JPS5959879A - Multi-coated material and its production - Google Patents

Abstract

PURPOSE:To develop a multi-layer coated material having excellent resistance to wear and impact, by coating layers of TiBN and TiN alternately in multiple layers on a rigid base material of a sintered hard alloy or cermet. CONSTITUTION:A gaseous mixture contg. Ti, H, N consisting of TiCl3, H2, N2, etc. is introduced into a reaction furnace charged therein with rigid materials such as WC sintered hard alloys, TiC cermet, TiN cermet or the like, and a gas contg. B such as BCl is mixed therewith intermittently and the gaseous mixture is heated to 920-970 deg.C. Multi-coating layers are formed by chemical vapor deposition on the surface of the rigid base material with layers of TiN and TiBN having <=1mum thickness per layer in 6-20 layers or more in such a way that the total thickness of the layers attains 2-15mum. The wear resistance and the resistance to chipping by impact of the base material is remarkably improved by such multiple layers.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention is coated with a hard material and has a durability of 1'? 141'1, material d with multilayer coating effective for fracture resistance.

Involved in the manufacturing method of J.B.

WCC cemented carbide FIC base 1-1 and TiN
The base sheet is coated with a hard material to provide C wear resistance f〕1 facing 1.
-Soaking has traditionally been done.

[2 However, the wear resistance 1' [111 mm is due to the abrasive wear seen in the no-rank part and the 4Δ of the workpiece seen in a part of the crater.Which chemical reaction is 1i1<1? X wear, OJ
, Bitsutsumi W abrasion (glE seen) is classified into 33 11L companies of oxidative wear, nonorushizo'ci: high hardness for wear, chemical stability for crater wear!1
However, it is known that oxidation resistance 1'l, b, and heat conduction 1'j are effective for boundary wear.

For this reason, conventionally, instead of coating with a single layer of carbide, nitride, etc., (1) two layers, an inner layer and an outer layer, or three layers, an inner layer, an intermediate layer, and a top layer. Both have different properties5-
H payment to wave yellow the hard trade material.

(■Method N of covering 2-31J1 solid solutions of hard substances, such as carbonitrides, which depend on different M costs, has been adopted as a method for improving wear resistance.

However, in the case of -1 ■, it is natural that if/N l
'J, for example, the outer layer has good wear resistance at the flank part/Dek1 Nota Some wear resistance 1 [, M deteriorates, etc., so the wear resistance increases dramatically J-( I want 3L.

Also, do you want to apply this different material to the thickness of your skin? Because of this, it has the unavoidable disadvantage that it is sensitive to heat fluctuations and has to be cut during cutting.

In the case of ■ above, generally the solid solution 1 of the different types of paddy shopping trade is
There is a problem that each feature of the hard material /Jc is promoted, but rather the lack f-1! is promoted.

Therefore, it could not be said that methods 11-1 and 2 are effective improvement methods.

The object of the present invention is to improve the above-mentioned drawbacks of the prior art and to provide an I'i type tool having excellent fracture resistance.

The present invention is based on w C single-purpose hard alloy, TiC base 1-Also (Yoding tN group → Pumet), and a coating layer consisting of 1-1 [3N and -F'iN is applied to the thickness of the single layer. 1 μm
1st below, less than 710.5μm on ay side
Cross Ti r3N, -1'i N to a thickness of 15 μm.
ζcj<i of b, characterized in that z<tomo 6Ffm or more, preferably 20 or more layers, are multi-coated.

The monthly profit according to the present invention is based on the monolayer thickness of 1 μnl or less,
Preferably less than 0.5 μn1 (P), so it becomes possible to overcome the shortcoming of -7-113N in thermal expansion coefficient, and ultimately uniform strain between layers of the coating material (J j)
Vigorously reduce stress concentration (Jl divided by heat resistance J fi' +l
(!It is possible to raise C.

J, just rr3Nu, C1 flight is higher than TiN and λ:! Since fl/i conduction t'l- is IV, not only the thickness resistance f1 but also the abrasion resistance of h1 boundary W is significantly improved. In addition, Ti13NIJ ridge type alloy which parent 11t'l
When cutting steel, cast iron, etc., due to the large
In this case, this drawback can be avoided by applying multiple thin layers to TiN, which has high chemical stability.

In addition, in the present invention, the order in which the coating layer is applied is as follows:
-r'i IJN, Ti N, -I'i [3N,
'I i N, -...maybe, L1 shrine, l-
i N, Ti BN, l'i N.

The order of i t3 N... may be changed.

