JPS552731B2 - - Google Patents
Info
- Publication number
- JPS552731B2 JPS552731B2 JP1402776A JP1402776A JPS552731B2 JP S552731 B2 JPS552731 B2 JP S552731B2 JP 1402776 A JP1402776 A JP 1402776A JP 1402776 A JP1402776 A JP 1402776A JP S552731 B2 JPS552731 B2 JP S552731B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Formation Of Insulating Films (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1402776A JPS5298473A (en) | 1976-02-13 | 1976-02-13 | Thin film material |
NLAANVRAGE7613799,A NL171942C (nl) | 1976-02-13 | 1976-12-10 | Werkwijze voor het vervaardigen van een halfgeleiderinrichting, waarbij op een halfgeleiderlichaam een menglaag van nitriden van silicium en germanium wordt aangebracht. |
US05/756,863 US4126880A (en) | 1976-02-13 | 1977-01-04 | Germanium-containing silicon nitride film |
DE2705902A DE2705902C3 (de) | 1976-02-13 | 1977-02-11 | Germanium enthaltender Siüciumnitrid-Film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1402776A JPS5298473A (en) | 1976-02-13 | 1976-02-13 | Thin film material |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5298473A JPS5298473A (en) | 1977-08-18 |
JPS552731B2 true JPS552731B2 (el) | 1980-01-22 |
Family
ID=11849675
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1402776A Granted JPS5298473A (en) | 1976-02-13 | 1976-02-13 | Thin film material |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5298473A (el) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6121165Y2 (el) * | 1980-05-27 | 1986-06-25 | ||
US20050287747A1 (en) * | 2004-06-29 | 2005-12-29 | International Business Machines Corporation | Doped nitride film, doped oxide film and other doped films |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5068085A (el) * | 1973-10-17 | 1975-06-07 |
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1976
- 1976-02-13 JP JP1402776A patent/JPS5298473A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5068085A (el) * | 1973-10-17 | 1975-06-07 |
Also Published As
Publication number | Publication date |
---|---|
JPS5298473A (en) | 1977-08-18 |