JPS58134855U - scanning electron microscope - Google Patents
scanning electron microscopeInfo
- Publication number
- JPS58134855U JPS58134855U JP3094082U JP3094082U JPS58134855U JP S58134855 U JPS58134855 U JP S58134855U JP 3094082 U JP3094082 U JP 3094082U JP 3094082 U JP3094082 U JP 3094082U JP S58134855 U JPS58134855 U JP S58134855U
- Authority
- JP
- Japan
- Prior art keywords
- sample chamber
- sample
- lid
- scanning electron
- electron microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Microscoopes, Condenser (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図及び第２図は夫々従来装置の例を示す概略図、第
３図は本考案の一実施例を示す縦断面図である。
５：カラム、６：電子銃、７，８：集光レンズ、９ａ、
９ｂ：偏向コイル、１０：試料室、１１：Ｍ体、１
２：固定台、１３：対物レンス部、１４ａ、１４ｂ：対
物レンズ、１５：ターレット機構、１６：反射鏡、１７
：光透過窓、１８：接眼レンズ部、１９：接眼レンズ、
２０：反射鏡、２１：カメラ取付部、２２ニブレバラー
ド、２３：試料ステージ、２４：駆動部、２５：光源部
、２６：ライトガイド、２７：投光器、２８：電子線通
過孔、２９：反射電子検出器。1 and 2 are schematic diagrams showing examples of conventional devices, respectively, and FIG. 3 is a longitudinal sectional view showing an embodiment of the present invention. 5: Column, 6: Electron gun, 7, 8: Condensing lens, 9a,
9b: Deflection coil, 10: Sample chamber, 11: M body, 1
2: Fixed base, 13: Objective lens unit, 14a, 14b: Objective lens, 15: Turret mechanism, 16: Reflector, 17
: light transmission window, 18: eyepiece part, 19: eyepiece lens,
20: Reflector, 21: Camera mounting part, 22 Nibblerade, 23: Sample stage, 24: Drive part, 25: Light source part, 26: Light guide, 27: Floodlight, 28: Electron beam passage hole, 29: Backscattered electron detection vessel.
Claims (1)
容する試料室、試料からの情報信号を検出する検出器及
び該検出器の出力が映像信号として供給される表示装置
を備えた装置において、前記試料室の蓋体の真空側に光
学顕微鏡の対物レンズ部をその先軸が前記集束レンズ系
の電子軸と一致する様に取り付け、該光学対物レンズと
前記集光レンズとの間に試料ステージ及び投光器を配置
せしめ、少くとも試料ステージは前記試料室の蓋体に取
り付け、前記光学顕微鏡の接眼レンズ部を試料室蓋体の
大気側に取り付け、更に前記対物レンズ部及び試料ステ
ージの駆動部を試料室蓋体に設置してなる走査電子顕微
鏡。 ２ 上記試料室蓋体は走査像専用試料ステージを有する
通常の試料室蓋体と交換可能である実用新案登録請求の
範囲第１項記載の走査電子顕微鏡。 ３ 前記試料室蓋体を試料室から取り外した場合光学対
物レンズ部及び接眼レンズ部はそのまま光学顕微鏡とし
て使用できる実用新案登録請求の範囲第１項又は第２項
記載の走査電子顕微鏡。[Scope of Claim for Utility Model Registration] 1. An electron gun, a focusing lens system, an electron beam scanning means, a sample chamber for containing a sample, a detector for detecting information signals from the sample, and the output of the detector is supplied as a video signal. In the apparatus, an objective lens section of an optical microscope is attached to the vacuum side of the lid of the sample chamber so that its tip axis coincides with the electron axis of the focusing lens system, and the optical objective lens and the A sample stage and a projector are arranged between the condenser lens, at least the sample stage is attached to the lid of the sample chamber, the eyepiece of the optical microscope is attached to the atmosphere side of the sample chamber lid, and the objective A scanning electron microscope in which the lens section and the drive section for the sample stage are installed on the sample chamber lid. 2. The scanning electron microscope according to claim 1, wherein the sample chamber lid is replaceable with a normal sample chamber lid having a sample stage dedicated to scanning images. 3. The scanning electron microscope according to claim 1 or 2, wherein when the sample chamber lid is removed from the sample chamber, the optical objective lens section and the eyepiece section can be used as an optical microscope as they are.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3094082U JPS58134855U (en) | 1982-03-05 | 1982-03-05 | scanning electron microscope |
| GB08304432A GB2130433B (en) | 1982-03-05 | 1983-02-17 | Scanning electron microscope with as optical microscope |
| US06/471,440 US4537477A (en) | 1982-03-05 | 1983-03-02 | Scanning electron microscope with an optical microscope |
| DE3307745A DE3307745C2 (en) | 1982-03-05 | 1983-03-04 | Scanning electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3094082U JPS58134855U (en) | 1982-03-05 | 1982-03-05 | scanning electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58134855U true JPS58134855U (en) | 1983-09-10 |
Family
ID=30042632
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3094082U Pending JPS58134855U (en) | 1982-03-05 | 1982-03-05 | scanning electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58134855U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010257587A (en) * | 2009-04-21 | 2010-11-11 | Jeol Ltd | Sample inspection method and sample inspection device |
-
1982
- 1982-03-05 JP JP3094082U patent/JPS58134855U/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010257587A (en) * | 2009-04-21 | 2010-11-11 | Jeol Ltd | Sample inspection method and sample inspection device |
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