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JPS5564884A - Washing method - Google Patents

Washing method

Info

Publication number
JPS5564884A
JPS5564884A JP13748378A JP13748378A JPS5564884A JP S5564884 A JPS5564884 A JP S5564884A JP 13748378 A JP13748378 A JP 13748378A JP 13748378 A JP13748378 A JP 13748378A JP S5564884 A JPS5564884 A JP S5564884A
Authority
JP
Japan
Prior art keywords
washing method
washing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13748378A
Other languages
Japanese (ja)
Inventor
Kenzou Yamazaki
Hidemi Amai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP13748378A priority Critical patent/JPS5564884A/en
Publication of JPS5564884A publication Critical patent/JPS5564884A/en
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP13748378A 1978-11-08 1978-11-08 Washing method Pending JPS5564884A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13748378A JPS5564884A (en) 1978-11-08 1978-11-08 Washing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13748378A JPS5564884A (en) 1978-11-08 1978-11-08 Washing method

Publications (1)

Publication Number Publication Date
JPS5564884A true JPS5564884A (en) 1980-05-15

Family

ID=15199680

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13748378A Pending JPS5564884A (en) 1978-11-08 1978-11-08 Washing method

Country Status (1)

Country Link
JP (1) JPS5564884A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6232533U (en) * 1985-08-12 1987-02-26

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6232533U (en) * 1985-08-12 1987-02-26

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