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JPS5827056A - Oxygen gas sensor - Google Patents

Oxygen gas sensor

Info

Publication number
JPS5827056A
JPS5827056A JP56126329A JP12632981A JPS5827056A JP S5827056 A JPS5827056 A JP S5827056A JP 56126329 A JP56126329 A JP 56126329A JP 12632981 A JP12632981 A JP 12632981A JP S5827056 A JPS5827056 A JP S5827056A
Authority
JP
Japan
Prior art keywords
disc
raw sheet
electrode
sensor
plasticizer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56126329A
Other languages
Japanese (ja)
Inventor
Kimio Momiyama
籾山 公男
Takeo Ido
井戸 猛夫
Toshiaki Sato
敏昭 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP56126329A priority Critical patent/JPS5827056A/en
Publication of JPS5827056A publication Critical patent/JPS5827056A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403Cells and electrode assemblies
    • G01N27/406Cells and probes with solid electrolytes
    • G01N27/407Cells and probes with solid electrolytes for investigating or analysing gases

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Molecular Biology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measuring Oxygen Concentration In Cells (AREA)
  • Fuel Cell (AREA)

Abstract

PURPOSE:To attain sensors with thermal shock resistance and good durability by a construction wherein electrodes are formed on a raw sheet containing stabilized ZrO2 powder, a resin bonding agent and a plasticizer, and thus formed two sheets are bonded under high-temperature and high-pressure through a hollow raw sheet containing ZrO2 and then are sintered. CONSTITUTION:A raw sheet which contains ZrO2 powder stabilized with Y2O3, a bonding agent such as polyvinylbutyral, and a plasticizer such as polyethyleneglycol or octylphthalate, is punched into a disc 23 formed with a fine hole 53 at its center. Dick- like platinum electrode 43 and lead portions 61 are formed on both sides of the disc 23 through screen printing. Thus obtained two discs 23 are superimposed on both sides of an annular disc raw sheet 12 (made of the same material as the disc 23) having a larger outer diameter than the disc 23, and then are sintered under high-temperature after heating and pressure-bonding them. With one disc electrode 42 of thus obtained sensor being as a sensing electrode, voltage is applied to the other disc electrode 41 through a feedback amplifier, thereby to measure O2 density. This sensor has good thermal shock resistance, will never undergo separation at the bonded portions and has a prolonged service life. In addition, the measured results with good linearity can be attained with respect to O2 density.

Description

【発明の詳細な説明】 本発明は基準大気圧が不要の酸素センサに関するもので
ある。酸素ガスセンサは工業計測制御あるいは自動車排
ガス制御のために必要なセンサであり1種々のタイプの
センサが実用化されている。この中で、近年ジルコニア
固体電解質を用いたr11素濃淡電池型のセンサは、汚
ない排ガス中での信頼性及び高温煙道部への直接挿入が
可能なセンサとして、また自動車公害防止用センサとし
て広く実用に供されている。この酸素濃淡電池型酸素セ
ンサの欠点は、&埋的に基準酸素濃度ガスが必要な事で
あり2通常大気圧を使用する為、必らず、開孔部を煙道
外に出さねばならなかった。最近、この点を改良する為
に、基準酸素濃度ガスを必要としない新しいタイプのジ
ルコニア酸素ガスセンサが提案さhた。この公知のセン
サの構造は、第1図に示すように1円筒形のスペーサ6
υの両側に2枚のジルコニア円板on 、 @が接着用
ガラス(31) 、 (32)により接着されている。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an oxygen sensor that does not require a reference atmospheric pressure. Oxygen gas sensors are necessary for industrial measurement control or automobile exhaust gas control, and various types of sensors have been put into practical use. Among these, in recent years, R11 elemental concentration cell type sensors using zirconia solid electrolytes have been developed as sensors that are reliable in dirty exhaust gas and can be inserted directly into high-temperature flues, and as sensors for automobile pollution prevention. It is widely used in practical applications. The disadvantages of this oxygen concentration battery type oxygen sensor are that it requires a reference oxygen concentration gas buried in the sensor, and because it uses normal atmospheric pressure, the opening must be exposed outside the flue. . Recently, in order to improve this point, a new type of zirconia oxygen gas sensor that does not require a reference oxygen concentration gas has been proposed. The structure of this known sensor consists of one cylindrical spacer 6 as shown in FIG.
Two zirconia disks are bonded on both sides of υ with adhesive glasses (31) and (32).

