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JPS5639191A - Laser processing method - Google Patents

Laser processing method

Info

Publication number
JPS5639191A
JPS5639191A JP11526579A JP11526579A JPS5639191A JP S5639191 A JPS5639191 A JP S5639191A JP 11526579 A JP11526579 A JP 11526579A JP 11526579 A JP11526579 A JP 11526579A JP S5639191 A JPS5639191 A JP S5639191A
Authority
JP
Japan
Prior art keywords
laser light
evaporated material
treated
chamber
laser processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11526579A
Other languages
Japanese (ja)
Inventor
Ryutaro Jinbo
Shigeru Takahashi
Tomohiko Shida
Masao Yano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11526579A priority Critical patent/JPS5639191A/en
Publication of JPS5639191A publication Critical patent/JPS5639191A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/127Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an enclosure

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Abstract

PURPOSE:To enable laser processing under clean atmosphere, by providing the collective unit suctioning the evaporating material from object to be treated, in the laser processing in the chamber filled by inactive gas. CONSTITUTION:The evaporated material from object to be treated is suctioned and collected in the direction apart form the path of laser light. The collector 8 consists of the suction 12 located above the radiation part of laser light 1, flow branching plate 11 warping the gas flow including the evaporated material suctioned from the path of laser light, and discharge outlet 9. The laser light 1 is touched on the object 3 to be treated and the inactive gas atmosphere 6 is fed from the supply inlet 10 in the chamber 5. The most parts of evaporated material 4 from the object 3 is adhered to the inner wall of the unit 8 and the flow branching plate 11, and the exhaust gas 9 including comparatively less evaporated material 4 is reused outside the chamber. Further, by filling the filter material such as glass fiber to the space in the unit 8, the efficiency of colllection of evaporated material can be increased.
JP11526579A 1979-09-10 1979-09-10 Laser processing method Pending JPS5639191A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11526579A JPS5639191A (en) 1979-09-10 1979-09-10 Laser processing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11526579A JPS5639191A (en) 1979-09-10 1979-09-10 Laser processing method

Publications (1)

Publication Number Publication Date
JPS5639191A true JPS5639191A (en) 1981-04-14

Family

ID=14658382

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11526579A Pending JPS5639191A (en) 1979-09-10 1979-09-10 Laser processing method

Country Status (1)

Country Link
JP (1) JPS5639191A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59156596A (en) * 1982-09-01 1984-09-05 ウエスチングハウス エレクトリツク コ−ポレ−シヨン Welder
JPH01218792A (en) * 1988-02-29 1989-08-31 Mitsubishi Electric Corp Laser beam machine
WO1997031747A1 (en) * 1996-02-29 1997-09-04 Merck & Co., Inc. Laser drilling process for producing a plurality of holes in chemical dosage forms using acousto-optic deflector

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59156596A (en) * 1982-09-01 1984-09-05 ウエスチングハウス エレクトリツク コ−ポレ−シヨン Welder
JPH029556B2 (en) * 1982-09-01 1990-03-02 Westinghouse Electric Corp
JPH01218792A (en) * 1988-02-29 1989-08-31 Mitsubishi Electric Corp Laser beam machine
WO1997031747A1 (en) * 1996-02-29 1997-09-04 Merck & Co., Inc. Laser drilling process for producing a plurality of holes in chemical dosage forms using acousto-optic deflector

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