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JPS571201A - Thin film forming device - Google Patents

Thin film forming device

Info

Publication number
JPS571201A
JPS571201A JP7592880A JP7592880A JPS571201A JP S571201 A JPS571201 A JP S571201A JP 7592880 A JP7592880 A JP 7592880A JP 7592880 A JP7592880 A JP 7592880A JP S571201 A JPS571201 A JP S571201A
Authority
JP
Japan
Prior art keywords
thin film
film forming
forming device
thin
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7592880A
Other languages
Japanese (ja)
Inventor
Yasuo Shiyouji
Takashi Matsuzaki
Tsuneo Yanase
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP7592880A priority Critical patent/JPS571201A/en
Publication of JPS571201A publication Critical patent/JPS571201A/en
Pending legal-status Critical Current

Links

Landscapes

  • Apparatuses And Processes For Manufacturing Resistors (AREA)
JP7592880A 1980-06-04 1980-06-04 Thin film forming device Pending JPS571201A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7592880A JPS571201A (en) 1980-06-04 1980-06-04 Thin film forming device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7592880A JPS571201A (en) 1980-06-04 1980-06-04 Thin film forming device

Publications (1)

Publication Number Publication Date
JPS571201A true JPS571201A (en) 1982-01-06

Family

ID=13590422

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7592880A Pending JPS571201A (en) 1980-06-04 1980-06-04 Thin film forming device

Country Status (1)

Country Link
JP (1) JPS571201A (en)

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