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JPS5994251A - Information recorder - Google Patents

Information recorder

Info

Publication number
JPS5994251A
JPS5994251A JP57202031A JP20203182A JPS5994251A JP S5994251 A JPS5994251 A JP S5994251A JP 57202031 A JP57202031 A JP 57202031A JP 20203182 A JP20203182 A JP 20203182A JP S5994251 A JPS5994251 A JP S5994251A
Authority
JP
Japan
Prior art keywords
recording
laser beam
photoresist film
output
focusing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP57202031A
Other languages
Japanese (ja)
Inventor
Yuji Sato
裕治 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP57202031A priority Critical patent/JPS5994251A/en
Publication of JPS5994251A publication Critical patent/JPS5994251A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/125Optical beam sources therefor, e.g. laser control circuitry specially adapted for optical storage devices; Modulators, e.g. means for controlling the size or intensity of optical spots or optical traces
    • G11B7/128Modulators

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Optical Head (AREA)

Abstract

PURPOSE:To ensure stable recording by making use of the reflected beam given from a focusing laser beam disk to control the recording laser beam so that it has the light quantity suited to the thickness of a photosensitive film. CONSTITUTION:The focusing laser beam radiated from a focusing laser 27 by an He-Ne laser is reflected on the surface of a disk 26, and this reflected beam is made incident to a focus signal signal detecting 2-split detector 31. The output of the detector 31 is converted into a difference signal of the 2-split output by a comparator 32. This difference signal is applied to a focus controller 33 as a focus control signal, and the sum signal of the output of the detector 31 is obtained by a detecting circuit 34 with the output of the detector 31. This sum signal is supplied to a light quantity controller 35, and the controller 35 calculates the light quantity of the optimum recording beam in response to the thickness of the part of the exposed photosensitive film on the disk 26. Then the result of calculation is applied to an optical modulator 22. The modulator 22 receives the output of the controller 35 and controls the light quantity to be given to the recording laser beam.

Description

【発明の詳細な説明】 〔発明の技術分野〕 本発明は時に情報を光学的手段を用いて記録する装置に
関する。
DETAILED DESCRIPTION OF THE INVENTION Technical Field of the Invention The present invention relates sometimes to devices for recording information using optical means.

〔発明の技術的背景とその問題点〕[Technical background of the invention and its problems]

光学的手段を用いて情報を円盤に記録し、またこの円盤
から情報を再生する技術は例えばデジタルオーディオデ
4スク(以下DADという)及び1)ADプレーヤーで
周知の通シである。
Techniques for recording information on a disc using optical means and reproducing information from the disc are well known, for example, in digital audio discs (hereinafter referred to as DAD) and 1) AD players.

仁のL)AD ii′#4[の高い研摩が施されたガラ
ス板の表面に感光剤を塗布し感光膜を形成した後、情報
に応じたレーザービームによシ感光膜をピット形状に露
光することから始って製造される。
After applying a photosensitive agent to the surface of a highly polished glass plate to form a photoresist film, the photoresist film is exposed to a pit shape with a laser beam according to the information. Manufactured from scratch.

第1図は記録する情報に応じて前記露光を行なうことに
よりて情報を円盤上に記録する装置を示す。
FIG. 1 shows an apparatus for recording information on a disk by performing the exposure according to the information to be recorded.

即ち、記録用レーザ住1から発射された記録用光ビーム
は、光変調器Ql)で変調されミラー02で反射された
後集束しンズα騰に入射する。集束レンズQ3iに入射
した光ビームは記録円盤I上に集束して感光膜を露光す
る。
That is, the recording light beam emitted from the recording laser 1 is modulated by the optical modulator Ql), reflected by the mirror 02, and then enters the focusing lens α. The light beam incident on the focusing lens Q3i is focused onto the recording disk I and exposes the photoresist film.

一方、7オーカス用レーザα鴎から発射されたフォーカ
ス用光ビームは、ビームスプリッタ(lf19 、 ’
/4板(I7)を通過しミラーα樽で反射された後集束
レンズ0を通シ記録円板Q4)で反射する。反射ビーム
はミラーQりを通りミラーu樽で反射し、′/4板同を
通過した後ビームスプリッタul19で反射されフォー
カス信号検出用2分割ディテクタ0に入射する。
On the other hand, the focusing light beam emitted from the 7 orcus laser α
After passing through the /4 plate (I7) and being reflected by the mirror α barrel, it passes through the focusing lens 0 and is reflected by the recording disk Q4). The reflected beam passes through the mirror Q, is reflected by the mirror U barrel, passes through the '/4 plate, is reflected by the beam splitter UL19, and enters the two-split detector 0 for focus signal detection.

