JPS5862823A - Vertical magnetic storage body - Google Patents
Vertical magnetic storage bodyInfo
- Publication number
- JPS5862823A JPS5862823A JP56160549A JP16054981A JPS5862823A JP S5862823 A JPS5862823 A JP S5862823A JP 56160549 A JP56160549 A JP 56160549A JP 16054981 A JP16054981 A JP 16054981A JP S5862823 A JPS5862823 A JP S5862823A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- magnetic storage
- alloy
- storage body
- sputtered
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 8
- 239000000956 alloy Substances 0.000 claims abstract description 8
- 230000001681 protective effect Effects 0.000 claims abstract description 4
- 239000000758 substrate Substances 0.000 claims description 7
- 238000000034 method Methods 0.000 abstract description 5
- 238000004544 sputter deposition Methods 0.000 abstract description 4
- 229910000838 Al alloy Inorganic materials 0.000 abstract description 3
- 238000007747 plating Methods 0.000 abstract description 2
- 239000010410 layer Substances 0.000 abstract 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 239000011241 protective layer Substances 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- OFNHPGDEEMZPFG-UHFFFAOYSA-N phosphanylidynenickel Chemical compound [P].[Ni] OFNHPGDEEMZPFG-UHFFFAOYSA-N 0.000 description 4
- 230000006378 damage Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 229910001004 magnetic alloy Inorganic materials 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- 229910001096 P alloy Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/66—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers
Landscapes
- Thin Magnetic Films (AREA)
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は垂直磁気記録再生に用いられる垂直磁気記憶体
に関する・
従来、一般の磁気ディスク装置、磁気テープ装置などの
磁気記憶装置においては基板上に形成された磁気記憶体
にリング型磁気ヘッド忙よって媒体の面内（長手）方向
に磁化することにょｐ記録を行なっている。しかし長手
磁化による記録（訃いては記録波長が小さくなるに従い
、即ち記録密度の増ＩＩＩＫ伴い、媒体内の反磁界が増
大して残留磁化の減衰と回転を生じ、再生出力が著るし
ぐ減少すゐという欠点が存在する。そこでこの問題点解
決の丸め、短波長になる１反磁界が小さくなる性質ｔも
つ垂直記録方式が提案され、この垂直記録に適した磁気
記憶媒体としては膜面に垂直な方向（磁化容晶軸をもつ
Ｃｏ−Ｃｒスパッタ膜が提案されている（４１ＷＩＡ＠
５２−１３４７０６号公報参照）・さらに、ガラス基板
上に垂直異方性ｔ−４，つＣｏ−Ｃｒスパッタ膜を付与
することも提案されているーしかしながらこの垂直磁気
記憶体を磁気ディスク装置に適用する場合、前者の特開
昭 ５２−１１４７０６号会報に示されるように基板で
あるポリエステルの機械的物塩的特性により所要の平滑
性を有する表面種ｆ’を実現することが困難であり且つ
ヘッドの荷重によりディスクの変形が生シ、ヘッドクラ
ツシへが発生し易いばかりでなく高周波高密直配Ｉ＆に
必要な小さなスペーシング全安定（実現出来ない欠点が
ある。ｔたガラス基板上に製作する場合、磁気ディスク
基板として適用するとき、高速回転時の破壊等の物理的
損傷に対して非常に危険を伴う欠点ｆ：４１っている。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a perpendicular magnetic storage body used for perpendicular magnetic recording and reproduction. Conventionally, in magnetic storage devices such as general magnetic disk devices and magnetic tape devices, a magnetic storage device formed on a substrate is used. Recording is performed by magnetizing the medium in the in-plane (longitudinal) direction using a ring-type magnetic head. However, as the recording wavelength becomes smaller (that is, as the recording density increases), the demagnetizing field within the medium increases, causing attenuation and rotation of the residual magnetization, and the reproduction output decreases significantly. As a solution to this problem, a perpendicular recording method was proposed which has the property that the demagnetizing field becomes smaller as the wavelength becomes shorter, and as a magnetic storage medium suitable for this perpendicular recording, A Co-Cr sputtered film with a perpendicular direction (magnetization crystal axis) has been proposed (41WIA@
52-134706) ・Furthermore, it has been proposed to provide a perpendicular anisotropy t-4, Co-Cr sputtered film on a glass substrate. However, this perpendicular magnetic storage body is not applied to a magnetic disk device. In this case, as shown in the former Japanese Patent Application Laid-Open No. 52-114706, it is difficult to realize a surface type f' having the required smoothness due to the mechanical properties of the polyester substrate, and the head Not only is it easy to cause disk deformation and head crash due to the load, but there is also the disadvantage that the small spacing required for high-frequency, high-density direct I/F cannot be achieved.When fabricating on a glass substrate, magnetic When applied as a disk substrate, there is a disadvantage f:41 that there is a very high risk of physical damage such as destruction during high speed rotation.
