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JPS51137383A - Semi conductor wafer evaluation - Google Patents

Semi conductor wafer evaluation

Info

Publication number
JPS51137383A
JPS51137383A JP6165875A JP6165875A JPS51137383A JP S51137383 A JPS51137383 A JP S51137383A JP 6165875 A JP6165875 A JP 6165875A JP 6165875 A JP6165875 A JP 6165875A JP S51137383 A JPS51137383 A JP S51137383A
Authority
JP
Japan
Prior art keywords
semi conductor
conductor wafer
wafer evaluation
evaluation
semi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6165875A
Other languages
Japanese (ja)
Inventor
Haruyuki Hoshika
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP6165875A priority Critical patent/JPS51137383A/en
Publication of JPS51137383A publication Critical patent/JPS51137383A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To evaluate a semi conductor wafer accurately and improve yield rate of the wafer.
COPYRIGHT: (C)1976,JPO&Japio
JP6165875A 1975-05-22 1975-05-22 Semi conductor wafer evaluation Pending JPS51137383A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6165875A JPS51137383A (en) 1975-05-22 1975-05-22 Semi conductor wafer evaluation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6165875A JPS51137383A (en) 1975-05-22 1975-05-22 Semi conductor wafer evaluation

Publications (1)

Publication Number Publication Date
JPS51137383A true JPS51137383A (en) 1976-11-27

Family

ID=13177532

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6165875A Pending JPS51137383A (en) 1975-05-22 1975-05-22 Semi conductor wafer evaluation

Country Status (1)

Country Link
JP (1) JPS51137383A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54131880A (en) * 1978-04-03 1979-10-13 Nec Corp Manufacture of schottky junction element

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54131880A (en) * 1978-04-03 1979-10-13 Nec Corp Manufacture of schottky junction element

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