JPS5050871A - - Google Patents
Info
- Publication number
- JPS5050871A JPS5050871A JP9921873A JP9921873A JPS5050871A JP S5050871 A JPS5050871 A JP S5050871A JP 9921873 A JP9921873 A JP 9921873A JP 9921873 A JP9921873 A JP 9921873A JP S5050871 A JPS5050871 A JP S5050871A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9921873A JPS5050871A (en) | 1973-09-05 | 1973-09-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9921873A JPS5050871A (en) | 1973-09-05 | 1973-09-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5050871A true JPS5050871A (en) | 1975-05-07 |
Family
ID=14241510
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9921873A Pending JPS5050871A (en) | 1973-09-05 | 1973-09-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5050871A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5921021A (en) * | 1982-07-27 | 1984-02-02 | Nippon Zeon Co Ltd | Receiving vessel for resist developer or rinse liquid for semiconductor |
| JPS6242240U (en) * | 1985-08-30 | 1987-03-13 | ||
| JP2017050466A (en) * | 2015-09-03 | 2017-03-09 | キヤノン株式会社 | Imprint device, method of producing article and feeding device |
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1973
- 1973-09-05 JP JP9921873A patent/JPS5050871A/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5921021A (en) * | 1982-07-27 | 1984-02-02 | Nippon Zeon Co Ltd | Receiving vessel for resist developer or rinse liquid for semiconductor |
| JPH0242738B2 (en) * | 1982-07-27 | 1990-09-25 | ||
| JPS6242240U (en) * | 1985-08-30 | 1987-03-13 | ||
| JPH0311885Y2 (en) * | 1985-08-30 | 1991-03-20 | ||
| JP2017050466A (en) * | 2015-09-03 | 2017-03-09 | キヤノン株式会社 | Imprint device, method of producing article and feeding device |