JPS5742179A - Semiconductor device with recognition pattern - Google Patents
Semiconductor device with recognition patternInfo
- Publication number
- JPS5742179A JPS5742179A JP11798080A JP11798080A JPS5742179A JP S5742179 A JPS5742179 A JP S5742179A JP 11798080 A JP11798080 A JP 11798080A JP 11798080 A JP11798080 A JP 11798080A JP S5742179 A JPS5742179 A JP S5742179A
- Authority
- JP
- Japan
- Prior art keywords
- points
- center
- recognition pattern
- detecting
- compound semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 5
- 150000001875 compounds Chemical class 0.000 abstract 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 abstract 2
- 238000005530 etching Methods 0.000 abstract 1
- 239000007791 liquid phase Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/025—Physical imperfections, e.g. particular concentration or distribution of impurities
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Led Devices (AREA)
Abstract
PURPOSE:To make compound semiconductor elements suitable for automatic assembly by employing a rough surface and a mirror finished surface provided on the crystalline plane as recognition pattern for detecting the position of the compound semiconductor element. CONSTITUTION:An n type GaP expitaxial layer 5 and a p type one 4 are laid in layers on an n type GaP substrate 6 and epitaxially grown in liquid phase while N2 is doped in an active region to create a diode wafer emitting green light. Then, the surface of the layer 4 is mirror finished almost completely and an AuZn film provided at the center of the surface and at four points 1 surrounding it. Thereafter, the wafer is boiled by hydrochloric acid to roughen the finished surface exposed excluding the center and points 1 and the AuZn film left disused is removed by etching. In this manner, the points 1 are used for a recognition pattern for detecting the position, while at the center thereof, a bonding pad 2 is provided to make a diode. This arrangement is useful for other types of semiconductors, not necessarily confined to the compound semiconductors.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11798080A JPS5742179A (en) | 1980-08-27 | 1980-08-27 | Semiconductor device with recognition pattern |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11798080A JPS5742179A (en) | 1980-08-27 | 1980-08-27 | Semiconductor device with recognition pattern |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5742179A true JPS5742179A (en) | 1982-03-09 |
Family
ID=14725028
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11798080A Pending JPS5742179A (en) | 1980-08-27 | 1980-08-27 | Semiconductor device with recognition pattern |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5742179A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012527116A (en) * | 2009-05-11 | 2012-11-01 | クリー インコーポレイテッド | Semiconductor light-emitting diode having a reflective structure and manufacturing method thereof |
US8741715B2 (en) | 2009-04-29 | 2014-06-03 | Cree, Inc. | Gate electrodes for millimeter-wave operation and methods of fabrication |
JP2014203874A (en) * | 2013-04-02 | 2014-10-27 | スタンレー電気株式会社 | Flip-chip semiconductor light-emitting element, semiconductor device and manufacturing method of the same |
US8878245B2 (en) | 2006-11-30 | 2014-11-04 | Cree, Inc. | Transistors and method for making ohmic contact to transistors |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4911578A (en) * | 1972-06-02 | 1974-02-01 | ||
JPS5474678A (en) * | 1977-11-28 | 1979-06-14 | Hitachi Ltd | Detection method of chip location on semiconductor wafer |
-
1980
- 1980-08-27 JP JP11798080A patent/JPS5742179A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4911578A (en) * | 1972-06-02 | 1974-02-01 | ||
JPS5474678A (en) * | 1977-11-28 | 1979-06-14 | Hitachi Ltd | Detection method of chip location on semiconductor wafer |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8878245B2 (en) | 2006-11-30 | 2014-11-04 | Cree, Inc. | Transistors and method for making ohmic contact to transistors |
US8643039B2 (en) | 2007-11-14 | 2014-02-04 | Cree, Inc. | Lateral semiconductor Light Emitting Diodes having large area contacts |
US8741715B2 (en) | 2009-04-29 | 2014-06-03 | Cree, Inc. | Gate electrodes for millimeter-wave operation and methods of fabrication |
JP2012527116A (en) * | 2009-05-11 | 2012-11-01 | クリー インコーポレイテッド | Semiconductor light-emitting diode having a reflective structure and manufacturing method thereof |
JP2014203874A (en) * | 2013-04-02 | 2014-10-27 | スタンレー電気株式会社 | Flip-chip semiconductor light-emitting element, semiconductor device and manufacturing method of the same |
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