このジルコニアの両面には白金電極(41m) 、 (
41b) 、(42m) 、 (42b)が蒸着さり、
しかもこの円板の中央部に細孔(51) 、 (52)
が設けである。今、この電極の一対(41m) 、 (
4th)の両端に電圧Vを印加すると。
Platinum electrodes (41m) are placed on both sides of this zirconia.
41b), (42m), (42b) are deposited,
Moreover, there are pores (51) and (52) in the center of this disk.
is the provision. Now, this pair of electrodes (41m), (
4th) when a voltage V is applied across the terminal.

固体電解質としてのジルコニアaυを通して酸素ガスが
導入される。円筒内部に酸素ガスが導入されると白金1
極(42m) 、 (42b)の両端に起電力ひが生ず
ると同時に、内部に導入された酸素ガスは細孔(sl)
 、 (52)を通して拡散散逸する。
Oxygen gas is introduced through zirconia aυ as a solid electrolyte. When oxygen gas is introduced into the cylinder, platinum 1
At the same time, an electromotive force is generated at both ends of the poles (42m) and (42b), and at the same time, the oxygen gas introduced inside the pores (sl)
, (52).

この時、第2図に示すように起電力ひを一定にするよう
に帰還増幅器を用いた回路を構成し。
At this time, as shown in FIG. 2, a circuit using a feedback amplifier is configured to keep the electromotive force constant.

恒温中で酸素濃度を測定すると、流りる電流xpは酸素
濃度に比例する為にセンサとしての利用が可能となるも
のである。このセンサはN2ガスあるいはCO2ガス中
の酸素濃度に関し、非常に直線性のよい特性を示すが、
センサ構成法として2円筒形スペーサの両端にガラス接
着さhているため、高温での長時間使用により、接着用
ガラスが円筒形スペーサおよびジルコニアの粒界に拡散
し、高温、常温間のヒートサイクルを繰り返すと粒界部
にマイクロクラックを発生し。
When the oxygen concentration is measured at a constant temperature, the flowing current xp is proportional to the oxygen concentration, so it can be used as a sensor. This sensor shows very linear characteristics regarding the oxygen concentration in N2 gas or CO2 gas, but
As the sensor is constructed by bonding glass to both ends of two cylindrical spacers, when used for long periods of time at high temperatures, the bonding glass diffuses into the cylindrical spacers and the grain boundaries of the zirconia, causing heat cycles between high and room temperatures. If this process is repeated, microcracks will occur at the grain boundaries.

耐久性の点で問題があった。また、急速な加熱あるいは
冷却に対しても、熱膨張係数の近いガラスを選択して使
用しても、熱伝導の相異と加熱、冷却の温度分布の友め
に、クラックを生じ易く、信頼性の点でも問題があった
。本発明はこの欠点を改良する為に、スペーサ部分にも
ジルコニアを用い、ジルコニア円板との接合部もガラス
接着する事なく、焼結工程において、1II11時に一
体化する半により、高温長時間使用に耐え、且つ、熱衝
撃にも強いセンサを提供することを目的とする。すなわ
ち、従来のセンサが炉結固体としてのスペーサおよびジ
ルコニア円板を用い、ガラス接着により構成していたの
に対して2本発明はスペーサおよびジルコニア円&とし
て、ジルコニア粉と熱可塑性有機結合剤及び有機可塑剤
を含む生シートを打抜き成形する事により作成し、ジル
コニア円板の所望電極としてスクリーン印刷により、電
極パターンを形成し、スペーサ及び円板部を加熱圧着し
て接合し、しかる後に脱バインダーを含む焼結工程にて
、高温焼結する事によシ製造さf′1fc亭を特徴とす
るセンサに関する。
There was a problem with durability. In addition, even if glasses with similar coefficients of thermal expansion are selected and used for rapid heating or cooling, cracks are likely to occur due to differences in heat conduction and temperature distribution during heating and cooling, making it unreliable. There were also problems in terms of gender. In order to improve this drawback, the present invention uses zirconia for the spacer part, and the joint part with the zirconia disk is not bonded to glass, but the half that is integrated at 1II and 11 in the sintering process is used at high temperatures for a long time. The purpose of the present invention is to provide a sensor that is resistant to thermal shock as well as thermal shock. That is, while the conventional sensor used a spacer and a zirconia disk as a furnace solid and was constructed by glass bonding, the present invention uses zirconia powder, a thermoplastic organic binder, and a zirconia disk as a spacer and a zirconia disk. A raw sheet containing an organic plasticizer is made by punching and forming, an electrode pattern is formed by screen printing as the desired electrode of a zirconia disk, the spacer and the disk are bonded by heat and pressure, and then the binder is removed. The present invention relates to a sensor characterized by a f′1fc-shaped structure manufactured by high-temperature sintering in a sintering process including:

