[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

JPS5616801A - Magnetic scale - Google Patents

Magnetic scale

Info

Publication number
JPS5616801A
JPS5616801A JP9236679A JP9236679A JPS5616801A JP S5616801 A JPS5616801 A JP S5616801A JP 9236679 A JP9236679 A JP 9236679A JP 9236679 A JP9236679 A JP 9236679A JP S5616801 A JPS5616801 A JP S5616801A
Authority
JP
Japan
Prior art keywords
magnetizing
generated
materials
photoetching
patterning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9236679A
Other languages
Japanese (ja)
Other versions
JPH0213244B2 (en
Inventor
Shuhei Tsuchimoto
Tetsuo Muramatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP9236679A priority Critical patent/JPS5616801A/en
Publication of JPS5616801A publication Critical patent/JPS5616801A/en
Publication of JPH0213244B2 publication Critical patent/JPH0213244B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

PURPOSE: To improve an absolute precision, by using a magnetoresistive element consisting of the ferromagnetic material this film having uniaxial anisotropy and by patterning the magnetization pattern of a magnetizing material by photoetching.
CONSTITUTION: Magnetizing material 1 and magnetoresistive element (MR element) 2 consisting of the ferromagnetic material thin film having uniaxial anisotropy are arranged oppositely to each other. Magnetizing materials 1 are provided in parallel at an equal interval on substrate 3 by patterning dependent upon photoetching. The leakage magnetic field in the (y) direction generated from magnetizing material 1 is detected by transfer of MR element 2 in the (x) direction. The magnetization direction of magnetizing material 1 is the (x) direction as shown by the arrow. Thus, fluctuation of the detection output dependent upon fluctuation of the relative speed between magnetizing materials and the head, which is generated by using the magnetic flux response type head, is not generated by using the MR element, and the absolute precision can be improved sufficiently because magnetizing materials 1 are patterned by photoecthing.
COPYRIGHT: (C)1981,JPO&Japio
JP9236679A 1979-07-19 1979-07-19 Magnetic scale Granted JPS5616801A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9236679A JPS5616801A (en) 1979-07-19 1979-07-19 Magnetic scale

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9236679A JPS5616801A (en) 1979-07-19 1979-07-19 Magnetic scale

Publications (2)

Publication Number Publication Date
JPS5616801A true JPS5616801A (en) 1981-02-18
JPH0213244B2 JPH0213244B2 (en) 1990-04-03

Family

ID=14052410

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9236679A Granted JPS5616801A (en) 1979-07-19 1979-07-19 Magnetic scale

Country Status (1)

Country Link
JP (1) JPS5616801A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3218298A1 (en) 1981-05-15 1982-12-23 Fuji Jukogyo K.K., Tokyo DEVICE FOR MEASURING A POSITION
JPS60170702A (en) * 1984-02-16 1985-09-04 S G:Kk Linear position detector and manufacture of rod part of detector
JPS61173101A (en) * 1984-12-24 1986-08-04 アルカテル　エヌ．ヴェイ． Positional sensor
JPH08152078A (en) * 1994-11-28 1996-06-11 Ckd Corp Air-operated valve
DE102007049741A1 (en) * 2007-10-16 2009-07-02 Micromotion Gmbh Magnetic measuring rod carrier, has set of magnetizable sections for alternating in measuring direction, where adjacent magnetizable sections exhibit different magnetic polarities in measuring direction

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3218298A1 (en) 1981-05-15 1982-12-23 Fuji Jukogyo K.K., Tokyo DEVICE FOR MEASURING A POSITION
JPS60170702A (en) * 1984-02-16 1985-09-04 S G:Kk Linear position detector and manufacture of rod part of detector
JPS61173101A (en) * 1984-12-24 1986-08-04 アルカテル　エヌ．ヴェイ． Positional sensor
JPH08152078A (en) * 1994-11-28 1996-06-11 Ckd Corp Air-operated valve
DE102007049741A1 (en) * 2007-10-16 2009-07-02 Micromotion Gmbh Magnetic measuring rod carrier, has set of magnetizable sections for alternating in measuring direction, where adjacent magnetizable sections exhibit different magnetic polarities in measuring direction
DE102007049741B4 (en) * 2007-10-16 2011-07-28 Micromotion GmbH, 55124 Magnetic scale carrier

Also Published As

Publication number Publication date
JPH0213244B2 (en) 1990-04-03

Similar Documents

Publication Publication Date Title
GB1495320A (en) Magnetic field sensing apparatus
JPS5687862A (en) Magnetic head of revolution detector
JPS5531929A (en) Displacement oscillation sensor
JPS5616801A (en) Magnetic scale
JPS5743483A (en) Magnetoelectric transducer
JPS56142409A (en) Angle detector
JPS52101065A (en) Magnetic scale
JPS51129258A (en) Displacement detector
JPS56141514A (en) Length measuring device
ES467766A1 (en) Device for reading information magnetically coded on a carrier
JPS54158960A (en) Position detector
JPS5323608A (en) Magnet ic recording medium
JPS57141014A (en) Thin film magnetic sensor
JPS5637507A (en) Revolution sensor
EP0381541A3 (en) Superconductive magnetoresistive device
JPS5525145A (en) Magnetic card reader
JPS5651681A (en) Measuring instrument for magnetic characteristic
JPS51148407A (en) Magnetic recording medium
JPS52113216A (en) Magnetic head
JPS5783074A (en) Magneto-resistive effect type thin film magnetic sensor
JPS57154014A (en) Magnetic rotary encoder
JPS53138380A (en) Magnetic field detecting element
JPS5339110A (en) Magnetoresistance effect head
JPS53101411A (en) Mr type magnetic head
JPS5634132A (en) Element for detecting magnetic field