JPS56163265A - Vapor depositing apparatus - Google Patents
Vapor depositing apparatusInfo
- Publication number
- JPS56163265A JPS56163265A JP6612680A JP6612680A JPS56163265A JP S56163265 A JPS56163265 A JP S56163265A JP 6612680 A JP6612680 A JP 6612680A JP 6612680 A JP6612680 A JP 6612680A JP S56163265 A JPS56163265 A JP S56163265A
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- electron beams
- depositing
- vapor
- filament
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6612680A JPS5910992B2 (ja) | 1980-05-19 | 1980-05-19 | 蒸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6612680A JPS5910992B2 (ja) | 1980-05-19 | 1980-05-19 | 蒸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56163265A true JPS56163265A (en) | 1981-12-15 |
| JPS5910992B2 JPS5910992B2 (ja) | 1984-03-13 |
Family
ID=13306860
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6612680A Expired JPS5910992B2 (ja) | 1980-05-19 | 1980-05-19 | 蒸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5910992B2 (ja) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6347361A (ja) * | 1986-08-15 | 1988-02-29 | Toobi:Kk | イオンプレ−テイング蒸発装置 |
| JPS63149961U (ja) * | 1987-02-19 | 1988-10-03 | ||
| JPS6468470A (en) * | 1987-09-09 | 1989-03-14 | Ulvac Seimaku | Plasma electron beam heating source |
| WO2022058437A1 (de) * | 2020-09-17 | 2022-03-24 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. | Vorrichtung und verfahren zum abscheiden harter kohlenstoffschichten |
-
1980
- 1980-05-19 JP JP6612680A patent/JPS5910992B2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6347361A (ja) * | 1986-08-15 | 1988-02-29 | Toobi:Kk | イオンプレ−テイング蒸発装置 |
| JPS63149961U (ja) * | 1987-02-19 | 1988-10-03 | ||
| JPS6468470A (en) * | 1987-09-09 | 1989-03-14 | Ulvac Seimaku | Plasma electron beam heating source |
| WO2022058437A1 (de) * | 2020-09-17 | 2022-03-24 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. | Vorrichtung und verfahren zum abscheiden harter kohlenstoffschichten |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5910992B2 (ja) | 1984-03-13 |
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