JPS58113746A - Electronic scanning type ultrasonic test equipment - Google Patents

Abstract

PURPOSE:To detect a flaw of a stable picture quality with high accuracy, by using an array type probe on which plural vibrators for transmitting and receiving an ultrasonic wave have been provided in parallel, and controlling the timing for energizing and reception of the vibrator. CONSTITUTION:n-number of vibrators 1 provided in parallel are cupled with n- number of ultrasonic transmitters 2, are energized, and an ultrasonic wave is transmitted. A receiving signal detected by the vibrator is amplified, and thereafter, is inputted to an A/D converter 5, and is digitally converted. To the converter 5, a trigger signal is inputted from a receiving delay setting device 6. To transmitting and receiving delay setting devices 3, 6, the timing for sending out a trigger signal is set by a signal from a computer 7. By matching an output time point of the converter 5, the signal is stored in a memory 8, adding it by n-number each. A signal processor 9 selects a range of a beam route for processing the signal by the signal from the computer 7, sets a threshold level, and adds picture sweeping and luminance modulation to a picture display 10 by whether said range has exceeded the level or not, so that a flaw detecting waveform can be observed.

Description

[Detailed Description of the Invention] Technical Distribution of the Invention The present invention provides a method for directly detecting fine flaws with high precision using an electronic waterfall type ultrasonic wave method. It is related to the device.

The technique of the invention is a method of ITS wave sweeping using several ultrasonic transducers (probes (FA-F) arranged in parallel).
Ultrasonic transmission timing and reception timing for IIb child From C2, ultrasonic phase interference in nm material [Focusing and deflection of ultrasonic beam! Go there and get the sound wave reflection practice. Therefore, by blocking and biasing the 1111if wave beam in the material to be tested, the mist probe V! As a fan-shaped B-skog image, it is possible to make fresh water in real time without moving, and a relatively small I
sF! It has the characteristic of being able to perform flaw detection over a wide area with Ii1.

BACKGROUND Mosquito bite point in front of the front.
It is known that as the 11@J characteristics become more prevalent, the short-distance distance becomes brighter, and the convergence effect at the same distance east of the prefecture becomes smaller.

On the other hand, when the ultrasonic beam v1 is made to be the same due to the screw scanning method≦2, the apparent probe aperture size compared to the ultrasonic beam path Fi@l2 becomes smaller than the actual probe aperture size L4. , when the ultrasonic beam deflection angle is large, the tendency is remarkable. This changes the directivity and focusing effect of the ultrasound beam.

Therefore, the entire lit-wave beam deflection range inside the material to be tested [, the direction angle given by the flaw precision Kc large ##Ilk [ms] as an ultrasonic beam with constant intensity is #8-, and the center There is a drawback that the image quality on both sides becomes poor compared to C2, and the accuracy of the damage decreases.

Purpose of the Invention The present invention has been made in consideration of the above-mentioned situation 6. Even when the ultrasonic beam t'4ul is focused within the material to be tested, the deflection angle 62 of the ultrasonic beam t'4ul is not affected. The object of the present invention is to provide a scanning type ultrasonic wave probe capable of producing a focused ID1ljf wave beam with a constant intensity of 4 and 1iIi'iK, which can be increased by 62 nm.

In other words, the present invention uses an array image probe V in which a plurality of transducers for transmitting and receiving ultrasonic waves are arranged in parallel in order to perform superacidification for the above purpose, and this invention is applied to The multiple transducers of the 118-layer element are excited to obtain ultrasonic information V, and the transducers that transmit the I#J beam are focused in one direction of the ultra-111jL beam by controlling the timing of excitation, reception 1, and 1, respectively. 6; put the electronic scanning type super exhaustion C2,
This r-ta [original ≦ 2 women iIII 鑵 さ is constant C
[11il Deflection of the ultrasonic beam at Shenzhen The focal point for each month is 111 m, and the specified focusing intensity or directivity angle V of the ultrasonic beam is constant in accordance with this focal length. In the case where the focusing distance is constant, and the focusing distance is constant, C2 is the tilting element for each deflection angle. When the number is determined, the deflection angle of the ultrasonic wave is determined, and the corresponding number of transducers determined above is selected. Select a wartler WS and vibrate these selected transducers kMJ to obtain ultrasonic information to obtain a desired tilt angle lf (2, ultrasonic beam with constant directivity angle or constant focused intensity ≦; Allows for deep wounds.

