JPS56107166A - Surfacial electrometer - Google Patents
Surfacial electrometerInfo
- Publication number
- JPS56107166A JPS56107166A JP802081A JP802081A JPS56107166A JP S56107166 A JPS56107166 A JP S56107166A JP 802081 A JP802081 A JP 802081A JP 802081 A JP802081 A JP 802081A JP S56107166 A JPS56107166 A JP S56107166A
- Authority
- JP
- Japan
- Prior art keywords
- charged object
- detection electrode
- oscillation
- surfacial
- oscillators
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
- G01R15/14—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
- G01R15/16—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using capacitive devices
- G01R15/165—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using capacitive devices measuring electrostatic potential, e.g. with electrostatic voltmeters or electrometers, when the design of the sensor is essential
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Control Or Security For Electrophotography (AREA)
Abstract
PURPOSE:To simplify a constitution by fixing a detection electrode and vibrating an oscillator provided nearby. CONSTITUTION:Oscillators 4a, 4b are arranged opposed to each other as if to hold a detection electrode 2 facing a charged object 1 at the both sides between the oscillators. In a part near the charged object 1 of the width T of each oscillation piece, the oscillation pieces 4a, 4b are set directly opposed to each other and a detection electrode 2 is so arranged as to provide its side only to a part remote from the charged object 1. Then the oscillation pieces 4a, 4b are vibrated as if they were caused to approach or become distant from the oscillation pieces 4a, 4b. In this manner, the surfacial potential of the charged object 1 is measured.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP802081A JPS56107166A (en) | 1981-01-23 | 1981-01-23 | Surfacial electrometer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP802081A JPS56107166A (en) | 1981-01-23 | 1981-01-23 | Surfacial electrometer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56107166A true JPS56107166A (en) | 1981-08-25 |
JPS6353513B2 JPS6353513B2 (en) | 1988-10-24 |
Family
ID=11681647
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP802081A Granted JPS56107166A (en) | 1981-01-23 | 1981-01-23 | Surfacial electrometer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56107166A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58213258A (en) * | 1982-06-04 | 1983-12-12 | Murata Mfg Co Ltd | Detecting apparatus of surface electric potential |
JP2007194126A (en) * | 2006-01-20 | 2007-08-02 | Hitachi High-Technologies Corp | Scanning electron microscope |
-
1981
- 1981-01-23 JP JP802081A patent/JPS56107166A/en active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58213258A (en) * | 1982-06-04 | 1983-12-12 | Murata Mfg Co Ltd | Detecting apparatus of surface electric potential |
JPH0145873B2 (en) * | 1982-06-04 | 1989-10-05 | Murata Manufacturing Co | |
JP2007194126A (en) * | 2006-01-20 | 2007-08-02 | Hitachi High-Technologies Corp | Scanning electron microscope |
JP4616180B2 (en) * | 2006-01-20 | 2011-01-19 | 株式会社日立ハイテクノロジーズ | Scanning electron microscope |
Also Published As
Publication number | Publication date |
---|---|
JPS6353513B2 (en) | 1988-10-24 |
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