JPS5714815A - Optical microscopic device - Google Patents
Optical microscopic deviceInfo
- Publication number
- JPS5714815A JPS5714815A JP8855580A JP8855580A JPS5714815A JP S5714815 A JPS5714815 A JP S5714815A JP 8855580 A JP8855580 A JP 8855580A JP 8855580 A JP8855580 A JP 8855580A JP S5714815 A JPS5714815 A JP S5714815A
- Authority
- JP
- Japan
- Prior art keywords
- prism
- image
- moving
- plane
- pechen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Optical Scanning Systems (AREA)
Abstract
PURPOSE:To prevent the degradation in the accuracy of microscopic measurement by relatively moving one or two of an objective lens, Pechen's prism and an image receiver thereby moving the image of an object to be inspected. CONSTITUTION:A transparent object 1 to be inspected is lighted with a light source 2 by way of a condenser lens 3, and a Pechen's prism 5 which is an assembling type prism installed behind an objective lens 4 and permitting accurate fine adjusting movement to the plane XY perpendicular to the optical axis is provided, whereby the imaging plane 6' of an image receiver 6 is obtained. At the time of moving the prism 5 with respect to the optical axis, an image 7'' is formed on the plane 6' of the device 6 by the performance of the prism 5 in the other examining section 1'' of the object 2, thus the formed image is moved with respect to the imaging plane without moving the object 1.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8855580A JPS5714815A (en) | 1980-07-01 | 1980-07-01 | Optical microscopic device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8855580A JPS5714815A (en) | 1980-07-01 | 1980-07-01 | Optical microscopic device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5714815A true JPS5714815A (en) | 1982-01-26 |
Family
ID=13946107
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8855580A Pending JPS5714815A (en) | 1980-07-01 | 1980-07-01 | Optical microscopic device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5714815A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6135722A (en) * | 1984-07-30 | 1986-02-20 | 有限会社 コンペツクス | Artificial culture log and mushroom culture method |
EP0188234A2 (en) * | 1985-01-14 | 1986-07-23 | Edward H. Phillips | Improved step-and-repeat alignment and exposure system |
WO2023072880A1 (en) * | 2021-10-29 | 2023-05-04 | Asml Netherlands B.V. | Inspection apparatus, polarization-maintaining rotatable beam displacer, and method |
-
1980
- 1980-07-01 JP JP8855580A patent/JPS5714815A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6135722A (en) * | 1984-07-30 | 1986-02-20 | 有限会社 コンペツクス | Artificial culture log and mushroom culture method |
JPH0253004B2 (en) * | 1984-07-30 | 1990-11-15 | Konpetsukusu Jugen | |
EP0188234A2 (en) * | 1985-01-14 | 1986-07-23 | Edward H. Phillips | Improved step-and-repeat alignment and exposure system |
WO2023072880A1 (en) * | 2021-10-29 | 2023-05-04 | Asml Netherlands B.V. | Inspection apparatus, polarization-maintaining rotatable beam displacer, and method |
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