JPS5542375A - Manufacture of magnetic head - Google Patents
Manufacture of magnetic headInfo
- Publication number
- JPS5542375A JPS5542375A JP11620978A JP11620978A JPS5542375A JP S5542375 A JPS5542375 A JP S5542375A JP 11620978 A JP11620978 A JP 11620978A JP 11620978 A JP11620978 A JP 11620978A JP S5542375 A JPS5542375 A JP S5542375A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- vapor
- under vacuum
- deposited under
- insulation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
Landscapes
- Magnetic Heads (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
Abstract
PURPOSE:To make it possible to constitute a conductive layer and insulation layer in planar structure by applying a liftoff method by positively making use of an under-cut phenomenon for the manufacture of a multi-turn type thin film magnetic head. CONSTITUTION:On the main surface of a glass substrate, Cu is vapor-deposited under vacuum and a permalloy thin film and insulation film are formed. In this way, Cu is vapor-deposited under vacuum on the insulation film of substrate 1 with arranged magnetic bodies, and on its base layer, Cu is electrodeposited by plating to form conductive layer 2 of approximately 2-3mum. Next, resist 3 is applied to a thickness of approximately 1mum, which is used as a mask to etch layer 2, thereby making under-cut part 4. Next, SiO2 is vapor-deposited under vacuum to stack discontinuous insulation layer 5 of 2-4mum in thickness and layer 3 on layer 2 is removed together with layer 5 on it.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11620978A JPS5542375A (en) | 1978-09-20 | 1978-09-20 | Manufacture of magnetic head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11620978A JPS5542375A (en) | 1978-09-20 | 1978-09-20 | Manufacture of magnetic head |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5542375A true JPS5542375A (en) | 1980-03-25 |
Family
ID=14681532
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11620978A Pending JPS5542375A (en) | 1978-09-20 | 1978-09-20 | Manufacture of magnetic head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5542375A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5996520A (en) * | 1982-11-24 | 1984-06-04 | Matsushita Electric Ind Co Ltd | Production of thin film magnetic head |
JPS6045921A (en) * | 1983-08-23 | 1985-03-12 | Nec Kansai Ltd | Production of thin film magnetic head |
US5258282A (en) * | 1990-11-19 | 1993-11-02 | Canon Kabushiki Kaisha | Dry process, silver salt photosensitive member and method for forming image with the dry process, silver salt photosensitive member |
US5482814A (en) * | 1993-07-15 | 1996-01-09 | Canon Kabushiki Kaisha | Thermal developing photosensitive member and image forming method using the thermal developing photosensitive member |
US5529889A (en) * | 1992-03-02 | 1996-06-25 | Canon Kabushiki Kaisha | Heat developable photosensitive material and image forming method which uses the same |
US5541055A (en) * | 1993-09-28 | 1996-07-30 | Canon Kabushiki Kaisha | Heat developing photosensitive material and image formed by using the same |
US5547831A (en) * | 1992-11-18 | 1996-08-20 | Canon Kabushiki Kaisha | Dry process silver salt photosensitive material and image forming method making use of this dry process silver salt photosensitive material |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5481817A (en) * | 1977-12-13 | 1979-06-29 | Fujitsu Ltd | Thin-film magnetic head |
JPS54104812A (en) * | 1978-02-03 | 1979-08-17 | Matsushita Electric Ind Co Ltd | Thin film magnetic head and production of the same |
-
1978
- 1978-09-20 JP JP11620978A patent/JPS5542375A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5481817A (en) * | 1977-12-13 | 1979-06-29 | Fujitsu Ltd | Thin-film magnetic head |
JPS54104812A (en) * | 1978-02-03 | 1979-08-17 | Matsushita Electric Ind Co Ltd | Thin film magnetic head and production of the same |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5996520A (en) * | 1982-11-24 | 1984-06-04 | Matsushita Electric Ind Co Ltd | Production of thin film magnetic head |
JPH0481243B2 (en) * | 1982-11-24 | 1992-12-22 | Matsushita Electric Ind Co Ltd | |
JPS6045921A (en) * | 1983-08-23 | 1985-03-12 | Nec Kansai Ltd | Production of thin film magnetic head |
US5258282A (en) * | 1990-11-19 | 1993-11-02 | Canon Kabushiki Kaisha | Dry process, silver salt photosensitive member and method for forming image with the dry process, silver salt photosensitive member |
US5529889A (en) * | 1992-03-02 | 1996-06-25 | Canon Kabushiki Kaisha | Heat developable photosensitive material and image forming method which uses the same |
US5547831A (en) * | 1992-11-18 | 1996-08-20 | Canon Kabushiki Kaisha | Dry process silver salt photosensitive material and image forming method making use of this dry process silver salt photosensitive material |
US5482814A (en) * | 1993-07-15 | 1996-01-09 | Canon Kabushiki Kaisha | Thermal developing photosensitive member and image forming method using the thermal developing photosensitive member |
US5541055A (en) * | 1993-09-28 | 1996-07-30 | Canon Kabushiki Kaisha | Heat developing photosensitive material and image formed by using the same |
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