EMBODIMENTS OF THE INVENTION Hereinafter, two examples of the present invention will be described with reference to aimt'. 1 and 2111 are horses for detailed explanation of the present invention. @ll+2 1(1)～
J (m) is a 1- ultrasonic wave transducer arranged in parallel for transmitting and receiving ultrasonic waves, and these F-wave transducers I#c form a single contact. Here, the combination 5 of these transducers #-2, transducer spacing, ultrasonic wave, and 1jIII#;
Given the apparent facet size 2mm composed of jL,
A predetermined focal length can be determined for the transmission of ultrasound beams to each transducer.

Here, the first scene that is formed when the super IT technique is sent is Jiao A car -?
41 in Figure 41, which is surrounded by 11llJ of the straight line S having the same angle β formed by the direct line from both ends of the probe size 1 mm and the 4 points (= 4 distances) where the ultrasonic waves are not focused, with the intersection point being Approximately C can be expressed within the embroidery of .On the other hand, this diagonal -
The inner number 2, good I#f, is surrounded by -8, and the focal length is 4? [It is between Hamasu Super Sodden 4 Kon Hire RL and RL.

In this case, the field isogonal β and the ultrasonic wave propagating through the S material are tli
λ(
In the case of 2m, it is further approximated by C;

λ 5ral= /Jmu ・・・−・O・・・φ・・
--1・-(1)λ/2mu;-β(λ(2mu)...
... (1)' Also, the focusing strength at the focal point wiay is determined by the following formula, and when D > 1, 6; the focusing effect is large and the increase in pressure accumulation at the focal point is significant. Haden II/I
The focusing area indicated by I separation r and r becomes final. In addition, in the case of D-1, the focusing 5vJ in a wide area before and after the focusing point is 4 to 1.
It can be seen that in the case of D<1, the focusing effect tends to disappear.

D! Mu/λ・y・・・・・・・・・・・・・・・
...(2) Next, when the ultrasonic beam r is polarized, C
;explain about. In Figure s2-2, the direction of the ultrasonic beam of the beam without deflection, that is, the direction perpendicular to the arrangement direction of the transducer group 6: The transmission direction of the rotating ultrasonic beam -U (two pairs of deflections) If one acoustic beam is deflected at an angle, multiple vibrations should be detected; the probe size is made up of 2 mm and the ultrasonic beam deflection angle is 2 mm, while the apparent probe size for the same number 2. , that is, the equivalent Sekiguchi (ultrasonic beam @) it is expressed by the following formula:
(3) Also, the directivity angle I and the focusing strength at the focusing point during beam deflection can be approximated by the following formula.

Company proverb β 昭λ/xi nee λ/im aw-・・・・・・(4
)Dmk") 2-FM (Acm#)"/J -F
...151 This means that in the vicinity of the focal point of the ultrasonic beam, that is, in the convergence area S2, the Mi snow waves V and M have the same circumference regardless of the polarization angle! - C; indicates that it is necessary to use an equivalent aperture of 5 hy - 1.
In order to keep the drag constant, if 4 k' is constant at the S point, it is necessary to reverse the equivalent angle i (!), but the focal point #111F changes. The L4 meeting, which is a place to do it, 41f salary wound carpet sa position 1fnt'-, is that the focus masochism r is more than 2 to the 1411-rl angle, so D is -, and C2 is mA. It shows that there is a change in the opening 2mm of the temple depending on the can, and in this case, since the equivalent 2mm changes, the directivity angle! changes depending on it ≦2. The focal A ratio 4F at this time is expressed by the F formula.

F-R/cQ4θ ・・・・・・・・・・・・・・・
(6) Therefore, in order to obtain a focused beam with a predetermined directivity angle β or a constant PJi (the second is the focus珀4j
't' 4 6 2 Therefore, - sound wave beam deflection angle #C
; It is possible to do so by setting the corresponding 5-touch opening u2m.

Well, it'll depend on the directivity angle or focusing strength of the neck wave beam.
From 62, the ultrasonic beam polarization has the same circumference g;
It becomes possible to

Figure 43 is an example of the configuration of a super grave wave detection system for realizing the present invention. These ultrasonic beams 1 (1) to l (- are respectively the transmission pulses generated by the n ultrasonic beams!! x < a ~ 2
/P), and in this ultrasonic transmission 4jl#, transmission fL! Transmission inosis generation bird #- from I-setting device 1
11, all or some of the transmitters are selected, and transmission pulses are sent to the corresponding ultrasound beams, and from this 3≦2, one ultra-f wave oscillator is excited and the ultrasound is started (II). Ru.

