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JPS51112263A - Semiconductor surface processor base - Google Patents

Semiconductor surface processor base

Info

Publication number
JPS51112263A
JPS51112263A JP3679575A JP3679575A JPS51112263A JP S51112263 A JPS51112263 A JP S51112263A JP 3679575 A JP3679575 A JP 3679575A JP 3679575 A JP3679575 A JP 3679575A JP S51112263 A JPS51112263 A JP S51112263A
Authority
JP
Japan
Prior art keywords
semiconductor surface
surface processor
processor base
base
pulley
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3679575A
Other languages
Japanese (ja)
Other versions
JPS5422873B2 (en
Inventor
Masakuni Akiba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3679575A priority Critical patent/JPS51112263A/en
Publication of JPS51112263A publication Critical patent/JPS51112263A/en
Publication of JPS5422873B2 publication Critical patent/JPS5422873B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE: To obtain a dust-proof semiconductor surface processor base which is provided with a plurality of wafer mounting bases on a revolving gear and in which a pulley for rotating the base on its axis rotates on its own axis while contacting and moving a pulley guide, elastically contacts over each of the pulleys.
COPYRIGHT: (C)1976,JPO&Japio
JP3679575A 1975-03-28 1975-03-28 Semiconductor surface processor base Granted JPS51112263A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3679575A JPS51112263A (en) 1975-03-28 1975-03-28 Semiconductor surface processor base

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3679575A JPS51112263A (en) 1975-03-28 1975-03-28 Semiconductor surface processor base

Publications (2)

Publication Number Publication Date
JPS51112263A true JPS51112263A (en) 1976-10-04
JPS5422873B2 JPS5422873B2 (en) 1979-08-09

Family

ID=12479710

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3679575A Granted JPS51112263A (en) 1975-03-28 1975-03-28 Semiconductor surface processor base

Country Status (1)

Country Link
JP (1) JPS51112263A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6157946A (en) * 1984-08-29 1986-03-25 Sharp Corp Producing device of amorphous silicon photosensitive body
JPS6177056A (en) * 1984-09-21 1986-04-19 Sharp Corp Producing device of amorphous silicon photosensitive body
JPS6285423A (en) * 1985-10-11 1987-04-18 Toshiba Corp Organic metal thermal decomposition vapor crystal growth apparatus
JPH02149769U (en) * 1989-05-18 1990-12-21
JP2022504759A (en) * 2018-10-26 2022-01-13 エリコン サーフェイス ソリューションズ アーゲー，プフェフィコーン Workpiece carrier device and painting equipment

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6157946A (en) * 1984-08-29 1986-03-25 Sharp Corp Producing device of amorphous silicon photosensitive body
JPH029672B2 (en) * 1984-08-29 1990-03-02 Sharp Kk
JPS6177056A (en) * 1984-09-21 1986-04-19 Sharp Corp Producing device of amorphous silicon photosensitive body
JPH029673B2 (en) * 1984-09-21 1990-03-02 Sharp Kk
JPS6285423A (en) * 1985-10-11 1987-04-18 Toshiba Corp Organic metal thermal decomposition vapor crystal growth apparatus
JPH02149769U (en) * 1989-05-18 1990-12-21
JP2022504759A (en) * 2018-10-26 2022-01-13 エリコン サーフェイス ソリューションズ アーゲー，プフェフィコーン Workpiece carrier device and painting equipment

Also Published As

Publication number Publication date
JPS5422873B2 (en) 1979-08-09

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