上記生シートの作成は、熱可塑性有!I1.M合剤とし
て、ポリビニルブチラール、ポリビニルアセタール樹脂
等を用い、また有機可塑剤とじては、ポリエチレングリ
コール、フタール酸エステル等を用い、これらを溶剤を
介して混練あるいは泥漿化し、ロール法、押し出し法あ
るいはドクタブレード法等により生シートを作成する。
The above raw sheet is made using thermoplastic! I1. As the M mixture, polyvinyl butyral, polyvinyl acetal resin, etc. are used, and as the organic plasticizer, polyethylene glycol, phthalic acid ester, etc. are used, and these are kneaded or made into a slurry through a solvent, and then processed by the roll method, extrusion method, or A green sheet is created using a doctor blade method or the like.

以下、実施例に従って本発明を説明する。Hereinafter, the present invention will be explained according to examples.

実施例 トリクロルエチレンTO重−577%、エチルアルコー
ル30重量%混合溶剤40grに結合剤としてボ1Jビ
ニルブチラール3.5gr 、可塑剤としてポリエチレ
ングリコール3.7gr lオクチルフタレー) 3.
2grを添加溶解し2分散剤としてトリオレインを添加
した後、、 1’20grのY2O,(10重量%)で
安定化したZ r O2粉を加えボールミルにて10時
間混合して泥漿を作成した。この泥漿を脱泡処理の後、
ポリエステルフィルム上に流し、0.8mの空隙を有す
るドクタブレードにてシートを作成し、該シートを乾燥
した後。
Example 577% trichlorethylene TO (by weight), 30% by weight ethyl alcohol (40gr mixed solvent, 3.5gr B1J vinyl butyral as a binder, 3.7gr polyethylene glycol (octyl phthalate) as a plasticizer) 3.
After adding and dissolving 2gr and adding triolein as a dispersant, 1'20gr of ZrO2 powder stabilized with Y2O (10% by weight) was added and mixed in a ball mill for 10 hours to create a slurry. . After degassing this slurry,
After pouring onto a polyester film and making a sheet with a doctor blade having a gap of 0.8 m, and drying the sheet.

I!3図に示したように中央部に0,1mの穴(53)
を有する直径15■の円板(ハ)を打ち抜き加工により
2枚作成した。次いで、この円板の表裏面の中央部に第
4図に示すように直径10鰐の白金電極(43) 、お
よび取り出しリード部(61)が配置するように、白金
に白金ペーストを用いてスクリーン印刷した。
I! As shown in Figure 3, there is a 0.1m hole (53) in the center.
Two disks (c) with a diameter of 15 cm were made by punching. Next, a screen is formed on the platinum using platinum paste so that a platinum electrode (43) with a diameter of 10 mm and a take-out lead part (61) are placed in the center of the front and back surfaces of this disk, as shown in FIG. Printed.

