JPS5646463A - Sample observing method - Google Patents
Sample observing methodInfo
- Publication number
- JPS5646463A JPS5646463A JP12335579A JP12335579A JPS5646463A JP S5646463 A JPS5646463 A JP S5646463A JP 12335579 A JP12335579 A JP 12335579A JP 12335579 A JP12335579 A JP 12335579A JP S5646463 A JPS5646463 A JP S5646463A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- electron beam
- irradiated
- light
- scanning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating Or Analysing Biological Materials (AREA)
- Microscoopes, Condenser (AREA)
Abstract
PURPOSE: To secure a simutaneous acquisition of both the optical microscope image and the image based on the electron beam scanning for the same sample, by putting the sample on the transparent glass plate having a transparent conducting film and then irradiating the light or the electron beam to the sample.
CONSTITUTION: The piece sample 3 of the cell or the like is put on the slide glass 1 with a transparent conducting film made of the oxide of the indium or tin formed on the surface. And then the electron beam is irradiated on the sample 3 while being stopped down through the electronic lens 5. At the same time, the light generated from the light source 6 is irradiated simultaneously or alternately with the electron beam via the lens 7 and the mirror 8 provided at the path of the electron beam. The electron beam irradiated on the sample 3 receives a 2-dimensional scanning on the sample 3 and by the deflecting coil 10. Through this scanning of the electron beam, the information generated from the sample is detected by the detector 11 and then sent to the display unit 13. And the light irradiated on the sample 3 tansmits through the glass 1 to enter the object lens 15 of the optical microscope 14.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12335579A JPS5646463A (en) | 1979-09-26 | 1979-09-26 | Sample observing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12335579A JPS5646463A (en) | 1979-09-26 | 1979-09-26 | Sample observing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5646463A true JPS5646463A (en) | 1981-04-27 |
| JPH0210381B2 JPH0210381B2 (en) | 1990-03-07 |
Family
ID=14858518
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12335579A Granted JPS5646463A (en) | 1979-09-26 | 1979-09-26 | Sample observing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5646463A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62209365A (en) * | 1986-03-11 | 1987-09-14 | Tamotsu Inoue | Observation box |
| JP2008300354A (en) * | 2007-05-31 | 2008-12-11 | Fei Co | Sample carrier for use in charged particle device, method of using sample carrier, and device equipped to use above sample carrier |
-
1979
- 1979-09-26 JP JP12335579A patent/JPS5646463A/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62209365A (en) * | 1986-03-11 | 1987-09-14 | Tamotsu Inoue | Observation box |
| JP2008300354A (en) * | 2007-05-31 | 2008-12-11 | Fei Co | Sample carrier for use in charged particle device, method of using sample carrier, and device equipped to use above sample carrier |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0210381B2 (en) | 1990-03-07 |
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