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JPS56115885A - Evacuating apparatus - Google Patents

Evacuating apparatus

Info

Publication number
JPS56115885A
JPS56115885A JP1850480A JP1850480A JPS56115885A JP S56115885 A JPS56115885 A JP S56115885A JP 1850480 A JP1850480 A JP 1850480A JP 1850480 A JP1850480 A JP 1850480A JP S56115885 A JPS56115885 A JP S56115885A
Authority
JP
Japan
Prior art keywords
gas
ion pump
sputter ion
specimen chamber
electrically conductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1850480A
Other languages
Japanese (ja)
Other versions
JPS5761904B2 (en
Inventor
Toru Tojo
Shintaro Yoshii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP1850480A priority Critical patent/JPS56115885A/en
Publication of JPS56115885A publication Critical patent/JPS56115885A/en
Publication of JPS5761904B2 publication Critical patent/JPS5761904B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE: To prevent the accumulation of electric charge, by interposing a gas-permeable, electrically conductive member between a sputter ion pump and a container to be evacuated.
CONSTITUTION: Between a sputter ion pump 2 and a specimen chamber 9 of a container to be evacuated, there is provided an electrically conductive member 8 having such a gas permeability as not to deteriorate the effective gas evacuating speed at the outlet of the specimen chamber 9 (not shown). Here, if the pressure in the specimen chamber 9 is about the level of 10-4 torr or higher than that when the sputter ion pump 2 is connected to the power source after evacuating the chamber 9 roughly by the pump 1, a large amount of ionized gas is produced in the sputter ion pump 2. However, the gas-permeable, electrically conductive member 8 serves to prevent infiltration of the ionized gas into the specimen chamber 9 causing the accumulation of electric charge in the same 9.
COPYRIGHT: (C)1981,JPO&Japio
JP1850480A 1980-02-19 1980-02-19 Evacuating apparatus Granted JPS56115885A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1850480A JPS56115885A (en) 1980-02-19 1980-02-19 Evacuating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1850480A JPS56115885A (en) 1980-02-19 1980-02-19 Evacuating apparatus

Publications (2)

Publication Number Publication Date
JPS56115885A true JPS56115885A (en) 1981-09-11
JPS5761904B2 JPS5761904B2 (en) 1982-12-27

Family

ID=11973445

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1850480A Granted JPS56115885A (en) 1980-02-19 1980-02-19 Evacuating apparatus

Country Status (1)

Country Link
JP (1) JPS56115885A (en)

Also Published As

Publication number Publication date
JPS5761904B2 (en) 1982-12-27

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