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JPS56160743A - Ion source - Google Patents

Ion source

Info

Publication number
JPS56160743A
JPS56160743A JP6388980A JP6388980A JPS56160743A JP S56160743 A JPS56160743 A JP S56160743A JP 6388980 A JP6388980 A JP 6388980A JP 6388980 A JP6388980 A JP 6388980A JP S56160743 A JPS56160743 A JP S56160743A
Authority
JP
Japan
Prior art keywords
ion chamber
out electrode
electrodes
lead
permanent magnet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6388980A
Other languages
Japanese (ja)
Other versions
JPS6311741B2 (en
Inventor
Mitsuharu Uo
Tokuhiro Oobiki
Akihiko Sasaki
Hidetomo Nishimura
Tadashi Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6388980A priority Critical patent/JPS56160743A/en
Publication of JPS56160743A publication Critical patent/JPS56160743A/en
Publication of JPS6311741B2 publication Critical patent/JPS6311741B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Plasma Technology (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE:To produce a plasma beam having small divergence angle by locating a magnetic member on the outer wall of an ion chamber located at the nearest position to the load-out electrode in the ion chamber while reducing the leakage flux into the ion chamber. CONSTITUTION:Lead-out electrode group comprising acceleration electrodes 18, deceleration electrodes 20 and ground electrodes 22 are arranged in an ion chamber 14 formed by a square wall 12. Square frame permanent magnets 16 are arranged on the outer face of the ion chamber 12 while surrounding the circumferential face, while a magnetic members 24 are arranged at the nearest position to the acceleration electrode 18 in the ion chamber 14 in similar shape with said permanent magnet 16. Then the permanent magnet 16 and the magnetic member 24 are surrounded by a frame member 26 of high permeability material having C-shaped cross-section. Consequently the leakage flux in the proximity of the lead-out electrode group is reduced considerably to bring the flux density at this portion high, thereby the shutting effect of plasma is increased to reduce the beam.
JP6388980A 1980-05-16 1980-05-16 Ion source Granted JPS56160743A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6388980A JPS56160743A (en) 1980-05-16 1980-05-16 Ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6388980A JPS56160743A (en) 1980-05-16 1980-05-16 Ion source

Publications (2)

Publication Number Publication Date
JPS56160743A true JPS56160743A (en) 1981-12-10
JPS6311741B2 JPS6311741B2 (en) 1988-03-15

Family

ID=13242304

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6388980A Granted JPS56160743A (en) 1980-05-16 1980-05-16 Ion source

Country Status (1)

Country Link
JP (1) JPS56160743A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6166869A (en) * 1984-09-11 1986-04-05 Toshiba Corp Rf type ion engine

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS539993A (en) * 1976-07-15 1978-01-28 Toshiba Corp Ion producing device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS539993A (en) * 1976-07-15 1978-01-28 Toshiba Corp Ion producing device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6166869A (en) * 1984-09-11 1986-04-05 Toshiba Corp Rf type ion engine

Also Published As

Publication number Publication date
JPS6311741B2 (en) 1988-03-15

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