On the other hand, the Kaedo wave pendulum has reversibility and pressure changes.
Therefore, the ultrasonic beam also has a receiving power, and the received signal detected by each FM diaphragm is the corresponding SLR position amplifier 4(,]~
4-), respectively m@'s m/D
& 14 fFj(x) ~Jln).

These n M/D converters J(t) to 5(n) perform r notal conversion at a high speed of 1S for ultrasonic reception, and each M/D converter 5(1) to J(M) The trigger signal to start digital conversion of the received signal is set! ! I
This)9tf-11! The input ultrasonic signal at the time of inputting the signal is encoded into the r inotal 1i code. Here, set the reception delay! 1- and above delivery 11! Slow fly setting device J
are the 4A combination of the ultrasonic wave and the transmission pattern selected in advance by the i= number from the computer 1, the main beam direction of the ultrasonic wave, the focal point itself, and the transmission and reception characteristics ≦2. The time timing of the totsu f-number output is set.

Further, d is an addition memory for adding the output of the output of the direct/D converter 5, and the output of the received r isotal ultrasonic wave held by each direct/D converter 562/DKII1mM. At the time of output [By setting it up (11f Izotarui, add No.
By inputting and storing, the addition memo 9-R52 stores the dinotal signal waveform added by the r inotal No. 111 ms of one sardine. 7 is a computer that performs these controls, and 0g processes the memory of the addition memory 1 and displays images for m-image display! mMc4J.

Signal processing! ! I, and this signal processing [! 11 is the beam flux S of the added Tizotal ultrasonic waveform obtained above, and the signal C from the computer 1; the range V of the beam path machine to be processed by signal processing; the constant beam path machine range C; Threshold (threshold) level [can be set]. Here, the thread walk level is m
The detection waveform of the digital ultrasound waveform is set to 2, and depending on whether it exceeds the threshold i7Mk Drape kV, the image is intensified along with the convexity of the ultrasound main beam direction to the image display W. I am making it possible to add Tandushan. In addition, the signal AM device 9 converts the isotal ultrasonic waveform into analog, and converts the flaw detection waveform [notsukun tube C] into an analog signal so that it can be more clearly understood. This means that the shape of the ultrasound waveform is S
The opening degree of the image displayed on the small device W is determined based on the fact that it is valid information.

According to the Mizui with this structure, the above operations are sent 16, and in Uke 1, the change history of the change of the line, the change history of the king beam direction, and the IAA.
It is -f discharge to carry out the change history of distance≦two times.

Next, the operation of the computer 1 of the present invention - two Qin 4 diagram Y
In the explanation using 0 and 1, the computer I is used to calculate the ultrasonic wave disturbance λ, set beam polarization angle yoke -mi, θwax, and focusing by reducing the 嘱 steg st @ p l shown in Fig. 4. As a condition, Ura A distance? Either constant or constant position R-, the selected one is 1 or R1, C2, and the orientation angle as the hot water condition! - Set I or D when selecting normal or constant strength or Y. This setting condition is given to the computer 7.
Computer 7 under this condition ≦; s2 steg st
@12 k is executed to determine the minimum beam deflection radius - 1 mVG as the moth's initial beam deflection angle, and then the third step l
・Judge the focusing conditions in p3C2, and **
If the focusing condition is constant at the position 1lfRjI, perform the fourth step 7'at*p4&yield, and calculate the focusing distance Fm when the rebeam deflection angle θ is as follows. After that, move to the 5th step 5tep 5g2, and if the focusing condition is the focus M11 distance y-constant, do not perform this calculation and judge the next flaw detection condition, that is, move to the 5th step fst*p5C2/ss step fmt* For p@, if the orientation angle β is constant as the flaw detection condition, then Jl@steg sl@p@i will be transferred, and here, using equation (4), the probe dimension 1 mm square when the beam deflection angle # is the highest. ! Calculate again 5th step 5tep
54:, then Kento strength D - If there is a certain slight flaw condition, move to the 7th step 7'st@p74, and here, using the formula), similarly calculate 1 pair of ku 2 tactile dimensions and ws 8 steg $
1. Move to p8. Then, in s8 step 7"st@p8, it is determined whether the beam deflection angle #- is the maximum beam deflection angle -M1aK, and if n is not the maximum, again jl13 x tare 7
'st@p3I;
In this way, the beam deflection II (1 angle #I becomes the maximum beam deflection angle Irnax every -1 beam revolution) (=
Sequentially select probe dimensions 2 & I.

