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JPS51148389A - Manufacturing method of semiconductor device - Google Patents

Manufacturing method of semiconductor device

Info

Publication number
JPS51148389A
JPS51148389A JP7259475A JP7259475A JPS51148389A JP S51148389 A JPS51148389 A JP S51148389A JP 7259475 A JP7259475 A JP 7259475A JP 7259475 A JP7259475 A JP 7259475A JP S51148389 A JPS51148389 A JP S51148389A
Authority
JP
Japan
Prior art keywords
semiconductor device
manufacturing
exchanging
rise
computer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7259475A
Other languages
Japanese (ja)
Inventor
Kimio Yanagida
Kenichi Kawashima
Yasutaka Ban
Takaharu Shima
Yushi Inagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7259475A priority Critical patent/JPS51148389A/en
Publication of JPS51148389A publication Critical patent/JPS51148389A/en
Pending legal-status Critical Current

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  • Design And Manufacture Of Integrated Circuits (AREA)

Abstract

PURPOSE: To rise the manufactured products ratio by exchanging inferior parts in a semiconductor device using a computer and a scan type electron rays exposure device.
COPYRIGHT: (C)1976,JPO&Japio
JP7259475A 1975-06-14 1975-06-14 Manufacturing method of semiconductor device Pending JPS51148389A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7259475A JPS51148389A (en) 1975-06-14 1975-06-14 Manufacturing method of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7259475A JPS51148389A (en) 1975-06-14 1975-06-14 Manufacturing method of semiconductor device

Publications (1)

Publication Number Publication Date
JPS51148389A true JPS51148389A (en) 1976-12-20

Family

ID=13493866

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7259475A Pending JPS51148389A (en) 1975-06-14 1975-06-14 Manufacturing method of semiconductor device

Country Status (1)

Country Link
JP (1) JPS51148389A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59201441A (en) * 1983-04-30 1984-11-15 Toshiba Corp Fuse cutting method utilizing converged ion beam
JPS63276241A (en) * 1987-05-07 1988-11-14 Mitsubishi Electric Corp Method for building semiconductor devices

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS493035A (en) * 1972-05-01 1974-01-11
JPS5016485A (en) * 1973-04-30 1975-02-21

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS493035A (en) * 1972-05-01 1974-01-11
JPS5016485A (en) * 1973-04-30 1975-02-21

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59201441A (en) * 1983-04-30 1984-11-15 Toshiba Corp Fuse cutting method utilizing converged ion beam
JPS63276241A (en) * 1987-05-07 1988-11-14 Mitsubishi Electric Corp Method for building semiconductor devices

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