また、第5図に示すような内径13−1外径155mの
環状円板a2を打ち抜きスペーサとして。
Further, an annular disk a2 having an inner diameter of 13-1 and an outer diameter of 155 m as shown in FIG. 5 was punched out as a spacer.

前記円板を上下面重ね合わせて160Cにて加熱圧着し
た。これを電気炉中に挿入し、1600Cにて5時間鋳
結した。このようにして作成したセンサを第2図と同様
に一方の円板のt極対をセンシングの電極とし、他方の
円板の%極対に帰還増幅器を通して電圧を印加して流り
る電流と窒素中の酸素濃度との関係を800Cにて針側
した結果、第6図に示すように直線性のよい特性が得ら
れた。次いで、このセンサを常温と1200tl’の間
を100サイクル繰り返し加熱冷却を行なったが、マイ
クロクラックの発生は認められなかった。また、 5o
OCに加熱後室温に放冷する急冷によっても可等異常F
i認めら名なかった。
The above-mentioned disks were stacked on top and bottom and were heat-pressed at 160C. This was inserted into an electric furnace and cast at 1600C for 5 hours. The sensor created in this way is used as the sensing electrode in the t-pole pair on one disk, and a voltage is applied to the %-pole pair on the other disk through a feedback amplifier in the same manner as shown in Fig. 2. As a result of examining the relationship with the oxygen concentration in nitrogen at 800C, a characteristic with good linearity was obtained as shown in FIG. Next, this sensor was heated and cooled repeatedly between room temperature and 1200 tl' for 100 cycles, but no microcracks were observed. Also, 5o
Equivalent abnormality F can also be caused by rapid cooling by heating to OC and then cooling to room temperature.
I didn't recognize it.

なお、この試験条件は従来のガラス接着により構成しに
センサでは耐え得なかった条件である。
Note that these test conditions were conditions that conventional sensors constructed using glass adhesive could not withstand.

尚2本実施例では形状を円板と堤状板の組み合わせとし
たが他の形状であってもよい。
In the second embodiment, the shape is a combination of a disk and a bank-like plate, but other shapes may be used.

以上説明したように2本発明によれば接合部にガラス接
着を用いる半なく、拡散用細孔分有し、内外面に電極を
有する閉中空形状七ンサを作る事が可能となり、耐久性
、サーマルショックに対する信頼性が極めて大きくなり
、その工業的利用価値は犬である。
As explained above, according to the present invention, it is possible to make a closed hollow shape sensor that does not use glass adhesive at the joint, has pores for diffusion, and has electrodes on the inner and outer surfaces, and has excellent durability and Its reliability against thermal shock is extremely high, and its industrial utility value is significant.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は公知の酸素センサの構成を示す断面図、第2図
は帰還増幅器を用いた計測回路の原理図、第3図は本発
明の電極部用生シートの平面図、第4図は印刷電極およ
び引き出しリードを形成した状態を示す平面図、第5図
はスペーサ用生シート平面図、第6図は本発明センサの
特性例を示す図であ吃。 図において、aコは中空形成用スペーサ、r2υ。 (2)ハシルコニア、 (31) 、 (32)は接着
用ガラス。 (41) 、 (42)は白金電極、 (51) 、 
(52) 、 (53) Fi拡散細孔、(2)はジル
コキア生シー) 、 (43)は印刷−極、 (61)
は印刷引き出しリードである。 代理人 葛 野 信 − 図面の浄書(内容に変更なし) 第1図 第2図 第3r!J    [4図 第5図 第6図 酸鼻二藩度(〃〕 手続補正書(方式) 昭♂7 年2 月19 日 特許庁長官殿 1、事件の表示    特願昭 56−126329号
2、発明の名称 酸素ガスセンサ 3、補正をする者 事件との関係   特許出願人 住 所     東京都千代田区丸の白玉丁目2番3号
名 称(601)   三菱電機株式会社代表者片山仁
八部 4、代理人 住 所     東京都千代田区丸の白玉丁目2番3号
6、補正の対象 明細書および図面。 ?、軸補正内容 明細書および図面の浄書(内容に変更なし)0以上
Fig. 1 is a cross-sectional view showing the configuration of a known oxygen sensor, Fig. 2 is a principle diagram of a measurement circuit using a feedback amplifier, Fig. 3 is a plan view of the raw sheet for electrode parts of the present invention, and Fig. 4 is FIG. 5 is a plan view showing a state in which printed electrodes and extraction leads are formed, FIG. 5 is a plan view of a raw sheet for a spacer, and FIG. 6 is a view showing an example of the characteristics of the sensor of the present invention. In the figure, a is a hollow forming spacer, r2υ. (2) Hasilconia, (31) and (32) are adhesive glasses. (41), (42) are platinum electrodes, (51),
(52), (53) Fi diffusion pore, (2) is zircochia raw sea), (43) is printed-pole, (61)
is a printed drawer lead. Agent Shin Kuzuno - Engraving of the drawings (no changes to the contents) Figure 1 Figure 2 Figure 3r! J [Figure 4 Figure 5 Figure 6 Acid nose two domain degree (〃] Procedural amendment (method) February 19, 1932 Director-General of the Patent Office 1, Indication of case Patent application No. 126329/1989 2, Name of the invention: Oxygen gas sensor 3, relationship with the amended case Patent applicant address: 2-3 Marunoshiratama-chome, Chiyoda-ku, Tokyo Name (601): Mitsubishi Electric Corporation Representative Jinhachibe Katayama 4, Agent Address: 2-3-6, Shiratama-chome, Maruno, Chiyoda-ku, Tokyo, Specifications and drawings to be amended.

