 2021-11-09 | 2023-05-19 | 信越化学工業株式会社 | Resist underlayer film material, patterning method, and method for forming resist underlayer film |
-
1976
- 1976-03-04 JP JP2341876A patent/JPS5821694B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5821694B2 (en) | 1983-05-02 |
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