フォーカス信号はフォーカス信号検出用2分割ディテク
タ(LIの2つの出力の差を検出することによシ得るこ
とができ、補償回路と駆動回路を通過した後7オーカシ
ングユニツト(至)に供給される。
The focus signal can be obtained by detecting the difference between the two outputs of the focus signal detection two-split detector (LI), and after passing through the compensation circuit and drive circuit, it is supplied to the 7 focusing units. .

7オーカシングユニツト(2)は集束レンズa3を記録
円盤(1尋の動きに応じて振動させ、記録ビームを常に
記録円盤α◆上に集束させるものである。
7. The focusing unit (2) vibrates the focusing lens a3 in accordance with the movement of the recording disk (one fathom) to always focus the recording beam onto the recording disk α◆.

以上のようなりADの製造工程及び情報記録装置におい
ては、特に記録円盤の原盤となるガラス板表面の感光膜
は厚さ0.1μmオーダの薄さであシ、現在考えられて
いる最良方法をもってしても、均一な厚さの塗布膜を形
成することは困難である。
As described above, in the AD manufacturing process and information recording device, the photoresist film on the surface of the glass plate, which is the master of the recording disk, must be as thin as 0.1 μm in thickness. However, it is difficult to form a coating film of uniform thickness.

感光膜の厚さが不均一の円盤を使用して記録した場合、
感光膜の厚い部分ではピット形状の露光幅が狭くなシ、
反対に膜の薄い部分では露光幅が広くなシ、不安定な記
録となる。
When recording using a disc with uneven photoresist film thickness,
In the thick part of the photoresist film, the exposure width of the pit shape is narrow.
On the other hand, in thin areas of the film, the exposure width is wide, resulting in unstable recording.

〔発明の目的〕[Purpose of the invention]

本発明は上述した従来装置の欠点を改良したもので、記
録円盤上の感光膜の厚さに不均一部分があったとしても
安定な記録のできる情報記録装置を提供することを目的
とする。
The present invention improves the above-mentioned drawbacks of the conventional apparatus, and an object of the present invention is to provide an information recording apparatus that can perform stable recording even if the thickness of the photoresist film on the recording disk is uneven.

〔発明の概要〕[Summary of the invention]

本発明においては上記目的を達成するためにフォーカス
用レーザービームの円盤からの反射ビームを利用して、
円盤上の感光膜の厚さに関する信号を検出し、その出力
に基づいて記録用レーザービームが感光膜の厚さに最適
な光量となるように制御することによシ、安定な記録を
得ることを可能にしたものである。
In order to achieve the above object, the present invention utilizes the beam reflected from the disk of the focusing laser beam,
To obtain stable recording by detecting a signal related to the thickness of the photoresist film on the disk and controlling the recording laser beam based on the output so that the amount of light is optimal for the thickness of the photoresist film. This is what made it possible.

〔発明の実施例〕[Embodiments of the invention]

以下、本発明に係る情報記録装置の一実施例を第2図を
参照して詳細に説明する。例えば人rレーザによる記録
用レーザCυから発射された記録用レーザビームは光変
調器(2りに送られこの変調器←渇に加えられる情報源
12階からのデジタル信号に応じて変調される。前記変
調器Qりの出力ビームはミラー(財)で反射された後、
集束レンズQ[有]に入射する。集束レンズ(ハ)に入
射したビームは記録円盤(ハ)上に集束して円盤(ハ)
上の感光膜を露光し、前記デジタル信号に応じたピット
形状露光部を形成する。
Hereinafter, one embodiment of the information recording device according to the present invention will be described in detail with reference to FIG. For example, a recording laser beam emitted from a recording laser Cυ is sent to an optical modulator (2) and is modulated according to a digital signal from an information source 12 that is added to this modulator. After the output beam of the modulator Q is reflected by a mirror,
The light enters the focusing lens Q [with]. The beam incident on the focusing lens (c) is focused on the recording disk (c) and
The upper photoresist film is exposed to form pit-shaped exposed portions corresponding to the digital signal.

一方、例えばH・−Neレーザによるフォーカス用レー
ザ(5)から発射されたフォーカス用レーザビームはビ
ームスプリッタ叱2/4板翰を通過し、ミラー(至)で
反射された後、前記集束レンズ(ハ)を通シ記録円盤弼
に集束される。円盤(ハ)に照射されたフォーカス用ビ
ームは円盤(ハ)表面で反射する。この反射ビームはミ
ラー(財)を通シミラーーで反射し2/4板(至)を通
過した後ビームスプリッタ(ハ)で反射されフォーカス
信号検出用2分割ディテクタODに入射する。このディ
テクタ0υの出力線コンパレータ6邊により前記2分割
出力の差信号に変換される。
On the other hand, the focusing laser beam emitted from the focusing laser (5), for example, an H-Ne laser, passes through the beam splitter 2/4 plate, is reflected by the mirror, and then is reflected by the focusing lens ( c) It is focused on the recording disk. The focusing beam irradiated onto the disk (C) is reflected by the surface of the disk (C). This reflected beam passes through a mirror, is reflected by a similar mirror, passes through a 2/4 plate (to), is reflected by a beam splitter (c), and enters a two-split detector OD for focus signal detection. The output line comparator 6 of this detector 0υ converts it into a difference signal between the two divided outputs.