Claims (1)

【特許請求の範囲】 安定化ジルコニア固体電解質粉末と熱可塑性有機結合剤
、及び有機可塑剤を含む生シートを所望の厚さにて作成
する工程と前記化シー)[スクリーン印刷法にて電極を
形成する工程と。 前記電極を形成した生シート2枚と、中空部形成のため
の閉じた辺部を有する生シートから作らl#′Iたスペ
ーサを加熱角田接着し、中空閉形状を作成する工程と、
しかる後に高温加熱し焼結する工程とから成ることを特
徴とする拡散細孔を有する酸素ガスセンサ。
[Claims] A step of preparing a raw sheet containing a stabilized zirconia solid electrolyte powder, a thermoplastic organic binder, and an organic plasticizer to a desired thickness; The process of forming. A step of heating and kakuta-bonding the two raw sheets on which the electrodes were formed and a spacer made from the raw sheet having closed sides for forming a hollow part to create a hollow closed shape;
1. An oxygen gas sensor having diffusion pores, which comprises a step of subsequently heating at a high temperature and sintering.
JP56126329A 1981-08-12 1981-08-12 Oxygen gas sensor Pending JPS5827056A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56126329A JPS5827056A (en) 1981-08-12 1981-08-12 Oxygen gas sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56126329A JPS5827056A (en) 1981-08-12 1981-08-12 Oxygen gas sensor

Publications (1)

Publication Number Publication Date
JPS5827056A true JPS5827056A (en) 1983-02-17

Family

ID=14932485

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56126329A Pending JPS5827056A (en) 1981-08-12 1981-08-12 Oxygen gas sensor

Country Status (1)

Country Link
JP (1) JPS5827056A (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS564047A (en) * 1979-06-26 1981-01-16 Nissan Motor Co Ltd Lamination type membrane-covered oxygen sensor
JPS5689052A (en) * 1979-12-20 1981-07-20 Nissan Motor Co Ltd Preparation of lamination layer type element of oxygen sensor
JPS5692449A (en) * 1979-12-26 1981-07-27 Toyota Motor Corp Production of oxygen sensor element

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS564047A (en) * 1979-06-26 1981-01-16 Nissan Motor Co Ltd Lamination type membrane-covered oxygen sensor
JPS5689052A (en) * 1979-12-20 1981-07-20 Nissan Motor Co Ltd Preparation of lamination layer type element of oxygen sensor
JPS5692449A (en) * 1979-12-26 1981-07-27 Toyota Motor Corp Production of oxygen sensor element

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