This collection of four pieces j[depending on the conditions and the flaw detection conditions, the four types of detection are the total of IjT. One is the condition that the focusing angle is constant at both ends, the second is the condition that the focusing strength is constant, and the second is the condition that the focusing strength is constant, and ≦
The condition is that the two focusing distances are 1 and 14 angles are constant with respect to the drilling direction, and the 1X distance is constant with respect to the sweeping and abrasion direction and the focusing strength is constant. These flaw detection conditions are prepared in advance on the computer 1 along with human data.
Since human power is ≦2, computer 7 is 4 vs.
C: Regardless of the ultrasonic beam deflection angle, select the Ii probe size that satisfies and is superior.

Here, the condition that the focusing strength D=〆 is constant is that there is no focusing, and only the directivity angle is m4Ill.
In this case, the method of recording the recording probe with the directivity angle -)' constant is 12.

In a moment, we will explain the operation example C of the noodle straightener in Figure 1. The transducer group-1 (1) to l- that constitute Jail' correspond to the transmission @ J (1) to 2.
- The selection of the probe size 2 is based on the flaw detection condition arc 2 described above.
Computer F (2) was performed by Mu Todoro's performance 171,
At this time, the ultrasonic beam deflection angle di and the focal length Fj
l: Delay time t4 of transmission/flux generation tri-t signal for focusing the ultrasonic beam, computer 7
At the same time as transmit delay setting 111 Hecon♂ unit rwt* is set, computer 1 is set for reception #1@child10)~
6IIl) (Similarly for two &: Reception week to set interval
Then, the transducer evaluation and the focal length rIID are selected; therefore, the appropriate beam intersection aIi to be given is set from the computer r to the signal processor p.

From this, the image display 11; shows that the ultrasonic waveform within the proper flaw detection range is subject to the brightness filtration on the C-m road, and the ultrasonic beam is sequentially
As described above, the deflection angle C:
A suitable transducer group is selected and the storage area is covered.

In addition, in Hontsukepo's WIj relative example 62, the sound pressure generated by the concentration of the ultrasonic beam j [c and the transmission and reception (1 change in sensitivity) due to Since kf4 is positive, the ultrasonic beam deflection angle and beam path 4i1≦
; Accordingly, the thread V jordrepe kVITf is
Using computer 7g = preset data #Y I: It is more possible.

In addition, in the configuration example of this book**, the Mu/D converter J (17 to
j (- is ms ultrasonic wave-motion element 1 (凰) ~ 1 (- ﾆﾆ);
The corresponding ridges are required, but this t11#w to 猷-C;
(Insert a switch switch P between -, then select the receiver 4(,) to 4(-) output, select the output of the 7th receiver, select the 1m1 waveform tm/Df, and then switch the digital The same effect can be obtained by inputting the data to the method 9-1 and adding it to 52, and it can be constructed at a low cost, but the operation moderation will be lower.

According to the above-mentioned Honkaku Meikin IfI, when searching inside the IF4 material, the -2 superfa beam (ai# regardless of the angle) has an approximately constant equivalent closure, that is, a constant directivity angle, or a line focusing strength. Kv
It is possible to keep it constant. Therefore, ′superfI/
Compared to the conventional method of ultrasonic beam deflection using a constant one-touch size for transmission and reception of il, stable azimuth resolution 11! regardless of the ultrasonic beam deflection angle! It is possible to detect flaws with high flaw detection ability, and the accuracy of estimating the size of defects in the material is greatly increased (see above).In addition, it is possible to align the focusing point [and focus strength Vt] to the desired flaw detection area. Because there is
As the focusing strength D-1@g, a wide mIl &
The stability L is stabilized, and the defect detection ability is increased @ flaw detection and focusing strength D) 1 is detected with m1 Ill rice. Focusing on the defect position 1' Estimation of defect size t - Volume a -
The reliability of the defect evaluation is large as described above.

In addition, the present invention can be implemented in a vertical format as appropriate within the scope of the present invention and IIWjAc without limitation and within the scope of its gist and without modification.For example, in the above example, the Although I have described two cases in which the oscillator evaluations that receive V are the same, it is also effective even if the main transmitter @Hiro transmission group and the receiver group are not the same.

In addition, although the present invention has been described using 6 in the case of fan-shaped scanning,
It is the same as the usual Kuko Takitsubo method that it can be applied to cases where Tsuni 7 scanning or Kon/F Kunbi Takitsubo is performed.

