JPS58147026A - Apparatus for film formation by glow discharge - Google Patents

Abstract

PURPOSE:To obtain a film in the uniform thickness at the external circumference of a cylindrical sample by grow discharge by providing an auxiliary tube of the same diameter as the sample being arranged in the state to be closely attached to the sample coaxially. CONSTITUTION:An auxiliary tube 7 provided at the lower end has the same outer diameter as a sample 6. The outer circumference of upper portion of such tube is cut and is inserted into the sample 6, thereby working as a fixing base. The upper end of auxiliary tube provided at the upper portion is sealed and it is also used as an upper cover of sample 6 preventing entrance of reaction gas into said sample. Moreover, it has the same outer diameter as the sample 6 and is inserted thereto through the cutting of the circumference of the lower end. Thereby, the sample 6 and auxiliary tubes 7, 8 are integrated without stepped portions and gaps. When a thin film is formed on the circumference of the sample 6 through the glow discharge by introducing the gas 3 into the reaction chamber 1, the gas flow is not disturbed and the field becomes uniform since there exist no stepped portion and gap. Accordingly, a thin film having extremely uniform thickness can be formed and abnormal thickness at both ends of the sample 6 does not exist.

Description

Detailed Description of the Invention [Technical Field of the Invention] The present invention relates to an apparatus for forming a film by decomposing a source gas by glow discharge, and particularly relates to an apparatus for forming a uniform film on the outer peripheral surface of a cylindrical sample. [Technical background of the invention and its problems] Conventionally, when the shape of the sample is cylindrical in the apparatus used to form a film by glow discharge, the sample is placed in a reaction chamber and simply placed vertically on a support stand. 'JL was generally only fixed. In this case, when trying to deposit a predetermined thin layer of 1Kk on the sample surface by glow discharge, the introduced gas flow and the electric field are non-uniform at both ends of the sample, so it is difficult to obtain a uniform film thickness. was difficult.

When a predetermined uniform film cannot be obtained, for example, when this film is used as an electrophotographic photosensitive member, there is a drawback that the film formation becomes significantly non-uniform.

[Purpose of the invention]

The present invention uses glow discharge to form a film with a uniform thickness on the outer peripheral surface of a cylindrical sample. The purpose is to provide a film forming apparatus that

[Summary of the invention]

In the present invention, auxiliary tubes having the same outer diameter as the sample are attached to both ends of a cylindrical sample placed in a reaction chamber coaxially with the sample, so that the shape specificity of both ends of the sample can be removed. In this case, it is necessary that the auxiliary tube has the same outer diameter as the sample body so that there is no step between the auxiliary tube and the sample body. -It is necessary to ensure close contact to prevent this from occurring. This is because the above-mentioned hollow gap R1i also reduces the gas flow O and the electric field non-uniformity. (10) It may or may not be necessary to use the same material as the material (0), and the conditions such as the length of the auxiliary tube, actanization, etc. should be determined. Uniform thickness o*i* on the outer peripheral surface of
ft.

[Embodiments of the invention°]

Next, the present invention will be explained in detail using examples. 01 W is a schematic diagram of a four-discharge device showing the present invention, and FIG. 2 is a longitudinal cross-sectional view of the main part. Induction coil 2 around
is installed, with raw material gas inlet 3 at the top and exhaust port 4 at the bottom.
is provided. 5 is pulp. A cylindrical sample 6 is placed in a reaction iiJ with auxiliary tubes 1 and 8 provided at both its upper and lower ends. The auxiliary tube 2 on the lower end side is a fixing stand for sample C [
It has the same outer diameter as sample C' like 15zE, and in order to fix the sample, its upper part can be cut from the outer periphery and inserted into sample 6. Upper end side auxiliary y
g is the upper end 1* which also serves as an upper cover to prevent gas intrusion into the sample C. It has the same outer diameter as the sample 6, and its lower part is cut and inserted into the sample 6.

Specific example [For example, sample 6 has an outer diameter of 80 mm and a length of 270 mm.
It is a U cylinder with a thickness of 1% and a thickness of 2.The insertion part of the auxiliary tube V, t is 201111. In total, each is a U-cylinder with a length of 120 sEI.

The sample C and the auxiliary tube 2.8 are in a state where there is no difference in level and there is no gap.

After this process, amorphous silicon was deposited on the outer peripheral surface of the sample 6 using the following procedure.

□First, reaction 1i [in J [exhaust I XI O-' T
At this time, the * side of the sample C was heated to 250° C. by a heater (not shown) K. Next, operate the gas supply system to H! Base BIH4 gas and B! H and gas are mixed and introduced into the reaction group 1 through the gas introduction convex 3. Then, the pressure inside the reaction vehicle is set to t 0.5 Torr by pulp operation of the exhaust system. After that, high-frequency power was applied to the coil 2 wound around the reactor to deposit an asilicon film, and a film of about 20 μm was formed, with a film thickness variation of 10 nm on the outer circumferential surface of the sample. Within -9, no abnormality in film thickness was found at both ends of the sample.

In addition, one sample [a sample that was used as a photosensitive drum for electrophotography and was confirmed to form an electrophotographic image without any porosity at 9 o'clock.

[Brief explanation of drawings]

jIIWJ is a schematic diagram showing an apparatus according to an embodiment of the present invention, 51
FIG. 112 is a sectional view showing the main part thereof.・1:... Co-reaction wealth, 2... High frequency induction coil, J.
...Gas, J Taniguchi, 4...Exhaust port, 5...Pulp, 6...Cylindrical sample, 1. ＃・・・Auxiliary pipe 0 Patent attorney Suzue Takehiko Figure 1 Figure 2

Claims (1)

[Scope of Claims] An apparatus for introducing a raw material gas into a reaction chamber and decomposing it by glow discharge to form a film on the outer peripheral surface of a cylindrical sample, wherein both ends of the sample have the same outer diameter as the sample. Auxiliary tube [It should be placed coaxially with the sample and in close contact with the sample.[Characteristics and T-stone film forming device using glow discharge]