この差信号はフォーカス制御用信号としてフォーカス、
/1整器(ハ)に加えられる。前記フォーカス信号検出
用2分割ディテクタ01)の出力は検出回路(財)によ
り前記2分割ディテクタr31)の出力の和信号を得る
。この和信号は光量制御装置0埼に入力され、ここで前
記円盤(ハ)上の感光膜の露光する部分の厚さに応じて
最適な記録用ビームの光量が演算され、その結果が光変
調器(24へ印加される。光変調器−は光量制御装置0
啼の出力を受は記録用レーザビームの光量を制御する。
This difference signal is used as a focus control signal to
/1 is added to the rectifier (c). The output of the focus signal detection two-divided detector 01) is used by a detection circuit to obtain a sum signal of the outputs of the two-divided detector r31). This sum signal is input to the light amount control device 0, where the optimum light amount of the recording beam is calculated according to the thickness of the exposed portion of the photoresist film on the disk (c), and the result is used for optical modulation. The light modulator (24) is applied to the light amount control device (24).
Receiving the output of the song controls the light intensity of the recording laser beam.

尚、図中(至)はターンテーブル、0η、(至)はモー
タ、0IはCLV (線速一定)回転サーボ回路、Gi
nはラジアル送シサーボ回路であシ、ターンテーブル(
ト)に載置される円盤形記録媒体(ハ)を所定の速度で
回転駆動する装置である。
In the figure, (to) is the turntable, 0η, (to) is the motor, 0I is the CLV (constant linear velocity) rotation servo circuit, Gi
n is the radial feed servo circuit, turntable (
This device rotates the disc-shaped recording medium (c) placed on the disc (g) at a predetermined speed.

ところで感光膜の厚さと光ビームの反射率には次式の関
係があり、反射率は感光膜の膜厚の関数で表わされる。
Incidentally, there is a relationship between the thickness of the photoresist film and the reflectance of the light beam as shown in the following equation, and the reflectance is expressed as a function of the thickness of the photoresist film.

I = TI+ r2+2rlrlcos(g−r)こ
こで工:反射率    nl:感光膜の屈折率n!ニガ
ラスの屈折率 d:感光膜の膜厚λ:ビームの波長 第3図は反射率と感光膜の膜厚の関係を示すグラフであ
り、nl = 1.6 、 nfi := 1.51 
、λ−6328Aの場合の例である。
I = TI + r2 + 2rlrlcos (g-r) where: reflectance nl: refractive index of photoresist film n! refractive index of Nigarasu d: film thickness of photoresist film λ: wavelength of beam Figure 3 is a graph showing the relationship between reflectance and film thickness of photoresist film, nl = 1.6, nfi:= 1.51
, is an example of λ-6328A.

しかるにフォーカス反射ビームの光量には感光膜の膜厚
の情報の含まれていることを意味し、この膜厚情報は前
記フォーカス信号検出用2分割ディテクタc31)の出
力の和信号で表わされる。前記光量制御装置(ハ)はこ
の反射率と感光膜厚の関係から得られる膜厚情報に基づ
く出力を得る演算機能を有するものである。
However, this means that the amount of light of the focused reflected beam includes information on the film thickness of the photoresist film, and this film thickness information is represented by the sum signal of the outputs of the focus signal detection two-split detector c31). The light amount control device (c) has an arithmetic function to obtain an output based on film thickness information obtained from the relationship between the reflectance and the photoresist film thickness.

このようにして記録用レーザビームの光量は感光膜の膜
厚に適した光量となり、感光膜の膜厚が厚いところでも
、記録用光ビーム光量の不足によシ記録されたビット形
状の幅が狭くなったシ、逆の場合にはビット形状の幅が
広くなうfcbすることなく、安定した記録が行える。
In this way, the light intensity of the recording laser beam becomes a light intensity suitable for the thickness of the photoresist film, and even when the photoresist film is thick, the width of the recorded bit shape may be reduced due to insufficient light intensity of the recording light beam. Stable recording can be performed without causing fcb, where the width of the bit shape becomes wider, or vice versa.

また上に述べた実施例において、光量を直接変調可能な
半導体レーザを用いれば光変調器を省略することができ
る。
Furthermore, in the embodiments described above, the optical modulator can be omitted by using a semiconductor laser that can directly modulate the amount of light.

