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JPS5650408A - Fluid microquantifying and supplying method - Google Patents

Fluid microquantifying and supplying method

Info

Publication number
JPS5650408A
JPS5650408A JP12694979A JP12694979A JPS5650408A JP S5650408 A JPS5650408 A JP S5650408A JP 12694979 A JP12694979 A JP 12694979A JP 12694979 A JP12694979 A JP 12694979A JP S5650408 A JPS5650408 A JP S5650408A
Authority
JP
Japan
Prior art keywords
time
valve
fluid
period
microquantifying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12694979A
Other languages
Japanese (ja)
Inventor
Osamu Yamamoto
Yasutoshi Kotani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aichi Electric Co Ltd
Iwatani Corp
Original Assignee
Aichi Electric Co Ltd
Iwatani Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aichi Electric Co Ltd, Iwatani Corp filed Critical Aichi Electric Co Ltd
Priority to JP12694979A priority Critical patent/JPS5650408A/en
Publication of JPS5650408A publication Critical patent/JPS5650408A/en
Pending legal-status Critical Current

Links

Landscapes

  • Magnetically Actuated Valves (AREA)
  • Flow Control (AREA)

Abstract

PURPOSE: To make it possible to microquantify and supply a fluid with a very little error, by repeating high-precision pulse shot supply using an electromagnetic valve at a short-time period, in the method where the fluid is supplied in a low speed.
CONSTITUTION: During set time T0 after issuance of the start command dependent upon the start switch operation, electromagnetic valves V1 and V2 are not operated but only the accelerating unit is operated to heat and humidify the processing room. After time T0, the pulse signal for valve is issued only to valve V1 during period t1. After settlement time T1, the valve opening pulse signal of a fixed period is issued only to valve V2. In this case, the valve opening time is controlled by the timer, and the gas quantity per a unit time is set to approximately 1...1.5cc/min by the flow rate regulating valve, and the microquantity of gas is quantified and supplied during set time T2. As a result, microquantifying and supplying with a very little error is possible by repeating high-precision pulse shot supply using electromagnetic valves at a short-time period.
COPYRIGHT: (C)1981,JPO&Japio
JP12694979A 1979-10-01 1979-10-01 Fluid microquantifying and supplying method Pending JPS5650408A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12694979A JPS5650408A (en) 1979-10-01 1979-10-01 Fluid microquantifying and supplying method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12694979A JPS5650408A (en) 1979-10-01 1979-10-01 Fluid microquantifying and supplying method

Publications (1)

Publication Number Publication Date
JPS5650408A true JPS5650408A (en) 1981-05-07

Family

ID=14947874

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12694979A Pending JPS5650408A (en) 1979-10-01 1979-10-01 Fluid microquantifying and supplying method

Country Status (1)

Country Link
JP (1) JPS5650408A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0686398A (en) * 1991-12-23 1994-03-25 American Teleph & Telegr Co <Att> Transducer device
US6806593B2 (en) 1996-04-18 2004-10-19 California Institute Of Technology Thin film electret microphone

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0686398A (en) * 1991-12-23 1994-03-25 American Teleph & Telegr Co <Att> Transducer device
US6806593B2 (en) 1996-04-18 2004-10-19 California Institute Of Technology Thin film electret microphone

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