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JPS5895048U - Sample stand for wafer testing - Google Patents

Sample stand for wafer testing

Info

Publication number
JPS5895048U
JPS5895048U JP19069181U JP19069181U JPS5895048U JP S5895048 U JPS5895048 U JP S5895048U JP 19069181 U JP19069181 U JP 19069181U JP 19069181 U JP19069181 U JP 19069181U JP S5895048 U JPS5895048 U JP S5895048U
Authority
JP
Japan
Prior art keywords
sample stand
wafer testing
cooling pipe
sample
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19069181U
Other languages
Japanese (ja)
Inventor
啓太郎 森
Original Assignee
島田理化工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 島田理化工業株式会社 filed Critical 島田理化工業株式会社
Priority to JP19069181U priority Critical patent/JPS5895048U/en
Publication of JPS5895048U publication Critical patent/JPS5895048U/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図乃至第３図は本考案に係るウェーハ試験用試料台
の第１．第２．第３実施例の斜視図である。 １・・・・・・試料台本体、２・・・・・・溝、３・・
・・・・冷却パイプ。1 to 3 show the first part of the sample stage for wafer testing according to the present invention. Second. FIG. 7 is a perspective view of a third embodiment. 1...Sample stage body, 2...Groove, 3...
...cooling pipe.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 冷媒流体の流路を冷却パイプで形成し、この冷却パイプ
を試料台本体の下面又は内部に渦巻状又は折返し形に配
設したことを特徴とするウェーハ試験用試料台。A sample stand for wafer testing, characterized in that a flow path for a coolant fluid is formed by a cooling pipe, and the cooling pipe is arranged in a spiral or folded shape on the lower surface or inside the sample stand main body.
JP19069181U 1981-12-21 1981-12-21 Sample stand for wafer testing Pending JPS5895048U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19069181U JPS5895048U (en) 1981-12-21 1981-12-21 Sample stand for wafer testing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19069181U JPS5895048U (en) 1981-12-21 1981-12-21 Sample stand for wafer testing

Publications (1)

Publication Number Publication Date
JPS5895048U true JPS5895048U (en) 1983-06-28

Family

ID=30104213

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19069181U Pending JPS5895048U (en) 1981-12-21 1981-12-21 Sample stand for wafer testing

Country Status (1)

Country Link
JP (1) JPS5895048U (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56103375A (en) * 1980-01-22 1981-08-18 Mitsubishi Electric Corp Measuring jig of semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56103375A (en) * 1980-01-22 1981-08-18 Mitsubishi Electric Corp Measuring jig of semiconductor device

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