本発明の目的は上述の欠点を除去し九垂直磁気記憶体を
提供することにある。The object of the present invention is to eliminate the above-mentioned drawbacks and provide a nine-perpendicular magnetic storage body.
本発明の磁気記憶体は旋削加工されたＡ１合金素板の上
に非磁性合金層（例えばＮｔ−Ｐ無電解メッキ膜）を被
覆し、その表面を鏡面研摩した後に、その上にＣｏ−Ｃ
ｒの垂直磁気記憶媒体をスパッタ法により被覆し％該ス
パッタＣｏ−Ｃｒ膜上に保護膜域全スピンコード法又は
スパッタ法で付与している。The magnetic memory of the present invention covers a turned A1 alloy blank plate with a nonmagnetic alloy layer (for example, an Nt-P electroless plating film), mirror-polishes the surface, and then coats a Co-C
A perpendicular magnetic storage medium of 10% is coated by a sputtering method, and a protective film is applied over the entire area of the sputtered Co--Cr film by a spin-coding method or a sputtering method.
本発明の垂直磁気記憶体を使用すれば、磁気ディスク自
体荷重、温度による変形はほとんどなく、しかも表面精
度はニッケルーリン合金層良好な状ｌｌ１ｔ実現し、ヘ
ッドとディスクの微小スペーシング（０，５〜０．１５
μｗＭ）を保つことが出来、しかもガラス基板のような
破壊の危険性もなく、高密度記録に適し九記録再生が可
能である。If the perpendicular magnetic storage body of the present invention is used, the magnetic disk itself will hardly be deformed due to load or temperature, and the surface accuracy of the nickel-phosphorus alloy layer will be excellent, and the minute spacing between the head and the disk (0,5 ~0.15
μwM), and there is no risk of destruction unlike glass substrates, making it suitable for high-density recording and capable of recording and reproducing.
以下本発明を図の実施例を用いて説明する。The present invention will be explained below using examples shown in the drawings.
実施例１
合金円盤１として旋盤加工および熱稿正によって十分小
さなうねり（円周方向で５０μ雫以下および半径方向で
１０μ錫以下）を有する表面に仕上げられた円盤状アル
ミニウム合金１上に非磁性合金層２としてニッケルー燐
（Ｎｉ−Ｐ）非磁性合金を約５０Ｊｌｌｌ （）厚＠に
メッキし、このニッケルー燐メッキ膜を機械的研摩によ
り表面粗さ０．０４μｍ以下になるよう＃ＣＣ画面研摩
仕上したのち、その上に垂直異方性を有するＣｏ−Ｃｒ
膜３ｔ−スパッタ法により被覆し、その上に保護膜層４
ｔスパツタ法又はスピンコード法により付与したものを
垂直磁気記憶体とした。Example 1 A non-magnetic alloy is placed on a disc-shaped aluminum alloy 1 whose surface has been finished with sufficiently small waviness (50μ or less in the circumferential direction and 10μ or less in the radial direction) by lathe processing and hot drafting as an alloy disc 1. As layer 2, a nickel-phosphorus (Ni-P) non-magnetic alloy was plated to a thickness of approximately 50 Jlll (), and this nickel-phosphorus plating film was mechanically polished to a surface roughness of 0.04 μm or less with #CC screen polishing. Later, Co-Cr with vertical anisotropy was applied on top of it.
Film 3T - coated by sputtering method, and a protective film layer 4 is applied thereon.
The perpendicular magnetic memory was applied by the t-sputter method or the spin code method.
以上のような実施例により製作し几垂直磁気記憶体を通
常の水平記録型ヘッドにより記録密度５ｏｏｏビット／
インチで再生した結果、公開特許公報昭和５２−１３４
７０６における記録再生特性き同等の値−が得られ、又
この垂直磁気憶体はコンタクトスタートストップ試験回
数２０，０００回に十分耐えることを確認した。The perpendicular magnetic storage body manufactured according to the above embodiment can be used at a recording density of 500 bits/bit with a normal horizontal recording head.
As a result of reproduction in inches, the published patent publication 1972-134
It was confirmed that the recording/reproducing characteristics of the magnetic recording medium 706 were equivalent to those of the magnetic recording medium 706, and that this perpendicular magnetic storage body could sufficiently withstand 20,000 contact start/stop tests.