〔発明の効果〕〔Effect of the invention〕

本発明によれば以上説明したように円盤形記録媒体の感
光膜の厚さのむらに対して安定な記録を得ることができ
る。なお本発明は静電容量式ビデオディスク用スタイ2
スの研摩盤のように5μm程度の深い溝の記録にも適用
できる。
According to the present invention, as described above, it is possible to obtain stable recording even with respect to unevenness in the thickness of the photoresist film of a disc-shaped recording medium. The present invention also relates to a capacitive video disc style 2.
It can also be applied to recording grooves as deep as 5 μm, such as with a polishing machine.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来の情報円盤記録装置を示す構成図、第2図
は本発明の一実施例を示す構成図、第3図は反射率と感
光膜の膜厚の関係を示す特性曲線図である。 21・・・記録用レーザ    22・・・光変調器2
3・・・情報信号源     ム・・・ミ ラ −25
・・・集束レンズ    26・・・円盤形記録媒体2
7・・・フォーカス用レーザ  詔・・・ビームスグリ
ツタ29・・・2/4板        30・・・ミ
  ラ −31・・・フォーカス信号検出用2分割ディ
テクタ32・・・コンパレータ    33・・・フォ
ーカス調整器34・・・和信号検出回路   35・・
・光量制御装置36・・・ターンテーブル   37.
38・・・モータ39・・・CLV回転サーボ回路 40・・・ラジアル送シサーボ回路 代理人 弁理士  則 近 憲 佑 (ほか1名) 第1図
Fig. 1 is a block diagram showing a conventional information disk recording device, Fig. 2 is a block diagram showing an embodiment of the present invention, and Fig. 3 is a characteristic curve diagram showing the relationship between reflectance and photoresist film thickness. be. 21... Recording laser 22... Optical modulator 2
3... Information signal source Mu... Mira -25
...Focusing lens 26...Disk-shaped recording medium 2
7...Laser for focus Imperial...Beam slit 29...2/4 plate 30...Mirror -31...2-split detector for focus signal detection 32...Comparator 33...Focus Adjuster 34... Sum signal detection circuit 35...
- Light amount control device 36... turntable 37.
38...Motor 39...CLV rotation servo circuit 40...Radial transmission servo circuit Agent Patent attorney Noriyuki Chika (and 1 other person) Figure 1

Claims (1)

【特許請求の範囲】[Claims] 表向に感光膜が塗布された円盤形記録媒体を所定の速度
で回転駆動する駆動装置と、記録情報信号によシ変調さ
れた記録用レーザービームを発生するビーム発生装置と
、このビーム発生装置による前記レーザービームを前記
媒体の感光膜に照射し感光膜を露光する装置と、前記レ
ーザービームの焦点を前記媒体上に適性に結ばせるため
フォーカス用ビームを発射するフォーカス用レーザビー
ム発生装置と、このフォーカス用レーザービーム発生装
置によるレーザービームを前記媒体に照射する装置と、
前記媒体によって反・射されたフォーカス用ビームの量
を検出するフォーカス信号検出装置と、前記フォーカス
用ビームの前記反射ビームの光量を入力として前記媒体
の感光膜の厚さに関する出力を得る装置と、この装置の
出力に基づいて前記感光膜に対する記録用レーザービー
ム光量を制御する装置とを具備したことを特徴とする情
報記録装置。
A drive device that rotates a disk-shaped recording medium coated with a photoresist film on its surface at a predetermined speed, a beam generator that generates a recording laser beam modulated by a recording information signal, and this beam generator. a device that irradiates the photoresist film of the medium with the laser beam to expose the photoresist film; a focusing laser beam generator that emits a focusing beam to properly focus the laser beam on the medium; a device for irradiating the medium with a laser beam from the focusing laser beam generator;
a focus signal detection device that detects the amount of the focusing beam reflected by the medium; a device that uses the amount of the reflected beam of the focusing beam as an input to obtain an output related to the thickness of the photoresist film of the medium; An information recording device comprising: a device for controlling the amount of recording laser beam light directed to the photoresist film based on the output of the device.
JP57202031A 1982-11-19 1982-11-19 Information recorder Pending JPS5994251A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57202031A JPS5994251A (en) 1982-11-19 1982-11-19 Information recorder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57202031A JPS5994251A (en) 1982-11-19 1982-11-19 Information recorder

Publications (1)

Publication Number Publication Date
JPS5994251A true JPS5994251A (en) 1984-05-30

Family

ID=16450775

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57202031A Pending JPS5994251A (en) 1982-11-19 1982-11-19 Information recorder

Country Status (1)

Country Link
JP (1) JPS5994251A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01159712A (en) * 1987-12-16 1989-06-22 Ricoh Co Ltd Reference voltage generation circuit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01159712A (en) * 1987-12-16 1989-06-22 Ricoh Co Ltd Reference voltage generation circuit

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