The manufacturing method by Nekomei, especially the method 1) for forming the coating layer, has been conventionally used in the chemical vapor deposition method.
, 1lJ5 and N, for example Ti c1
3.1-12 A gas containing 8/υ, for example, BCI, is intermittently mixed into the mixed gas of 1-12 and N2, thereby making it possible to easily and effectively form multiple coatings.

Furthermore, when using the conventional chemical vapor shield method, the 1-iN film formation temperature is approximately 97 (1'C
11'1r3N? The i* film formation temperature is as low as 920°C. Therefore, it is necessary to change the coating temperature when changing from U-ri 13Nm coating to TiN coating, or vice versa (from 1'iN coating to 11kawa INN coating, and this also causes abnormal growth of coated particles. There are many reasons why the properties of the coating deteriorate.

However, the present inventors discovered that when gas is mixed intermittently, the frequency of nucleation of precipitated particles from the gas phase increases, but the growth rate decreases, and based on this, the present invention was developed. completed. Accordingly, in the present invention, it is desirable to mix gas intermittently, so that -11N
Even if the coating temperature is chosen to be the same as that of TiBN, the excellent effect of reducing the number of fine particles by C' can be obtained.

In this case, the electromagnetic field is activated into a plasma state with ↑l
Of course, it is also possible to carry out chloride deposition.

In addition, in the present invention, the number of coating layers is preferably at least 8 layers, preferably 20 layers or more. Less than 8 layers will not allow the effect of the multiplexed wave 1"f1 described above to be fully exploited. The thickness of the coating material should be 1 μm or more, preferably 0.5 μm or more, in order to evenly distribute the strain between the ribs of the coating material.This is because if it exceeds 1 μm, the fracture resistance will deteriorate. Example 1 WangiN, TiBN on WC-6%CO cemented carbide
The coatings were coated on a 7Xi grid with each layer having a thickness of 0.1 .mu.m and a total thickness of 6 .mu.m. This depth is tested by Δ.

At the same time, as a comparison amount, 1' was added to the lower layer of the above cemented carbide-L.
iN 1.1 layer was coated with a film having a film thickness of 3 tzm and #'F 671 Ill of 1 ft3N each. Take this test volume 1-3. These 2 (small) cutting strips 11 are as follows: Workpiece 1.I 80M3 Cutting speed 2 omy ra r n feed
0.3n+M rev cutting depth 2mm to cutting edge 1 (j). Comparison amount B chip is 1
In 3 minutes, the wear of the 'flank part progressed and reached the end of its service life, whereas the A depth made by Goaki Mizuko showed good cutting performance even after 30 minutes of cutting.

Example 2 WC-8%IIC 8%TaC-G%Com mV TiN, TiBN coating on gold alloy, each layer 0.0571m
A total of 48 μm coating was applied. This chip is designated as sample O. At the same time, the same cemented carbide was used as a comparison material and the lower layer was made of knee f.
i 13N, 1-iN to JJi, 3μm5 each
A film having a film thickness of 18 μm per μm was coated.

Let this chip be the sample [).

Next, these two types of trials r1 were subjected to the following intermittent cutting conditions: cutting speed 200 m, ' m i ++)
0.41111n/' re
V depth of cut 1.5mm Work material 80M3 10m 111 width tM f"J cutting was performed. The D tip of the comparison material was 40
The C of the present invention was not damaged even after 920 impacts.

As measured above, if the present invention is J, -T'113N
.

A thin coating of 1-1N is applied to the coating layer 1:j to provide wear resistance ↑ ([, 1q of coated cemented carbide rich in erosion resistance
The effect of the second job is great.

Claims (1)

[Claims] i, WC-based cemented carbide ric-based tree i~, or 1
-iN group" on the surface of J-meth1-, -1-! 13N
The coating layer has a thickness smaller than that of a single layer, totaling 512 to 15 μn1.
The thickness of li and L) is coated with 8 or more layers (
Multiple cover 11'ji which takes 1j1 character to become. 2. The multilayer coating material according to special claim 11f4, characterized in that the thickness of the single layer is 0.5 μm) or more. 1!
971 Claim 1 or 21 ('
The multiplex skin described in 4 A. 4. T i , 1-18 and N are charged into a 4′ furnace using WCC cemented carbide R; A multilayer film characterized by alternately and intermittently introducing a mixed gas containing the above gas and a gas containing the above gas, and coating U'TfBN and TiN in a 7:7 ratio and in multiple layers using a chemical vapor deposition method. 1■ I heard 1's manufacturing j6 method.