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JPS5639407A - Detector for register mark - Google Patents

Detector for register mark

Info

Publication number
JPS5639407A
JPS5639407A JP11416279A JP11416279A JPS5639407A JP S5639407 A JPS5639407 A JP S5639407A JP 11416279 A JP11416279 A JP 11416279A JP 11416279 A JP11416279 A JP 11416279A JP S5639407 A JPS5639407 A JP S5639407A
Authority
JP
Japan
Prior art keywords
image
photographing
right angle
primary
marks
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11416279A
Other languages
Japanese (ja)
Other versions
JPS594642B2 (en
Inventor
Mitsuyoshi Koizumi
Nobuyuki Akiyama
Yoshimasa Oshima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11416279A priority Critical patent/JPS594642B2/en
Publication of JPS5639407A publication Critical patent/JPS5639407A/en
Publication of JPS594642B2 publication Critical patent/JPS594642B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Liquid Crystal (AREA)
  • Control Of Position Or Direction (AREA)

Abstract

PURPOSE: To make the mark detection extremly stable by photographing an image of the vertical and horizontal lines of the mark with different TV cameras and making the horizontal direction of each picture match with a direction to be detected.
CONSTITUTION: The primary photographing means, TV 6A, 6C, which photograph from each other's right angle marks P1, P2 and P3, P4 for register formed o flat plates 1, 2 and TV 6B, 6D, the secondary image-photographing means, are provided. Image-photographing signals obtained by the primary and secondary image- photographing means at a right angle with each other, are independently taken out. Then the image-photographing signals are integrated in such manner that the image-photographing signals at a right angle with each other may be projected in a uniaxial direction. After this process, the positions of marks P1, P2 and P3, P4 are detected based on each integrated signal obtained.
COPYRIGHT: (C)1981,JPO&Japio
JP11416279A 1979-09-07 1979-09-07 Alignment mark detection method Expired JPS594642B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11416279A JPS594642B2 (en) 1979-09-07 1979-09-07 Alignment mark detection method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11416279A JPS594642B2 (en) 1979-09-07 1979-09-07 Alignment mark detection method

Publications (2)

Publication Number Publication Date
JPS5639407A true JPS5639407A (en) 1981-04-15
JPS594642B2 JPS594642B2 (en) 1984-01-31

Family

ID=14630707

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11416279A Expired JPS594642B2 (en) 1979-09-07 1979-09-07 Alignment mark detection method

Country Status (1)

Country Link
JP (1) JPS594642B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5863916A (en) * 1981-10-13 1983-04-16 Citizen Watch Co Ltd Correcting method for glass position in assembly of liquid crystal cell glass
JPS60163110A (en) * 1984-02-06 1985-08-26 Canon Inc Positioning device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5863916A (en) * 1981-10-13 1983-04-16 Citizen Watch Co Ltd Correcting method for glass position in assembly of liquid crystal cell glass
JPH0324651B2 (en) * 1981-10-13 1991-04-03 Citizen Watch Co Ltd
JPS60163110A (en) * 1984-02-06 1985-08-26 Canon Inc Positioning device

Also Published As

Publication number Publication date
JPS594642B2 (en) 1984-01-31

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