図は本発明の垂直磁気記憶体の断面を示す図である。１
は合金円盤％ ｚＦｉニッケルー燐、３＃１Ｃｏ−Ｃｒ
スパッタ層、４は旧ｏ２スピンコード層又はＳｉｎ、ス
パッタ層である。The figure is a diagram showing a cross section of the perpendicular magnetic storage body of the present invention. 1
is alloy disk% zFi nickel-phosphorus, 3#1Co-Cr
The sputtered layer 4 is an old O2 spin code layer or a Sin sputtered layer.
Claims (1)
れた非磁性ニッケルーリン上に、Ｃｏ−０ｒ垂垂直磁気
記憶体を付与し、 ｌ＊ Ｃｏ−Ｃｒ１Ｆ直磁気記憶媒
体上に保護膜を被覆したことｔ−特徴とする垂直磁気記
憶体。A Co-0r perpendicular magnetic storage medium is applied to a non-magnetic nickel-phosphorous layer formed on an Arun alloy disc substrate and whose surface is face-polished, and a protective film is coated on the l* Co-Cr1F perpendicular magnetic storage medium. What we did - Characteristic perpendicular magnetic memory.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56160549A JPS5862823A (en) | 1981-10-08 | 1981-10-08 | Vertical magnetic storage body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56160549A JPS5862823A (en) | 1981-10-08 | 1981-10-08 | Vertical magnetic storage body |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5862823A true JPS5862823A (en) | 1983-04-14 |
Family
ID=15717385
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56160549A Pending JPS5862823A (en) | 1981-10-08 | 1981-10-08 | Vertical magnetic storage body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5862823A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6052917A (en) * | 1983-09-01 | 1985-03-26 | Seiko Epson Corp | Vertical magnetic recording disk substrate |
| EP0247334A2 (en) * | 1986-04-03 | 1987-12-02 | Matsushita Electric Industrial Co., Ltd. | Magnetic recording medium |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4720803U (en) * | 1971-03-19 | 1972-11-09 | ||
| JPS5146907A (en) * | 1974-10-21 | 1976-04-22 | Fuji Photo Film Co Ltd | JIKIDEISUKU |
| JPS5220804A (en) * | 1975-07-01 | 1977-02-17 | Nec Corp | Magnetic memory device and the manufacturing method |
| JPS52134706A (en) * | 1976-05-06 | 1977-11-11 | Univ Tohoku | Vertical magnetic recorder reproducer and system therefor |
| JPS53106101A (en) * | 1977-02-28 | 1978-09-14 | Nec Corp | Magnetic memory body |
| JPS5451804A (en) * | 1977-09-30 | 1979-04-24 | Shiyunichi Iwasaki | Magnetic recording medium |
| JPS54162508A (en) * | 1978-06-13 | 1979-12-24 | Nec Corp | Magnetic memory medium |
| JPS558690A (en) * | 1978-06-13 | 1980-01-22 | Cii | Magnetic data carrier for vertical recording |
| JPS55111110A (en) * | 1979-02-21 | 1980-08-27 | Fujitsu Ltd | Vertical type magnetic recording medium |
| JPS5651028A (en) * | 1979-10-02 | 1981-05-08 | Nec Corp | Manufacture for magnetic memory element |
-
1981
- 1981-10-08 JP JP56160549A patent/JPS5862823A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4720803U (en) * | 1971-03-19 | 1972-11-09 | ||
| JPS5146907A (en) * | 1974-10-21 | 1976-04-22 | Fuji Photo Film Co Ltd | JIKIDEISUKU |
| JPS5220804A (en) * | 1975-07-01 | 1977-02-17 | Nec Corp | Magnetic memory device and the manufacturing method |
| JPS52134706A (en) * | 1976-05-06 | 1977-11-11 | Univ Tohoku | Vertical magnetic recorder reproducer and system therefor |
| JPS53106101A (en) * | 1977-02-28 | 1978-09-14 | Nec Corp | Magnetic memory body |
| JPS5451804A (en) * | 1977-09-30 | 1979-04-24 | Shiyunichi Iwasaki | Magnetic recording medium |
| JPS54162508A (en) * | 1978-06-13 | 1979-12-24 | Nec Corp | Magnetic memory medium |
| JPS558690A (en) * | 1978-06-13 | 1980-01-22 | Cii | Magnetic data carrier for vertical recording |
| JPS55111110A (en) * | 1979-02-21 | 1980-08-27 | Fujitsu Ltd | Vertical type magnetic recording medium |
| JPS5651028A (en) * | 1979-10-02 | 1981-05-08 | Nec Corp | Manufacture for magnetic memory element |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6052917A (en) * | 1983-09-01 | 1985-03-26 | Seiko Epson Corp | Vertical magnetic recording disk substrate |
| EP0247334A2 (en) * | 1986-04-03 | 1987-12-02 | Matsushita Electric Industrial Co., Ltd. | Magnetic recording medium |
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