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JPS5556065A - Heating ceramic electrode and its manufacture - Google Patents

Heating ceramic electrode and its manufacture

Info

Publication number
JPS5556065A
JPS5556065A JP12697878A JP12697878A JPS5556065A JP S5556065 A JPS5556065 A JP S5556065A JP 12697878 A JP12697878 A JP 12697878A JP 12697878 A JP12697878 A JP 12697878A JP S5556065 A JPS5556065 A JP S5556065A
Authority
JP
Japan
Prior art keywords
manufacture
ceramic electrode
heating ceramic
electrode
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12697878A
Other languages
Japanese (ja)
Inventor
Akio Hara
Yuujirou Kodama
Tadashi Igarashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP12697878A priority Critical patent/JPS5556065A/en
Publication of JPS5556065A publication Critical patent/JPS5556065A/en
Pending legal-status Critical Current

Links

Landscapes

  • Compositions Of Oxide Ceramics (AREA)
  • Resistance Heating (AREA)
JP12697878A 1978-10-16 1978-10-16 Heating ceramic electrode and its manufacture Pending JPS5556065A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12697878A JPS5556065A (en) 1978-10-16 1978-10-16 Heating ceramic electrode and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12697878A JPS5556065A (en) 1978-10-16 1978-10-16 Heating ceramic electrode and its manufacture

Publications (1)

Publication Number Publication Date
JPS5556065A true JPS5556065A (en) 1980-04-24

Family

ID=14948601

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12697878A Pending JPS5556065A (en) 1978-10-16 1978-10-16 Heating ceramic electrode and its manufacture

Country Status (1)

Country Link
JP (1) JPS5556065A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008057045A (en) * 2007-10-09 2008-03-13 Agc Ceramics Co Ltd Oxide sintered compact sputtering target
JP2009227513A (en) * 2008-03-24 2009-10-08 Mitsubishi Materials Corp Method for manufacturing titanium oxide target having high density and low specific resistance

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008057045A (en) * 2007-10-09 2008-03-13 Agc Ceramics Co Ltd Oxide sintered compact sputtering target
JP2009227513A (en) * 2008-03-24 2009-10-08 Mitsubishi Materials Corp Method for manufacturing titanium oxide target having high density and low specific resistance

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