Furthermore, according to Akira Motoya, it is also possible to use the beam width of the focal region as a flaw condition, and in this case, the focal length and search are such that the allowable full beam width for the beam @ is 4 to f'LA. The tentacle size is about f floor 14
The present invention is more effective because stable azimuth resolution can be obtained regardless of the wave propagation distance.

In addition, in the configuration example of the first Umei eiIIIlf, number 4 is Asahi Hato J! I set up an image reward Jg at the end of the image reward Jg:
Grawan of the Strano layer. It is also possible to use a 3D display or to provide a 1-picture display between the signal display and the image display. Notes for displaying this image: Therefore, in addition to displaying a stable flaw detection image at all times, it is also possible to temporarily freeze the image display, and it is also possible to temporarily freeze the image display. As it is easy to output the flaw detection data to the device, it is extremely effective to reproduce and save the flaw detection results.

Effects of the Invention As described in detail above, the present invention is an array type probe equipped with a plurality of pot movers Vt* for transmitting and receiving ultra-W waves.
If wave transmission/reception JIC is multiple oscillators of this probe wlj
/i Vibrate to obtain ultrasonic information, and control the timing of excitation and reception of each vibrator to be excitedC; To deflect and focus the ultrasonic beam6;Electronic scanning l1lIlf wave flaw detection device At the same time, the flaw intensity and the focusing distance are given as 1; Find the distance and use the focal length -2 corresponding to the finger 1!6;
Find the number of oscillators required to maintain Fj 4 angles constant 1; ★ If the focusing distance is constant, specify 12 ≦ 2, so the a # 1 angle of the ultrasound beam or the focused lX intensity t'constant; The frequency of vibration for each eccentric threshold angle to warn! The deflection angle of the ultrasonic wave is 6; correspondingly, the height of the deflection angle of the ridge obtained by V is set for transmission and reception, and Rk is the same number according to the deflection + #J angle. Select the oscillators and shake these selected oscillators t'Ji1,
In order to obtain ultrasonic information, the deflection angle of the tIAf wave beam (#11 by an ultrasonic beam with a constant directivity angle or constant Tsuruhara intensity at the *** position of flrml regardless of the
Wave damage [I made g2 so that it can be done, so in the case of JII4 east wall constant, 12 is specified (2 is a constant focusing strength or a constant finger angle, and if asms is constant - 2 is also specified from 62) As a result, the ultrasonic wave can be made with intensity or with a certain directivity angle, so that 11'jt is stable (, ^ accumulation degree #
Excellent features such as ``If you have a good time, you will have a good time.''
It is possible to provide the raw materials for making noodles.

[Brief explanation of the drawing]

Figures 1 and 8 are diagrams for explaining the structure of the line scarring method of the present invention, and Figure 3 is a 1 m example of the present invention. F1-? A with Y). 1-4'tia441't4f-m, J-fiifm4
(116pF. 1”°・4 44&Kagamidenhiro, 4 @-Masukami 4-11・
...Mu/D Shuren d41. #-...Ryushu-Tenjin, l°
°・computer, 1...l loincloth meal, ri・-4
6th place 44, W... - Image display - 0 Yama - Yashiro Adult Masuzenshi #1 Ebu - No. 111 1111gm

Claims (1)

[Claims] (11) An arrayed tactile element in which a plurality of oscillators for transmitting and receiving ultraf-waves are arranged in parallel. Same as excitation and supersonic waves Nt'4 ≦
2. The oscillators to be damaged are each driven by an electronically scanning wave-wave device (12) to deflect and focus the i11-wave beam by controlling the excitation and reception (1). Focusing 1i* r-1vt4,;C]f''-IV
Source 5: Specified directivity angle or concentration angle of the ultrasonic beam [keep constant] Calculate the Qin I11 for each polarization angle required, and correspond to 11 for each polarization angle at the transmitting end. (3) A plurality of transducers for transmitting and receiving ultrasonic waves. One of the tentacles of the array we have set up is to transmit and receive ultrasonic waves.
'4 and C2 This excited transducer is controlled so that the excitation and reception timings are controlled to deflect and focus the ultrasonic beam. Then, the data on the data [obtained, this - one-ta [originally L-scissors-pay wound #!ne ward;], the focal distance for each polarization of the ultra-1 wave C-m [obtained, and this focal length ( Two correspondingly specified focused intensity or directivity angle of the ultrasound beam t' − g (:
Keep 6; Obtain the required oscillator imitation and 6; Deflection angle of 1 wave of transmission C: Accordingly, the number of #1-waves determined by Soki for transmitting and receiving C:
An electronic scanning noodle making sonic-scarring device with outstanding features.