JPS5528415B2 - - Google Patents
Info
- Publication number
- JPS5528415B2 JPS5528415B2 JP6306472A JP6306472A JPS5528415B2 JP S5528415 B2 JPS5528415 B2 JP S5528415B2 JP 6306472 A JP6306472 A JP 6306472A JP 6306472 A JP6306472 A JP 6306472A JP S5528415 B2 JPS5528415 B2 JP S5528415B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Braking Arrangements (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6306472A JPS5528415B2 (sv) | 1972-06-23 | 1972-06-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6306472A JPS5528415B2 (sv) | 1972-06-23 | 1972-06-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4924072A JPS4924072A (sv) | 1974-03-04 |
| JPS5528415B2 true JPS5528415B2 (sv) | 1980-07-28 |
Family
ID=13218524
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6306472A Expired JPS5528415B2 (sv) | 1972-06-23 | 1972-06-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5528415B2 (sv) |
-
1972
- 1972-06-23 JP JP6306472A patent/JPS5528415B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4924072A (sv) | 1974-03-04 |