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JPS5131185B2 - - Google Patents

Info

Publication number
JPS5131185B2
JPS5131185B2 JP47103588A JP10358872A JPS5131185B2 JP S5131185 B2 JPS5131185 B2 JP S5131185B2 JP 47103588 A JP47103588 A JP 47103588A JP 10358872 A JP10358872 A JP 10358872A JP S5131185 B2 JPS5131185 B2 JP S5131185B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47103588A
Other languages
Japanese (ja)
Other versions
JPS4962081A (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47103588A priority Critical patent/JPS5131185B2/ja
Priority to GB4840673A priority patent/GB1414245A/en
Priority to DE19732352329 priority patent/DE2352329C3/de
Priority to FR7337180A priority patent/FR2209218B1/fr
Priority to NL7314375.A priority patent/NL163368C/xx
Publication of JPS4962081A publication Critical patent/JPS4962081A/ja
Priority to US05/578,174 priority patent/US4017886A/en
Publication of JPS5131185B2 publication Critical patent/JPS5131185B2/ja
Priority to HK299/79A priority patent/HK29979A/xx
Priority to MY31/79A priority patent/MY7900031A/xx
Expired legal-status Critical Current

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Classifications

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    • H01L21/02118—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer carbon based polymeric organic or inorganic material, e.g. polyimides, poly cyclobutene or PVC
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Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Formation Of Insulating Films (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
JP47103588A 1972-10-18 1972-10-18 Expired JPS5131185B2 (de)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP47103588A JPS5131185B2 (de) 1972-10-18 1972-10-18
GB4840673A GB1414245A (en) 1972-10-18 1973-10-17 Semiconductor device
DE19732352329 DE2352329C3 (de) 1972-10-18 1973-10-18 Halbleiterbauelement und Verfahren zu seiner Herstellung
FR7337180A FR2209218B1 (de) 1972-10-18 1973-10-18
NL7314375.A NL163368C (nl) 1972-10-18 1973-10-18 Halfgeleiderinrichting met een polyimideharslaag.
US05/578,174 US4017886A (en) 1972-10-18 1975-05-16 Discrete semiconductor device having polymer resin as insulator and method for making the same
HK299/79A HK29979A (en) 1972-10-18 1979-05-10 Improvements in or relating to a semiconductor device
MY31/79A MY7900031A (en) 1972-10-18 1979-12-30 Improvements in or relating to a semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47103588A JPS5131185B2 (de) 1972-10-18 1972-10-18

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP1795076A Division JPS51118965A (en) 1976-02-23 1976-02-23 Insulation film of semiconductor device

Publications (2)

Publication Number Publication Date
JPS4962081A JPS4962081A (de) 1974-06-15
JPS5131185B2 true JPS5131185B2 (de) 1976-09-04

Family

ID=14357916

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47103588A Expired JPS5131185B2 (de) 1972-10-18 1972-10-18

Country Status (6)

Country Link
JP (1) JPS5131185B2 (de)
FR (1) FR2209218B1 (de)
GB (1) GB1414245A (de)
HK (1) HK29979A (de)
MY (1) MY7900031A (de)
NL (1) NL163368C (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57160833A (en) * 1981-03-27 1982-10-04 Showa Aircraft Ind Co Ltd Method of handling air cargo containers and pallets, conveyors and dollies for use in this method

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4017886A (en) 1972-10-18 1977-04-12 Hitachi, Ltd. Discrete semiconductor device having polymer resin as insulator and method for making the same
JPS5421073B2 (de) * 1974-04-15 1979-07-27
JPS516474A (en) * 1974-07-05 1976-01-20 Hitachi Ltd Pureenakozono handotaisochi
JPS51102569A (ja) * 1975-03-07 1976-09-10 Hitachi Ltd Handotaisochi
JPS57115834A (en) * 1981-01-10 1982-07-19 Nec Corp Manufacture of semiconductor device
US4758476A (en) * 1984-12-12 1988-07-19 Hitachi Chemical Company, Ltd. Polyimide precursor resin composition and semiconductor device using the same
US6294799B1 (en) 1995-11-27 2001-09-25 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method of fabricating same
US5940732A (en) * 1995-11-27 1999-08-17 Semiconductor Energy Laboratory Co., Method of fabricating semiconductor device
US5883422A (en) * 1996-06-28 1999-03-16 The Whitaker Corporation Reduced parasitic capacitance semiconductor devices
JP2003151981A (ja) * 2001-11-16 2003-05-23 Shinko Electric Ind Co Ltd 半導体装置およびその製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1230421A (de) * 1967-09-15 1971-05-05

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57160833A (en) * 1981-03-27 1982-10-04 Showa Aircraft Ind Co Ltd Method of handling air cargo containers and pallets, conveyors and dollies for use in this method

Also Published As

Publication number Publication date
FR2209218A1 (de) 1974-06-28
FR2209218B1 (de) 1978-05-26
NL7314375A (de) 1974-04-22
DE2352329B2 (de) 1977-02-24
GB1414245A (en) 1975-11-19
NL163368C (nl) 1980-08-15
NL163368B (nl) 1980-03-17
HK29979A (en) 1979-05-18
MY7900031A (en) 1979-12-31
JPS4962081A (de) 1974-06-15
DE2352329A1 (de) 1974-05-02

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