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JPS552731B2 - - Google Patents

Info

Publication number
JPS552731B2
JPS552731B2 JP1402776A JP1402776A JPS552731B2 JP S552731 B2 JPS552731 B2 JP S552731B2 JP 1402776 A JP1402776 A JP 1402776A JP 1402776 A JP1402776 A JP 1402776A JP S552731 B2 JPS552731 B2 JP S552731B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1402776A
Other languages
Japanese (ja)
Other versions
JPS5298473A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1402776A priority Critical patent/JPS5298473A/ja
Priority to NLAANVRAGE7613799,A priority patent/NL171942C/xx
Priority to US05/756,863 priority patent/US4126880A/en
Priority to DE2705902A priority patent/DE2705902C3/de
Publication of JPS5298473A publication Critical patent/JPS5298473A/ja
Publication of JPS552731B2 publication Critical patent/JPS552731B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
JP1402776A 1976-02-13 1976-02-13 Thin film material Granted JPS5298473A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP1402776A JPS5298473A (en) 1976-02-13 1976-02-13 Thin film material
NLAANVRAGE7613799,A NL171942C (nl) 1976-02-13 1976-12-10 Werkwijze voor het vervaardigen van een halfgeleiderinrichting, waarbij op een halfgeleiderlichaam een menglaag van nitriden van silicium en germanium wordt aangebracht.
US05/756,863 US4126880A (en) 1976-02-13 1977-01-04 Germanium-containing silicon nitride film
DE2705902A DE2705902C3 (de) 1976-02-13 1977-02-11 Germanium enthaltender Siüciumnitrid-Film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1402776A JPS5298473A (en) 1976-02-13 1976-02-13 Thin film material

Publications (2)

Publication Number Publication Date
JPS5298473A JPS5298473A (en) 1977-08-18
JPS552731B2 true JPS552731B2 (el) 1980-01-22

Family

ID=11849675

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1402776A Granted JPS5298473A (en) 1976-02-13 1976-02-13 Thin film material

Country Status (1)

Country Link
JP (1) JPS5298473A (el)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6121165Y2 (el) * 1980-05-27 1986-06-25
US20050287747A1 (en) * 2004-06-29 2005-12-29 International Business Machines Corporation Doped nitride film, doped oxide film and other doped films

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5068085A (el) * 1973-10-17 1975-06-07

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5068085A (el) * 1973-10-17 1975-06-07

Also Published As

Publication number Publication date
JPS5298473A (en) 1977-08-18

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